Method for treating substrate involving supplying treatment liquid to peripheral area of substrate by second nozzle

Patent metadata

Field	Value
Publication number	US-11145520-B2
Application number	US-202016916246-A
Country	US
Kind code	B2
Filing date	Jun 30, 2020
Priority date	May 27, 2016
Publication date	Oct 12, 2021
Grant date	Oct 12, 2021

Abstract

Disclosed is a method for liquid-treating a substrate. In a method for treating a substrate, the substrate may be treated by supplying a treatment liquid onto the rotating substrate by using a first nozzle and a second nozzle, the first nozzle supplies the treatment liquid to an area including a central area on the substrate, and the second nozzle supplies the treatment liquid to a peripheral area of the substrate.

First claim

What is claimed is:

1. A method for treating a substrate, wherein the substrate is treated by supplying a treatment liquid onto the rotating substrate by using a first nozzle and a second nozzle,
wherein the first nozzle supplies the treatment liquid to an area including a central area on the substrate, and
wherein the second nozzle supplies the treatment liquid to a peripheral area of the substrate,
the method comprising a first supply operation of supplying the treatment liquid onto the substrate by using the first nozzle and supplying the treatment liquid to the peripheral area by using the second nozzle at the same time; and
thereafter, a second supply operation of supplying the treatment liquid by using the first nozzle and stopping supply of the treatment liquid by using the second nozzle;
wherein in the first supply operation, the first nozzle supplies the treatment liquid while moving a first supply point that is a supply point of the treatment liquid supplied from the first nozzle on the substrate,
wherein in the first supply operation, the second nozzle supplies the treatment liquid while a second supply point that is a supply point of the treatment liquid supplied from the second nozzle on the substrate moves only between a second location and a third location of the peripheral area,
wherein the second location is a location that is closer to the central area of the substrate than the third location,
wherein in the first supply operation, the first nozzle supplies the treatment liquid while the first supply point moves between the central area and the peripheral area of the substrate, and
wherein in the second supply operation, immediately after the first supply operation is performed, the first nozzle supplies the treatment liquid while the first supply point moves from a first location of the peripheral area to an end of the substrate.

2. The method of claim 1 , wherein the first supply operation is performed while the treatment liquid is supplied while the first supply point moves from a center of the substrate to the first location of the peripheral area once.

3. The method of claim 1 , wherein the first supply operation is performed while the first supply point moves from the central area to the peripheral area once.

4. The method of claim 1 , wherein the first supply operation is performed while the first supply point reciprocates between the central area and the peripheral area once.

5. The method of claim 1 , wherein in the second supply operation, the first nozzle discharges the treatment liquid while the first supply point is fixed to the central area after the treatment liquid is supplied while the first supply point is moved.

6. The method of claim 1 , further comprising:
before the first supply operation, a pre-wet operation of supplying a pre-wet liquid onto the substrate.

7. The method of claim 1 , wherein the pre-wet liquid is pure water (DIW).

8. The method of claim 1 , wherein in the first supply operation and the second supply operation, the substrate is rotated at 200 to 800 rpms.

9. The method of claim 1 , wherein in the first supply operation and the second supply operation, a time period for which the first supply point moves from the central area to the peripheral area once and a time period for which the first supply point moves from the peripheral area to the central area once are 1.0 to 1.2 seconds.

10. The method of claim 1 , wherein the treatment liquid is an organic solvent.

11. The method of claim 10 , wherein the organic solvent includes isopropyl alcohol (IPA).

12. The method of claim 1 , wherein the substrate is a wafer having a diameter of 300 mm, and
wherein the first location is a location that is spaced apart from the center of the wafer by 140 mm.

Assignees

• Semes Co Ltd

Inventors

• Lee Young Hun
• Lim Eui Sang

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• B08B3/024

  Cleaning by means of spray elements moving over the surface to be cleaned · CPC title

• B08B2203/0229

  Suction chambers for aspirating the sprayed liquid · CPC title

• H01L21/67051 Primary

  Electricity · mapped topic

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title