3D multipurpose scanning microscopy probes

Patent metadata

Field	Value
Publication number	US-11815527-B2
Application number	US-202117520318-A
Country	US
Kind code	B2
Filing date	Nov 5, 2021
Priority date	Nov 6, 2020
Publication date	Nov 14, 2023
Grant date	Nov 14, 2023

Abstract

Disclosed is a multipurpose scanning microscopy probe comprising a probe holder, a cantilever connected to the probe holder, and a probe tip connected to the cantilever, wherein the probe tip is a three-dimensional geometry, and wherein the probe tip is a 3D printed part. In some embodiments the probe is made from SU8 epoxy-based resin. In some embodiments the probe is made from a combination of SU8 and nanomaterial such as carbon nanotubes. In some embodiments the probe includes cavities and voids. In some embodies the probe includes fluidic features and elements. Scanning microscopy probe methods are also disclosed.

First claim

What is claimed is:

1. A multipurpose scanning microscopy probe, comprising:
a probe holder;
a cantilever connected to the probe holder; and
a scanning microscopy probe tip connected to the cantilever, wherein the probe tip is a three-dimensional geometry, and wherein the probe tip is a 3D printed part.

2. The probe of claim 1 , wherein the probe holder and the cantilever are 3D printed parts.

3. The probe of claim 1 , wherein the probe holder, the cantilever, and the probe tip are 3D printed as a single part.

4. The probe of claim 1 , wherein the probe comprises at least one material selected from the group consisting of SU8 epoxy-based resin, photoresist, polymers, and a nanomaterial.

5. The probe of claim 4 , wherein the nanomaterial comprises at least one material selected from the group consisting of carbon nanotubes, nanorods, biomolecules and nanoparticles.

6. The probe of claim 5 , wherein the nanomaterial is embedded in the probe tip.

7. The probe of claim 1 , wherein the probe tip is post-processed via at least one process selected from the group consisting of a focused ion beam etching, a chemical vapor deposition, a sputtering, and a reactive ion etching.

8. The probe of claim 1 , wherein the probe tip includes a hemispherical cavity.

9. The probe of claim 1 , wherein the probe comprises at least one shape selected from the group consisting of a conical, a spring, a high aspect ratio, a spherical, a cylindrical, a dimple, a hooked, a shovel, a flat, and a colloidal shape.

10. The probe of claim 1 , wherein the probe tip includes at least one aperture and at least one fluidic element, wherein the at least fluidic element comprises at least one shape selected from the group consisting of a mesofluidic channel, a microfluidic channel, a nanofluidic channel, a straight channel, a serpentine channel, a filter, a chamber, a shape varying fluidic element, a 3D fluidic element, and a cross-sectional shape varying fluidic element, and wherein the at least one aperture comprises at least one shape selected from the group consisting of a circular shape, an oval shape, a rectangular shape, and a crescent shape.

11. The probe of claim 1 , wherein the cantilever comprises at least one shape selected from the group consisting of a T-shape, a rectangular shape, and L-shape, a trapezoidal shape, a variable-width shape, a triangular shape, and a variable cross-sectional shape, wherein the variable cross-sectional shape comprises at least one shape selected from the group consisting of a rectangular shape, a trapezoidal shape, a triangular shape, and a curved shape.

12. The probe of claim 1 , wherein the cantilever is configured to accept at least one probe tip of varying shapes.

13. The probe of claim 1 , wherein the probe is coated with a layer comprising at least one material selected from the group consisting of a metal, a polymer, and a biological material.

14. A multipurpose scanning microscopy probe production method, comprising:
providing a 3D printed scanning microscopy probe design comprising a probe holder, a cantilever connected to the probe holder, and a scanning microscopy probe tip connected to the cantilever, wherein the probe tip is a three-dimensional geometry; and
3D printing a scanning microscopy probe.

15. The method of claim 14 , wherein the probe is 3D printed from at least one material selected from the group consisting of polymers, SU8 epoxy-based resin, and photoresist.

16. The method of claim 14 , further comprising dipping the probe into a nanomaterial population to embed the nanomaterial in the probe while the probe is in a cured or a semi-cured state.

17. The method of claim 14 , wherein the probe is 3D printed using 2-photon 3D printing.

18. The method of claim 14 , wherein the probe design includes at least one aperture and at least one fluidic element.

19. The method of claim 14 , further comprising post-processing the probe via at least one process selected from the group consisting of a focused ion beam etching, a chemical vapor deposition, a sputtering, and a reactive ion etching.

20. A scanning microscopy method, comprising:
providing a 3D printed scanning microscopy probe comprising a probe holder, a cantilever connected to the probe holder, and a scanning microscopy probe tip connected to the cantilever, wherein the probe tip is a three-dimensional geometry; and
performing a scanning microscopy operation with the 3D printed probe, wherein the scanning microscopy operation comprises at least one process selected from the group consisting of scanning probe microscopy (SPM), atomic force microscopy (AFM), profilometry, nanoindentation, nano-injection, nano-aspiration, nano-manipulation, micro-manipulation, nano-fluidic sampling and micro-fluidic sampling.

Assignees

• New York Univ In Abu Dhabi Corporation
• Univ New York

Inventors

• Qasaimeh Mohammad A
• Glia Ayoub

Classifications

• G01Q60/38 Primary

  Probes, their manufacture, or their related instrumentation, e.g. holders · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q70/12

  Nanotube tips · CPC title

• G01Q70/14

  Particular materials · CPC title

• G01Q70/06

  Probe tip arrays · CPC title