Apparatus for processing substrate

Patent metadata

Field	Value
Publication number	US-11850635-B2
Application number	US-202117402882-A
Country	US
Kind code	B2
Filing date	Aug 16, 2021
Priority date	Oct 22, 2020
Publication date	Dec 26, 2023
Grant date	Dec 26, 2023

Abstract

A substrate processing apparatus includes a support unit; a first nozzle for discharging a first rinse solution to a first area of the substrate; and a second nozzle for discharging a second rinse solution to a second area of the substrate, wherein the first nozzle discharges the first rinse solution to a first area during a first period so that the first area and the second area of the substrate are wetted by the first rinse solution, and some area of the substrate is not wetted by the first rinse solution, wherein the first nozzle discharges the first rinse solution to the first area and the second nozzle discharges the second rinse solution to the second area in a second period directly connected to the first period so that an entire upper surface of the substrate is wetted by the first rinse solution and the second rinse solution.

First claim

What is claimed is:

1. An apparatus for processing a substrate comprising:
a support unit that supports a substrate and is rotatable;
a first nozzle for discharging a first rinse solution to a first area of the substrate;
a second nozzle for discharging a second rinse solution to a second area of the substrate different from the first area; and
a control unit for controlling the first nozzle and the second nozzle,
wherein the control unit controls the first nozzle to discharge the first rinse solution to a first area during a first period so that the first area and the second area of the substrate are wetted by the first rinse solution, and some area of the substrate is not wetted by the first rinse solution,
wherein the control unit controls the first nozzle to discharge the first rinse solution to the first area and the second nozzle to discharge the second rinse solution to the second area in a second period directly connected to the first period so that an entire upper surface of the substrate is wetted by the first rinse solution and the second rinse solution, and
wherein the second period includes a section, in which a rotation speed of the substrate is a constant speed.

2. The apparatus of claim 1 , wherein the second area is located closer to an edge area of the substrate than the first area.

3. The apparatus of claim 2 , wherein some area of the substrate that is not wetted by the first rinse solution includes an edge area of the substrate.

4. The apparatus of claim 1 , wherein the first nozzle and the second nozzle are fixedly installed so as not to overlap a central area of the support unit in a horizontal direction and a vertical direction.

5. The apparatus of claim 1 , wherein the first period includes a section, in which a rotation speed of the substrate increases.

6. The apparatus of claim 1 , wherein an injection amount of the first nozzle is greater than an injection amount of the second nozzle during the second period.

7. An apparatus for processing a substrate comprising:
a support unit that supports a substrate and is rotatable;
a first nozzle for discharging a first rinse solution to a central area of the substrate;
a second nozzle for discharging a second rinse solution to a middle area of the substrate; and
a control unit for controlling the first nozzle and the second nozzle,
wherein, in an acceleration section, in which the substrate is rotated to a target speed after locating the substrate on the support unit, the control unit controls the first nozzle to discharge a first rinse solution to a central area of the substrate so that a central area and a middle area of the substrate are wetted by the first rinse solution and an edge area of the substrate is not wetted by the first rinse solution,
wherein, in a constant speed section directly connected to the acceleration section, the control unit controls the first nozzle to discharge the first rinse solution to a central area of the substrate and the second nozzle to discharge the second rinse solution to a middle area of the substrate.

8. The apparatus of claim 7 , wherein the first nozzle discharges a first rinse solution to a central area of the substrate and the second nozzle does not discharge a second rinse solution in a front section of the acceleration section,
wherein the first nozzle discharges the first rinse solution to a central area of the substrate and the second nozzle discharges the second rinse solution to a middle area of the substrate in a back section of the acceleration section.

9. The apparatus of claim 7 , wherein the first nozzle and the second nozzle are fixedly installed so as not to overlap a central area of the support unit in a horizontal direction and a vertical direction.

10. The apparatus of claim 7 , wherein an injection amount of the first nozzle is greater than an injection amount of the second nozzle during the constant speed section.

11. An apparatus for processing a substrate comprising:
a support unit that supports a substrate and is rotatable;
a first moving nozzle that waits in a first standby position, moves to a first supply position, and discharges a first chemical solution to the substrate;
a second moving nozzle that waits in a second standby position, moves to a second supply position, and discharges a second chemical solution to the substrate;
a first fixed nozzle for discharging a rinse solution to a first area of the substrate;
a second fixed nozzle for discharging a second rinse solution to an area of the substrate different from the first area; and
a control unit for controlling the first moving nozzle, the second moving nozzle, the first fixed nozzle, and the second fixed nozzle,
wherein the control unit controls the first fixed nozzle and the second fixed nozzle to discharge a rinse solution to the substrate in such a manner that the first fixed nozzle starts discharging a rinse solution first and the second fixed nozzle starts discharging a rinse solution with a time difference while the control unit controls the first moving nozzle to return to the first standby position after discharging the first chemical solution from the first supply position.

12. The apparatus of claim 11 , wherein the first fixed nozzle and the second fixed nozzle discharge a rinse solution to the substrate in a manner that the first fixed nozzle starts discharging a rinse solution first and the second fixed nozzle starts discharging a rinse solution with a time difference while the second moving nozzle moves from the second standby position to the second supply position.

13. The apparatus of claim 12 , wherein the returning of the first moving nozzle to the first standby position and the moving of the second moving nozzle to the second supply position occur simultaneously.

14. The apparatus of claim 11 , wherein the second area is located closer to an edge area of the substrate than the first area.

15. The apparatus of claim 11 , wherein the first fixed nozzle and the second fixed nozzle are fixedly installed so as not to overlap a central area of the support unit in a horizontal direction and a vertical direction.

16. The apparatus of claim 11 , wherein, in an acceleration section, in which the substrate is rotated to a target speed after locating the substrate on the support unit, the first fixed nozzle discharges a rinse solution to the substrate and the second fixed nozzle does not discharge a rinse solution.

17. The apparatus of claim 16 , wherein the first fixed nozzle and the second fixed nozzle discharge a rinse solution in a constant speed section directly connected to the acceleration section.

18. The apparatus of claim 17 , wherein an injection amount of the first fixed nozzle is greater than an injection amount of the second fixed nozzle during the constant speed section.

Assignees

• Semes Co Ltd

Inventors

• Son Dong Hee
• Kwak Ki Young

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/0408

  for drying · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title