FinFETs for light emitting diode displays

Patent metadata

Field	Value
Publication number	US-10396121-B2
Application number	US-201715680948-A
Country	US
Kind code	B2
Filing date	Aug 18, 2017
Priority date	Aug 18, 2017
Publication date	Aug 27, 2019
Grant date	Aug 27, 2019

Abstract

The present disclosure generally relates to semiconductor structures and, more particularly, to finFETs for light emitting diode displays and methods of manufacture. The method includes: forming replacement fin structures with a doped core region, on doped substrate material; forming quantum wells over the replacement fin structures; forming a first color emitting region by doping at least one of the quantum wells over at least a first replacement fin structure of the replacement fin structures, while protecting at least a second replacement fin structure of the replacement fin structures; and forming a second color emitting region by doping another one of the quantum wells over the at least second replacement fin structure of the replacement fin structures, while protecting the first replacement fin structure and other replacement fin structures which are not to be doped.

First claim

What is claimed:

1. A method comprising:
forming replacement fin structures with a doped core region, on doped substrate material;
forming isolation regions between the replacement fin structures;
forming quantum wells over the replacement fin structures;
forming contacts between each of the replacement fin structures and contacting the substrate material through the isolation regions;
forming a first color emitting region by depositing a first material on at least one of the quantum wells over at least a first replacement fin structure of the replacement fin structures, while protecting at least a second replacement fin structure of the replacement fin structures; and
forming a second color emitting region by depositing a second material on another one of the quantum wells over the at least second replacement fin structure of the replacement fin structures, while protecting the first replacement fin structure and other replacement fin structures which are not to have the second material deposited thereon.

2. The method of claim 1 , wherein the forming the first color emitting region and the second color emitting region by depositing the first material and the second material comprises a deposition of quantum dots.

3. The method of claim 1 , wherein the forming the first color emitting region and the second color emitting region by depositing the first material and the second material comprises a spin on deposition of phosphors.

4. The method of claim 1 , wherein the doped core region is an n-type GaN material.

5. The method of claim 1 , further comprising forming a dielectric layer to seal the first color emitting region and the second color emitting region.

6. The method of claim 1 , further comprising:
forming cladding layers; and
doping the replacement fin structures, prior to the forming of the cladding layers.

7. The method of claim 1 , further comprising a buffer layer formed under the doped core region.

8. The method of claim 7 , wherein the buffer layer is AlN.

9. The method of claim 1 , further comprising forming cladding layers which comprise alternating InGaN and GaN materials.

10. The method of claim 9 , further comprising forming a p-type GaN layer over the cladding layers, and an insulator layer over the p-type GaN layer, wherein the forming of the first color emitting region and the second color emitting region comprises doping the insulator layer.

11. The method of claim 1 , wherein forming the contacts comprises forming a reflective material to form mirrors between the replacement fin structures, the reflective mirrors contacting the doped substrate material.

12. The method of claim 11 , further comprising sealing the replacement fin structures and the mirrors with a dielectric layer to form the light emitting diode structures.

13. A method comprising:
forming doped fin structures of a substrate material;
recessing the doped fin structures;
forming doped replacement fin structures on the recessed doped fin structures;
forming isolation regions between the doped replacement fin structures;
forming alternating cladding layers on the doped replacement fin structures;
forming contacts between each of the doped replacement fin structures and contacting the substrate material through the isolation regions;
forming a first mask over at least a first doped replacement fin structure;
forming a first color emitting region over at least a second doped replacement fin structure, while protecting the first doped replacement fin structure with the mask;
removing the first mask;
forming second mask over the at least the first coloring emitting region and the second doped replacement fin structure;
forming a second color emitting region over at least a third doped replacement fin structure, while protecting the at least first coloring emitting region with the second mask; and
forming a cathode through the isolation regions and contacting the substrate material.

14. The method of claim 13 , wherein the forming the first color emitting region and the forming of the second color emitting region comprises a deposition of quantum dots.

15. The method of claim 13 , wherein the forming the first color emitting region and the forming of the second color emitting region comprises a spin on deposition of phosphors.

16. The method of claim 13 , wherein the cladding layers form a quantum well.

17. The method of claim 13 , further comprising a buffer layer formed under the doped core region.

18. The method of claim 13 , wherein the alternating cladding layers comprise InGaN and GaN materials.

19. The method of claim 18 , wherein forming the contacts comprises forming a reflective material to form mirrors between the doped replacement fin structures.

20. The method of claim 18 , further comprising an insulator layer over the alternating cladding layers.

Assignees

• Globalfoundries Inc

Inventors

• Jacob Ajey P
• Banna Srinivasa
• Nayak Deepak

Classifications

• H01L33/007

  Electricity · mapped topic

• H01L33/06

  Electricity · mapped topic

• H01L33/504

  Electricity · mapped topic

• H01L33/24

  Electricity · mapped topic

• H01L33/60

  Electricity · mapped topic