Apparatus and method for solvent vapour annealing of a block copolymer

Patent metadata

Field	Value
Publication number	US-11823902-B2
Application number	US-201916978961-A
Country	US
Kind code	B2
Filing date	Mar 19, 2019
Priority date	Mar 22, 2018
Publication date	Nov 21, 2023
Grant date	Nov 21, 2023

Abstract

An apparatus and method which may be used for fabricating nanoscale devices are disclosed. The apparatus comprises measurement means configured to measure swelling of a block copolymer during solvent vapour annealing of the block copolymer. The apparatus also comprises temperature control means configured to receive a control signal indicative of the swelling of the block copolymer. The temperature control means can then control the temperature of the block copolymer as indicated by the control signal.

First claim

We claim:

1. An apparatus comprising:
an optical meter configured to measure a rate of swelling of a block copolymer during solvent vapour annealing of the block copolymer; and
a temperature controller configured to receive a proportional integral derivative control signal indicative of the swelling of the block copolymer and to vary the temperature of the block copolymer as indicated by the control signal to reduce dewetting of the block copolymer to control the rate of the swelling of the block copolymer.

2. An apparatus as claimed in claim 1 wherein the temperature controller comprises a thermoelectric cooler.

3. An apparatus as claimed in claim 2 wherein the temperature controller comprises control circuitry configured to receive the control signal indicative of the swelling of the block copolymer from the optical meter and control the thermoelectric cooler in response to the control signal.

4. An apparatus as claimed in claim 1 comprising a substrate configured to enable pattern formation of the block copolymer wherein the substrate is configured to enable the temperature controller to control the temperature of the substrate.

5. An apparatus a claimed in claim 4 wherein the substrate is configured to receive a plurality of wafers for pattern formation of the block copolymer.

6. An apparatus as claimed in claim 1 comprising a chamber configured to enable solvent vapour annealing of the block copolymer.

7. An apparatus as claimed in claim 6 comprising injector configured to inject a solvent directly into the chamber, wherein the injector is arranged to inject a fixed mass of solvent directly into the chamber so as to achieve a defined solvent partial pressure within the chamber.

8. An apparatus as claimed in claim 6 comprising inlet configured to introduce turbulent flow of solvent within the chamber.

9. An apparatus as claimed in claim 1 wherein the optical meter comprises at least one of a reflectometer or an ellipsometer.

10. An apparatus as claimed in claim 9 wherein the optical meter is configured to measure the thickness of the polymer.

11. An apparatus as claimed in claim 1 wherein the block copolymer has a high Flory Huggins parameter.

12. A method comprising:
measuring a rate of swelling of a block copolymer during solvent vapour annealing of the block copolymer; and
varying the temperature of the block copolymer using a proportional integral derivative control signal to reduce dewetting of the block copolymer based upon the measured rate of swelling of the block copolymer to control the rate of the swelling of the block copolymer.

13. A method as claimed in claim 12 wherein varying the temperature comprises increasing or decreasing the temperature in response to the measured swelling.

14. A method as claimed in claim 12 comprising providing the block copolymer on a substrate in a chamber to enable solvent vapour annealing of the block copolymer and injecting a solvent directly into the chamber.

15. A method as claimed in claim 12 wherein the varying the temperature comprises thermoelectric cooling.

16. A method as claimed in claim 12 comprising patterning the block copolymer.

17. A method as claimed in claim 16 comprising using a substrate to receive a plurality of wafers for patterning.

18. A method as claimed in claim 12 comprising vapour annealing of the block copolymer.

19. A method as claimed in claim 18 comprising introducing turbulent flow of solvent.

20. A method as claimed in claim 12 wherein the varying of the temperature comprises using a reflectometer.

Assignees

• Nokia Technologies Oy

Inventors

• Lundy Ross
• Enright Ryan

Classifications

• H10P74/238

  comprising acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection or in-situ thickness measurement · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P14/6516

  of treatments performed after formation of the materials · CPC title

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title

• H10P14/683

  carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC · CPC title