FinFETs for light emitting diode displays
US-10396121-B2 · Aug 27, 2019 · US
US11784285B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11784285-B2 |
| Application number | US-202017022496-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 16, 2020 |
| Priority date | Feb 4, 2020 |
| Publication date | Oct 10, 2023 |
| Grant date | Oct 10, 2023 |
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A three-dimensionally structured semiconductor light emitting diode includes a first conductivity-type semiconductor rod having integral first and second portions, the first portion defining a first surface, the second portion defining a second surface opposite the first surface, and a side surface between the first and second surfaces, an active layer and a second conductivity-type semiconductor layer on the side surface of the first conductivity-type semiconductor rod, the active layer and the second conductivity-type semiconductor layer being on the second portion of the first conductivity-type semiconductor rod, an insulating cap layer on the second surface of the first conductivity-type semiconductor rod, a transparent electrode layer on the second conductivity-type semiconductor layer, and a passivation layer on the transparent electrode layer and exposing a portion of the transparent electrode layer, the passivation layer extending to cover ends of the active layer and the second conductivity-type semiconductor layer adjacent to the first surface.
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What is claimed is: 1. A three-dimensionally structured semiconductor light emitting diode, comprising: a first conductivity-type semiconductor rod having first and second portions integral with each other, the first portion defining a first surface, the second portion defining a second surface opposite the first surface, and a side surface extending between the first surface and the second surface; an active layer and a second conductivity-type semiconductor layer sequentially disposed on the side surface of the first conductivity-type semiconductor rod, the active layer and the second conductivity-type semiconductor layer being on the second portion of the first conductivity-type semiconductor rod; an insulating cap layer on the second surface of the first conductivity-type semiconductor rod; a transparent electrode layer on the second conductivity-type semiconductor layer; and a passivation layer on the transparent electrode layer and exposing a portion of the transparent electrode layer, the passivation layer extending to cover a first end of the active layer and a first end of the second conductivity-type semiconductor layer adjacent to the first surface, wherein the first conductivity-type semiconductor rod includes a regrowth layer on the side surface, the regrowth layer being on the second portion of the first conductivity-type semiconductor rod, and a combined structure of the regrowth layer with the first conductivity-type semiconductor rod having a hexagonal columnar shape, and wherein the insulating cap layer overhangs the side surface of the first conductivity-type semiconductor rod. 2. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein the first portion of the first conductivity-type semiconductor rod has a width smaller than a width of the second portion. 3. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein the active layer has a second end coplanar with the second surface of the first conductivity-type semiconductor rod, the insulating cap layer covering and being in direct contact with the second end of the active layer. 4. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 3 , wherein the second conductivity-type semiconductor layer has a second end coplanar with the second surface of the first conductivity-type semiconductor rod, the insulating cap layer extending to the second end of the second conductivity-type semiconductor layer, and the transparent electrode layer being in direct contact with the second end of the second conductivity-type semiconductor layer and with the insulating cap layer. 5. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 4 , wherein the passivation layer includes a first insulating film on the second conductivity-type semiconductor layer, and a second insulating film on the first insulating film, the second insulating film extending to cover the first ends of the active layer and the second conductivity-type semiconductor layer adjacent to the first surface. 6. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein the passivation layer extends to a lateral surface of the first portion of the first conductivity-type semiconductor rod. 7. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein the exposed portion of the transparent electrode layer overlaps the insulating cap layer. 8. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein the exposed portion of the transparent electrode layer is on the side surface of the first conductivity-type semiconductor rod adjacent to the second surface. 9. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , further comprising: a first connection electrode connected to the first surface of the first conductivity-type semiconductor rod; and a second connection electrode connected to a portion of the transparent electrode layer on the insulating cap layer. 10. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 9 , wherein the first connection electrode extends to a lateral surface of the first portion of the first conductivity-type semiconductor rod. 11. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein the first surface of the first conductivity-type semiconductor rod includes a cleavage plane of a first conductivity-type semiconductor. 12. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein the first conductivity-type semiconductor rod, the active layer, and the second conductivity-type semiconductor layer include nitride semiconductor single crystal. 13. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 1 , wherein an aspect ratio of the first conductivity-type semiconductor rod is equal to or greater than 4. 14. A three-dimensionally structured semiconductor light emitting diode, comprising: a first conductivity-type semiconductor rod having first and second portions integral with each other, the first portion defining a first surface, the second portion defining a second surface opposite the first surface, and a side surface extending between the first surface and the second surface; an active layer and a second conductivity-type semiconductor layer sequentially disposed on a lateral surface of the second portion of the first conductivity-type semiconductor rod; an insulating cap layer on the second surface of the first conductivity-type semiconductor rod; a transparent electrode layer on the insulating cap layer and on the second conductivity-type semiconductor layer; and a passivation layer on the transparent electrode layer, the passivation layer exposing a portion of the transparent electrode layer on the insulating cap layer, wherein the first conductivity-type semiconductor rod includes a regrowth layer on the side surface, the regrowth layer being on the second portion of the first conductivity-type semiconductor rod, and a combined structure of the regrowth layer with the first conductivity-type semiconductor rod having a hexagonal columnar shape, and wherein the insulating cap layer overhangs the side surface of the first conductivity-type semiconductor rod. 15. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 14 , wherein the passivation layer covers a first end of the active layer and a first end of the second conductivity-type semiconductor layer adjacent to the first surface. 16. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 14 , further comprising: a first connection electrode connected to the first surface of the first conductivity-type semiconductor rod, the first connection electrode extending to a lateral surface of the first portion adjacent to the first surface; and a second connection electrode connected to a first portion of the transparent electrode layer on the insulating cap layer, the second connection electrode extending to a second portion of the transparent electrode layer adjacent to the second surface. 17. The three-dimensionally structured semiconductor light emitting diode as claimed in claim 14 , wherein a length of the first portion of the first conductivity-type semiconductor rod is within a range of about 20% to about 50%
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