Systems, method and computer-accessible medium for providing balanced asymmetric interferometry for vibrationally isolated optical scanning probe(s)

Patent metadata

Field	Value
Publication number	US-11835545-B2
Application number	US-202117149236-A
Country	US
Kind code	B2
Filing date	Jan 14, 2021
Priority date	Jan 14, 2020
Publication date	Dec 5, 2023
Grant date	Dec 5, 2023

Abstract

An exemplary apparatus can provide radiation to a sample(s), which can include, for example, a radiation source arrangement configured to provide radiation, a beam splitter configured to split the radiation into (i) a first radiation, and (ii) a second radiation. An optical element can also be provided which, in operation, can, e.g., (a) receive the first radiation and the second radiation, (b) reflect the first radiation as a reference radiation, (c) provide the second radiation as illumination for the sample(s), (d) receive a resultant radiation from the sample(s) that can be based on the illumination from the second radiation, and (e) provide the reference radiation and the resultant radiation to be detected and used for interferometric imaging or spectroscopy.

First claim

What is claimed is:

1. An apparatus for providing radiation to at least one sample, comprising:
a radiation source arrangement configured to provide a radiation;
a beam splitter configured to split the radiation into (i) a first radiation, and (ii) a second radiation; and
an optical element which, in operation:
receives the first radiation and the second radiation,
reflects the first radiation as a reference radiation,
provides the second radiation as illumination for the at least one sample,
receives a resultant radiation from the at least one sample that is based on the illumination from the second radiation, and
provides the reference radiation and the resultant radiation to be detected and used for at least one of interferometric imaging or spectroscopy.

2. The apparatus of claim 1 , further comprising a variable path length retro-reflector configured to:
receive the first radiation,
vary the optical phase of the first radiation; and
provide the first radiation to the optical element.

3. The apparatus of claim 1 , wherein the optical element includes an objective lens.

4. The apparatus of claim 1 , wherein the optical element includes a concave focusing mirror.

5. The apparatus of claim 1 , wherein the first and second radiations are delivered collinearly at a distance that is less than about 2 centimeters from one another when the first radiation and the second radiation reach the optical element.

6. The apparatus of claim 1 , wherein the beam splitter and the optical element are provided at a distance that is less than about 5 feet apart from one another.

7. The apparatus of claim 1 , wherein the optical element has (i) a diameter focal aperture of about 1 cm and (ii) a diameter reference aperture of about 1 cm.

8. The apparatus of claim 1 , further comprising at least one radiation detector configured to receive the reference radiation and the resultant radiation as an interfered radiation, and generate at least one of at least one image or at least one spectrograph based on the interfered radiation.

9. The apparatus of claim 8 , wherein the at least one radiation detector is configured to register the second radiation at a time constant of about 60 ms.

10. The apparatus of claim 1 , further comprising an optical chopper configured to modulate the second radiation.

11. The apparatus of claim 10 , wherein the optical chopper is configured to modulate the second radiation at a speed of at least 200 Hz.

12. The apparatus of claim 1 , further comprising a scanning probe, wherein the optical element is located on or in the scanning probe.

13. The apparatus of claim 1 , wherein the optical element includes a dual-function objective.

14. The apparatus of claim 13 , wherein the dual-function objective includes a gold-coated off-axis parabolic mirror.

15. The apparatus of claim 1 , further comprising a measurement chamber, wherein the optical element is mounted on or in the measurement chamber.

16. The apparatus of claim 1 , further comprising an isolation platform, wherein the optical element is mounted on or in the isolation platform.

17. The apparatus of claim 16 , wherein the isolation platform is suspended from a further platform using a plurality of springs.

18. The apparatus of claim 1 , wherein the apparatus is mechanically fixed to an optical table supported by at least four vibration isolation legs.

19. The apparatus of claim 18 , wherein the vibration isolation legs are pneumatic vibration isolation legs.

20. A method for generating at least one image of at least one sample, comprising:
(a) providing a source radiation;
(b) splitting the source radiation into a first radiation and a second radiation;
(c) reflecting, by an optical element, the first radiation as a reference radiation;
(d) providing, by the optical element, the second radiation to the at least one sample;
(e) receiving, by the optical element, a resultant radiation from the at least one sample that is based on the second radiation; and
(f) generating the at least one image or spectrograph based on an interference between the reference radiation and the resultant radiation.

21. The method of claim 20 , wherein the first and second radiations are delivered collinearly at a distance that is less than about 2 centimeters from one another when the first radiation and the second radiation reach the optical element.

22. The method of claim 20 , wherein the beam splitter and the optical element are provided at a distance that is less than about 5 feet apart from one another.

23. The method of claim 20 , further comprising an optical chopper configured to modulate the second radiation.

24. The method of claim 20 , wherein an isolation platform is provided on or in which the optical element is mounted.

25. The apparatus of claim 1 , wherein the apparatus is mechanically fixed to an optical table supported by at least four vibration isolation legs.

Assignees

• Univ Columbia

Inventors

• Mcleod Alexander Swinton
• Xiong Lin
• Zhang Shuai
• Basov Dimitri N

Classifications

• G01Q20/02 Primary

  by optical means · CPC title

• G01B9/02

  Interferometers · CPC title

• G01Q30/18

  Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields · CPC title

• G02B21/0032

  Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06) · CPC title

• G01Q60/24

  AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes · CPC title