Mirror plate for a fabry-perot interferometer and a fabry-perot interferometer
US-10495514-B2 · Dec 3, 2019 · US
US11796391B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11796391-B2 |
| Application number | US-202017634280-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 6, 2020 |
| Priority date | Oct 9, 2019 |
| Publication date | Oct 24, 2023 |
| Grant date | Oct 24, 2023 |
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A light detection device includes: a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter disposed in a first support region of the first support part; and a temperature detector, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction.
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The invention claimed is: 1. A light detection device comprising: a wiring board; a first support part disposed on a mounting surface of the wiring board; a Fabry-Perot interference filter having a first mirror part and a second mirror part between which a distance is variable and having an outer edge portion disposed in a first support region of the first support part; a light detector disposed on the mounting surface to face the first mirror part and the second mirror part on one side of the first support part; and a temperature detector disposed on the mounting surface, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the Fabry-Perot interference filter when seen in a first direction perpendicular to the mounting surface and such that at least a part of the temperature detector overlaps a part of the first support part when seen in a second direction in which the first support part and the light detector are aligned with each other, and wherein a first distance between the temperature detector and the first support part in the second direction is smaller than a first width of the first support region in the second direction. 2. The light detection device according to claim 1 , further comprising a second support part disposed on the mounting surface to face the first support part with the light detector interposed therebetween in the second direction, wherein the outer edge portion of the Fabry-Perot interference filter is disposed in a second support region of the second support part, wherein the temperature detector is disposed on the mounting surface such that at least a part of the temperature detector overlaps a part of the second support part when seen in the second direction, and wherein a second distance between the temperature detector and the second support part in the second direction is smaller than a second width of the second support region in the second direction. 3. The light detection device according to claim 2 , wherein the outer edge portion of the Fabry-Perot interference filter is disposed in the first support region and the second support region such that the first width and the second width are equal to each other, and wherein the temperature detector is disposed on the mounting surface such that the first distance and the second distance are equal to each other. 4. The light detection device according to claim 2 , wherein, in a space which is located between the wiring board and the Fabry-Perot interference filter in the first direction and is located between the first support part and the second support part in the second direction, a value obtained by dividing a width of the space in a third direction perpendicular to both the first direction and the second direction by a width of the space in the second direction is 1.5 or more. 5. The light detection device according to claim 2 , wherein the wiring board has a long shape having a third direction perpendicular to both the first direction and the second direction as a longitudinal direction, and wherein each of the first support part and the second support part is disposed on the mounting surface to extend along each of both edge portions of the wiring board in the second direction. 6. The light detection device according to claim 1 , further comprising: a placement part on which the wiring board is disposed; a first terminal and a second terminal provided in the placement part; a first wire electrically connecting one electrode of the light detector and the first terminal; and a second wire and a third wire electrically connecting the other electrode of the light detector and the second terminal, wherein the wiring board has a wiring having a first electrode pad electrically connected to the one electrode of the light detector on the mounting surface and provided on the mounting surface, and a second electrode pad provided on the mounting surface, wherein the first wire electrically connects the first electrode pad and the first terminal, wherein the second wire electrically connects the other electrode of the light detector and the second electrode pad, wherein the third wire electrically connects the second electrode pad and the second terminal, and wherein the first electrode pad and the second electrode pad are located outside the Fabry-Perot interference filter when seen in the first direction. 7. The light detection device according to claim 1 , further comprising: a placement part on which the wiring board is disposed; a first terminal and a second terminal provided in the placement part; a first wire electrically connecting one electrode of the light detector and the first terminal; and a second wire electrically connecting the other electrode of the light detector and the second terminal, wherein the wiring board has a wiring having a first electrode pad electrically connected to the one electrode of the light detector on the mounting surface and provided on the mounting surface, wherein the first wire electrically connects the first electrode pad and the first terminal, wherein the second wire electrically connects the other electrode of the light detector and the second terminal, and wherein the first electrode pad is located outside the Fabry-Perot interference filter when seen in the first direction.
using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title
Constructional arrangements for removing other types of optical noise or for performing calibration · CPC title
Interferometric spectrometry · CPC title
designed for the infrared light · CPC title
based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title
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