Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods

Patent metadata

Field	Value
Publication number	US-11823933-B2
Application number	US-202117521769-A
Country	US
Kind code	B2
Filing date	Nov 8, 2021
Priority date	Jun 23, 2017
Publication date	Nov 21, 2023
Grant date	Nov 21, 2023

Abstract

A side storage pod includes an outer enclosure having a sealing surface configured to couple to an EFEM and a side storage pod chamber having a body coupled to vertically-spaced storage members. Each of the vertically-spaced storage members is configured to support a corresponding substrate within the body. The side storage pod further includes a removable door. The removable door and the body are to seal relative to each other responsive to the removable door being in a closed position. A load-unload robot of the EFEM is to access the vertically-spaced storage members responsive to the removable door being in an open position. An environment within the side storage pod chamber is to be controlled to be one or more of: at first environmental conditions responsive to the removable door being in the closed position; or at second environmental conditions responsive to the removable door being in the open position.

First claim

What is claimed is:

1. A side storage pod of an equipment front end module (EFEM), the side storage pod comprising:
an outer enclosure having a sealing surface configured to couple to the EFEM;
a side storage pod chamber having a body coupled to a plurality of vertically-spaced storage members, wherein each of the plurality of vertically-spaced storage members is configured to support a corresponding substrate within the body; and
a door, wherein the door and the body are to seal relative to each other responsive to the door being in a closed position, wherein a load-unload robot of the EFEM is to access the plurality of vertically-spaced storage members responsive to the door being in an open position, wherein an environment within the side storage pod chamber is to be controlled to be one or more of: at first environmental conditions responsive to the door being in the closed position; or at second environmental conditions responsive to the door being in the open position.

2. The side storage pod of claim 1 , wherein a supply of gas is to be provided to the side storage pod chamber prior to the door being in the open position to purge the side storage pod chamber.

3. The side storage pod of claim 1 , wherein a supply of gas is to be provided to the side storage pod chamber responsive to the door being in the open position to deter gas from within the EFEM from entering the side storage pod chamber.

4. The side storage pod of claim 1 , wherein controlling the environment within the side storage pod chamber comprises controlling one or more of relative humidity, temperature, amount of oxygen, an amount of inert gas, or an amount of non-reactive gas.

5. The side storage pod of claim 1 , wherein controlling the environment within the side storage pod chamber comprises controlling one or more of gas flow rate into the side storage pod chamber or pressure in the side storage pod chamber.

6. The side storage pod of claim 1 , wherein the side storage pod comprises a controller and sensors to monitor and control the environment within the side storage pod chamber.

7. The side storage pod of claim 1 , wherein a robot blade of the load-unload robot is to be moved vertically to access the plurality of vertically-spaced storage members responsive to the door being in the open position.

8. The side storage pod of claim 1 further comprising an indexer operable to vertically move the side storage pod chamber to provide access to different subgroups of the plurality of vertically-spaced storage members by the load-unload robot in the EFEM.

9. The side storage pod of claim 1 further comprising an exhaust outlet.

10. An electronic device processing system comprising:
an equipment front end module (EFEM) comprising an EFEM chamber;
one or more load ports coupled to a front of the EFEM, wherein each of the one or more load ports is configured to support a substrate carrier; and
a side storage pod coupled to a side of the EFEM, the side storage pod comprising:
an outer enclosure having a sealing surface configured to couple to the EFEM;
a side storage pod chamber having a body coupled to a plurality of vertically-spaced storage members, wherein each of the plurality of vertically-spaced storage members is configured to support a corresponding substrate within the body; and
a door, wherein the door and the body are to seal relative to each other responsive to the door being in a closed position, wherein a load-unload robot of the EFEM is to access the plurality of vertically-spaced storage members responsive to the door being in an open position, wherein an environment within the side storage pod chamber is to be controlled to be one or more of: at first environmental conditions responsive to the door being in the closed position; or at second environmental conditions responsive to the door being in the open position.

11. The electronic device processing system of claim 10 , wherein a supply of gas is to be provided to the side storage pod chamber prior to the door being in the open position to purge the side storage pod chamber.

12. The electronic device processing system of claim 10 , wherein a supply of gas is to be provided to the side storage pod chamber responsive to the door being in the open position to deter gas from within the EFEM chamber from entering the side storage pod chamber.

13. The electronic device processing system of claim 10 , wherein controlling the environment within the side storage pod chamber comprises controlling one or more of relative humidity, temperature, amount of oxygen, an amount of inert gas, or an amount of non-reactive gas.

14. The electronic device processing system of claim 10 , wherein controlling the environment within the side storage pod chamber comprises controlling one or more of gas flow rate into the side storage pod chamber or pressure in the side storage pod chamber.

15. The electronic device processing system of claim 10 , wherein the side storage pod comprises a controller and sensors to monitor and control the environment within the side storage pod chamber.

16. The electronic device processing system of claim 10 , wherein a robot blade of the load-unload robot is to be moved vertically to access the plurality of vertically-spaced storage members responsive to the door being in the open position.

17. The electronic device processing system of claim 10 , wherein the side storage pod further comprises an indexer operable to vertically move the side storage pod chamber to provide access to different subgroups of the plurality of vertically-spaced storage members by the load-unload robot in the EFEM.

18. A method for transferring substrates in an electronic device processing system, the method comprising:
causing a door of a side storage pod to be in an open position, wherein the side storage pod is coupled to a side of an equipment front end module (EFEM), wherein one or more load ports are coupled to a front of the EFEM, wherein each of the one or more load ports is configured to support a substrate carrier, wherein the side storage pod comprises an outer enclosure having a sealing surface configured to couple to the EFEM, wherein the side storage pod comprises a side storage pod chamber having a body coupled to a plurality of vertically-spaced storage members, wherein each of the plurality of vertically-spaced storage members is configured to support a corresponding substrate within the body;
controlling environment within the side storage pod chamber to be one or more of: at first environmental conditions responsive to the door being in a closed position; or at second environmental conditions responsive to the door being in the open position;
responsive to the door being in the open position, retrieving, using a load-unload robot of the EFEM, a substrate positioned on a first vertically-spaced storage member of the plurality of vertically-spaced storage members of the side storage pod chamber, wherein the door and the body of the side storage pod are to seal relative to each other responsive to the door being in the closed position; and
transferring, using the load-unload robot, the substrate from the side storage pod chamber to an EFEM chamber of the EFEM.

19. The method of claim 18 , wherein the controlling of the environment comprises providing a supply of gas to the side storage pod chamber prior to the door being in the open position to purge the side storage pod chamber.

20. The method of claim 18 , wherein the controlling of the environment comprises providing a supply of ga

Assignees

• Applied Materials Inc

Inventors

• Pannese Patrick

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3411 Primary

  involving loading and unloading of wafers · CPC title

• H10P72/3408

  Docking arrangements · CPC title

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title