Substrate processing systems, apparatus, and methods with substrate carrier and purge chamber environmental controls

Patent metadata

Field	Value
Publication number	US-2016147235-A1
Application number	US-201514931520-A
Country	US
Kind code	A1
Filing date	Nov 3, 2015
Priority date	Nov 25, 2014
Publication date	May 26, 2016
Grant date	—

Abstract

Electronic device processing systems including environmental control of the factory interface, a carrier purge chamber, and one or more substrate carriers are described. One electronic device processing system has a factory interface having a factory interface chamber, one or more substrate carriers coupled to the factory interface, and an environmental control system coupled to the factory interface, the carrier purge chamber, and the one or more substrate carriers and operational to control an environment at least within the factory interface chamber, carrier purge chamber, and the one or more substrate carriers. Methods for processing substrates are described, as are numerous other aspects.

First claim

The invention claimed is:

1 . An electronic device processing system, comprising:
a factory interface including a factory interface chamber; one or more substrate carriers coupled to the factory interface; and an environmental control system coupled to the factory interface and to the one or more substrate carriers and operable to control an environment within the one or more substrate carriers and a factory interface chamber of the factory interface.

2 . The electronic device processing system of claim 1 , wherein the environmental control system comprises:
a carrier environment control system that is operable to provide an inert gas to purge the one or more substrate carriers; and a factory interface environmental control system that is operable to provide an inert gas to the factory interface chamber.

3 . The electronic device processing system of claim 1 , wherein the environmental control system comprises:
a carrier environment control system that is operable to provide an inert gas to the one or more substrate carriers; and a carrier purge chamber environmental control system that is operable to provide an inert gas to a carrier purge chamber sealed to a wall of the factory interface.

4 . The electronic device processing system of claim 1 , wherein the control of the environment within the one or more substrate carriers and a factory interface chamber includes providing an inert gas to the one or more substrate carriers and the factory interface chamber that comprises argon, N 2 gas, or helium.

5 . The electronic device processing system of claim 1 , wherein the environmental control system is operational to control an amount of O 2 , or an amount of an inert gas within the factory interface chamber and the one or more substrate carriers.

6 . The electronic device processing system of claim 1 , comprising a humidity sensor adapted to sense relative humidity of the factory interface chamber or the one or more substrate carriers.

7 . The electronic device processing system of claim 1 comprising an oxygen sensor adapted to sense an oxygen level of the factory interface chamber or the one or more substrate carriers.

8 . The electronic device processing system of claim 1 , comprising a controller configured and adapted to control one or more of:
a relative humidity, an amount of O 2 , temperature, an amount of inert gas, or an amount of chemical contaminate within the factory interface chamber or the one or more substrate carriers.

9 . The electronic device processing system of claim 1 , wherein the environmental control system comprises:
a controller; and an inert gas supply responsive to the controller and configured and adapted to flow an amount of inert gas into the one or more substrate carriers, and the factory interface chamber of the factory interface.

10 . The electronic device processing system of claim 1 , wherein the environmental control system comprises a carrier environmental control system coupled to a bottom of the one or more substrate carriers.

11 . The electronic device processing system of claim 1 , comprising a flange clamping system configured to seal a flange of the one or more substrate carriers to an outside wall of the factory interface.

12 . The electronic device processing system of claim 1 , comprising:
a carrier purge chamber environmental control system configured and adapted to purge the carrier purge chamber until certain environmental conditions are met.

13 . The electronic device processing system of claim 12 , wherein the carrier purge chamber is formed by at least portions of a load port back plate and door opener.

14 . An electronic device processing system, comprising:
a factory interface including a factory interface chamber; one or more substrate carriers coupled to the factory interface; a carrier purge chamber between the factory interface chamber and the one or more substrate carriers; and an environmental control system coupled to the carrier purge chamber and the one or more substrate carriers and operable to control an environment within the one or more substrate carriers and the carrier purge chamber.

15 . A method of processing substrates within an electronic device processing system, comprising:
providing a factory interface including a factory interface chamber; providing one or more substrate carriers docked to the factory interface; providing a carrier purge chamber between the factory interface chamber and the one or more substrate carriers; and controlling environmental conditions within the carrier purge chamber and the one or more substrate carriers.

16 . The method of claim 15 , comprising meeting environmental preconditions within the one or more substrate carriers before opening a substrate carrier door of the one or more substrate carriers.

17 . The method of claim 15 , wherein environmental conditions within the factory interface chamber and the one or more substrate carriers comprise one or more of:
a relative humidity below a predefined relative humidity threshold; a temperature below a predefined temperature threshold; an amount of O 2 below a predefined O 2 threshold; an amount of an inert gas below a predefined flow threshold; and an amount of chemical contaminate below a predefined chemical contaminant threshold.

18 . The method of claim 15 , wherein controlling the environmental conditions in the one or more substrate carriers is met by flowing an inert gas into a bottom entry of the one or more substrate carriers and flowing carrier environment out through a bottom exit.

19 . The method of claim 15 , comprising:
providing a chamber environmental control system including one or more carrier purge chambers associated with the one or more substrate carriers; and controlling inert gas provided to the one or more carrier purge chambers to purge an environment of the one or more carrier purge chambers before fully opening a carrier door of the one or more substrate carriers.

20 . The method of claim 19 , comprising retracting a carrier purge housing from an inside wall of the factory interface only when one or both of a relative humidity threshold or an oxygen threshold are met.

21 . A method of processing substrates within an electronic device processing system, comprising:
providing a factory interface including a factory interface chamber, one or more substrate carriers docked to the factory interface, and one or more carrier purge chambers within the factory interface chamber; and controlling environmental conditions within the factory interface chamber, the one or more carrier purge chambers, and the one or more substrate carriers.

22 . An electronic device processing system, comprising:
a factory interface including a factory interface chamber; one or more substrate carriers coupled to the factory interface; a carrier purge chamber between the factory interface chamber and the one or more substrate carriers wherein the carrier purge chamber is formed by at least portions of a load port back plate and door opener; and a carrier purge chamber environmental control system configured and adapted to purge the carrier purge chamber until certain environmental conditions are met.

Assignees

• Applied Materials Inc

Inventors

• Rice Michael R
• Hruzek Dean C

Classifications

• H10P72/3408 Primary

  Docking arrangements · CPC title

• G05B15/02 Primary

  electric · CPC title

• G05D7/06 Primary

  characterised by the use of electric means {(G05D7/005 takes precedence)} · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title