Light-detecting device

Patent metadata

Field	Value
Publication number	US-2016245696-A1
Application number	US-201415031780-A
Country	US
Kind code	A1
Filing date	Oct 31, 2014
Priority date	Oct 31, 2013
Publication date	Aug 25, 2016
Grant date	—

Abstract

A spectral sensor 1 A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4 A and 4 B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4 A and 4 B to each other. The die bond resin 5 has one opening A 2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.

First claim

1 . A light-detecting device comprising:
a Fabry-Perot interference filter which has a light transmission region; a light detector which detects light having transmitted the light transmission region; a support member which supports the Fabry-Perot interference filter in a surrounding region of the light transmission region; and an adhesive portion which adheres the Fabry-Perot interference filter and the support member to each other, wherein the adhesive portion has an opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.

2 . The light-detecting device according to claim 1 , further comprising:
a wire connection portion to which one end of a wire electrically connected to the light detector or the Fabry-Perot interference filter is connected and which inputs or outputs an electric signal with respect to the light detector or the Fabry-Perot interference filter, wherein a top surface of the wire connection portion is disposed at a position lower than a position of a top surface of the Fabry-Perot interference filter.

3 . The light-detecting device according to claim 2 ,
wherein the top surface of the wire connection portion is disposed at a position lower than a position of a top surface of the support member.

4 . The light-detecting device according to claim 2 ,
wherein the wire connection portion includes a first wire connection portion electrically connected to the light detector and a second wire connection portion electrically connected to the Fabry-Perot interference filter, and a first direction in which a distance between the first wire connection portion and the Fabry-Perot interference filter becomes shortest crosses a second direction in which a distance between the second wire connection portion and the Fabry-Perot interference filter becomes shortest.

5 . The light-detecting device according to claim 1 ,
wherein the adhesive portion is provided at one side of the Fabry-Perot interference filter and one side adjacent thereto, when viewed from the transmission direction.

6 . The light-detecting device according to claim 1 , further comprising:
a wiring substrate, wherein the light detector and the support member are fixed on the wiring substrate.

7 . The light-detecting device according to claim 1 ,
wherein the support member is fixed on the light detector.

8 . The light-detecting device according to claim 1 ,
wherein the adhesive portion is provided at only one side of the Fabry-Perot interference filter, when viewed from the transmission direction.

9 . The light-detecting device according to claim 1 ,
wherein the support member has an opening communicating with the inner side of the surrounding region and the outer side of the surrounding region, when viewed from the transmission direction.

10 . The light-detecting device according to claim 1 ,
wherein the Fabry-Perot interference filter has a bonding pad, and the support member is disposed at a position corresponding to the bonding pad, when viewed from the transmission direction.

11 . The light-detecting device according to claim 1 ,
wherein the support member is separated from the light transmission region, when viewed from the transmission direction.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Shibayama Katsumi
• Kasahara Takashi
• Hirose Masaki
• Kawai Toshimitsu

Classifications

• G01J3/45

  Interferometric spectrometry · CPC title

• G01J3/26 Primary

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G01J5/20

  using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title

• G02B26/001

  based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title

• G01J5/04

  Casings · CPC title