Inclination adjusting mechanism

Patent metadata

Field	Value
Publication number	US-11794295-B2
Application number	US-202117141642-A
Country	US
Kind code	B2
Filing date	Jan 5, 2021
Priority date	Jan 15, 2020
Publication date	Oct 24, 2023
Grant date	Oct 24, 2023

Abstract

There is provided an inclination adjusting mechanism including an annular upper plate that has an upper surface for connecting a table and a lower surface inclined relative to the upper surface, an annular lower plate that has an upper surface parallel to the lower surface of the upper plate and a lower surface parallel to the upper surface of the upper plate and facing an upper surface of a base, an upper rotating mechanism that rotates the upper plate, a lower rotating mechanism that rotates the lower plate, a first bearing provided between the lower surface of the upper plate and the upper surface of the lower plate, a second bearing provided between the lower surface of the lower plate and the upper surface of the base, and a connecting mechanism that connects the upper plate, the lower plate, and the base.

First claim

What is claimed is:

1. An inclination adjusting mechanism that is disposed between a base of a processing apparatus and a chuck table having a holding surface for holding a workpiece and that adjusts an inclination of the holding surface, the inclination adjusting mechanism comprising:
an annular upper ring plate that has an upper surface for connecting the chuck table and a lower surface inclined relative to the upper surface;
an annular lower ring plate that has an upper surface parallel to the lower surface of the upper ring plate and a lower surface parallel to the upper surface of the upper ring plate and facing an upper surface of the base;
an upper rotating mechanism that rotates the upper ring plate with a first axis as a rotational axis, the first axis being perpendicular to the inclined lower surface of the upper ring plate and passing through a center of the upper ring plate;
a lower rotating mechanism that rotates the lower ring plate with a second axis as a rotational axis, the second axis being perpendicular to the lower surface of the lower ring plate and passing through the center of the upper ring plate;
a first bearing between the lower surface of the upper ring plate and the upper surface of the lower ring plate;
a second bearing between the lower surface of the lower ring plate and the upper surface of the base; and
a connecting mechanism that connects the upper ring plate, the lower ring plate, and the base,
wherein the upper ring plate, the lower ring plate, and the base are connected by the connecting mechanism after the inclination of the holding surface is adjusted by rotating one of or both the upper ring plate and the lower ring plate.

2. The inclination adjusting mechanism according to claim 1 ,
wherein the first bearing and the second bearing each include an air bearing, and
the connecting mechanism causes a flow channel for forming the air bearings to communicate with a suction source.

3. The inclination adjusting mechanism according to claim 1 ,
wherein the connecting mechanism includes an electromagnet capable of magnetically attach the upper ring plate, the lower ring plate, and the base to one another.

Assignees

• Disco Corp

Inventors

• Yamahata Ichiro

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0428

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• B23Q3/04 Primary

  adjustable in inclination · CPC title