Light-detecting device

Patent metadata

Field	Value
Publication number	US-2016245697-A1
Application number	US-201415031786-A
Country	US
Kind code	A1
Filing date	Oct 31, 2014
Priority date	Oct 31, 2013
Publication date	Aug 25, 2016
Grant date	—

Abstract

A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.

First claim

1 . light-detecting device comprising:
a Fabry-Perot interference filter having a first mirror and a second mirror and is provided with an opening to pass light transmitted according to a distance between the first mirror and the second mirror along a predetermined direction, the distance between the first mirror and the second mirror being variable; a light detector having a light reception unit to receive the light having passed through the opening; a wiring substrate, the light detector being mounted on the wiring substrate; and a support member supporting the Fabry-Perot interference filter on the wiring substrate, such that a second space is formed between the Fabry-Perot interference filter and the wiring substrate, the second space being continuous with a first space in the opening and including the first space when viewed from the predetermined direction, wherein the light detector is disposed in the second space, and the light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the predetermined direction.

2 . The light-detecting device according to claim 1 , wherein the light detector is disposed in the region corresponding to the first space in the second space, when viewed from the predetermined direction.

3 . The light-detecting device according to claim 1 , further comprising:
a mounting component mounted on the wiring substrate in the second space, wherein the mounting component is disposed outside the region corresponding to the first space in the second space, when viewed from the predetermined direction.

4 . The light-detecting device according to claim 1 , further comprising:
a package accommodating the Fabry-Perot interference filter, the light detector, the wiring substrate, and the support member and having a light incidence unit to let light incident on the Fabry-Perot interference filter from the outside, wherein the light incidence unit is included in the Fabry-Perot interference filter when viewed from the predetermined direction.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Shibayama Katsumi
• Kasahara Takashi
• Hirose Masaki
• Kawai Toshimitsu

Classifications

• G01J3/26 Primary

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G01J3/0286

  Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum · CPC title

• G01J5/20

  using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title

• G01J5/04

  Casings · CPC title

• G02B26/001

  based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26) · CPC title