Frame fixing jig

Patent metadata

Field	Value
Publication number	US-10668594-B2
Application number	US-201715725792-A
Country	US
Kind code	B2
Filing date	Oct 5, 2017
Priority date	Oct 7, 2016
Publication date	Jun 2, 2020
Grant date	Jun 2, 2020

Abstract

A frame fixing jig for mounting on a chuck table has a chuck portion for holding a workpiece in an annular frame, and a body portion for supporting the chuck portion. A frame support member (FSM) supports the annular frame, and a ring presses the frame against the FSM. The FSM has a through hole. The ring has an annular base portion and an engaging portion. The engaging portion can be inserted through the through hole, thereby engaging the FSM. The engaging portion includes a rotating shaft extending through the annular base portion, a knob fixed to the upper end of the shaft, and a plate fixed to the lower end. The surface around the lower end of the through hole or the upper surface of the plate is formed with an inclined surface for lowering the rotating shaft by rotating the plate inserted through the through hole.

First claim

What is claimed is:

1. A frame fixing jig adapted to be mounted on a chuck table composed of a chuck portion and a body portion for supporting the chuck portion, the chuck portion having a holding surface for holding a workpiece supported through an adhesive tape to an annular frame having an opening, the annular frame being attached to a peripheral portion of the adhesive tape so that the opening is closed by a central portion of the adhesive tape, the workpiece is attached to the central portion of the adhesive tape, the frame fixing jig comprising:
a frame support member having an upper surface for supporting the annular frame, the frame support member being adapted to be provided outside the chuck portion of the chuck table and fixed to the body portion of the chuck table, the frame support member having a through hole as an engaged portion; and
a presser ring for pressing the annular frame against the frame support member, the presser ring having an annular base portion and an engaging portion supported by the annular base portion, the engaging portion being adapted to be inserted through both a through hole of the annular base portion and the through hole of the frame support member, thereby engaging the frame support member;
the engaging portion including a rotating shaft extending through the annular base portion, a knob fixed to the upper end of the rotating shaft, and a plate fixed to the lower end of the rotating shaft;
the surface around the lower end of the through hole of the frame support member being formed with at least a pair of inclined surfaces, whereby the inclined surfaces are located on opposite sides of the through hole and are inclined downwardly in opposite directions for lowering the rotating shaft by rotating the plate inserted through the through hole;
whereby when the knob is rotated about the axis of the rotating shaft to thereby rotate the plate, after the rotating shaft and the plate have been inserted through the through hole of the annular base portion and the through hole of the frame support member, the upper surface of the plate comes into sliding contact with the surface around the lower end of the through hole of the frame support member, so that the rotating shaft is lowered by the operation of the inclined surfaces, and a lower surface of the knob is accordingly pressed against the upper surface of the annular base portion of the presser ring, thereby fixing the annular frame to the frame support member.

2. A frame fixing jig adapted to be mounted on a chuck table composed of a chuck portion and a body portion for supporting the chuck portion, the chuck portion having a holding surface for holding a workpiece supported through an adhesive tape to an annular frame having an opening, the annular frame being attached to a peripheral portion of the adhesive tape so that the opening is closed by a central portion of the adhesive tape, the workpiece is attached to the central portion of the adhesive tape, the frame fixing jig comprising:
a frame support member having an upper surface for supporting the annular frame, the frame support member being adapted to be provided outside the chuck portion of the chuck table and fixed to the body portion of the chuck table, the frame support member having a through hole as an engaged portion; and
a presser ring for pressing the annular frame against the frame support member, the presser ring having an annular base portion and an engaging portion supported by the annular base portion, the engaging portion being adapted to be inserted through both a through hole of the annular base portion and the through hole of the frame support member, thereby engaging the frame support member;
the engaging portion including a rotating shaft extending through the annular base portion, a knob fixed to the upper end of the rotating shaft, and a plate fixed to the lower end of the rotating shaft;
wherein an upper surface of the plate is formed with a pair of inclined surfaces, whereby the inclined surfaces are located on opposite sides of the rotating shaft and are inclined downwardly in opposite directions for lowering the rotating shaft by rotating the plate inserted through the through hole;
whereby when the knob is rotated about the axis of the rotating shaft to thereby rotate the plate, after the rotating shaft and the plate have been inserted through the through hole of the annular base portion and the through hole of the frame support member, the upper surface of the plate comes into sliding contact with a surface around the lower end of the through hole of the frame support member, so that the rotating shaft is lowered by the operation of the inclined surfaces, and a lower surface of the knob is accordingly pressed against the upper surface of the annular base portion of the presser ring, thereby fixing the annular frame to the frame support member.

Assignees

• Disco Corp

Inventors

• Ando Shigeru

Classifications

• H01L21/6836

  Electricity · mapped topic

• B24B41/06 Primary

  Work supports, e.g. adjustable steadies (B24B37/27 takes precedence) · CPC title

• B24B7/228

  for grinding thin, brittle parts, e.g. semiconductors, wafers (grinding edges of thin, brittle parts B24B9/065) · CPC title

• H10P72/7402

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title