Fluid droplet methodology and apparatus for imprint lithography

Patent metadata

Field	Value
Publication number	US-11762295-B2
Application number	US-202017082803-A
Country	US
Kind code	B2
Filing date	Oct 28, 2020
Priority date	Oct 28, 2020
Publication date	Sep 19, 2023
Grant date	Sep 19, 2023

Abstract

A method can be used to generate a fluid droplet pattern for an imprint lithography process using a fluid dispense system having fluid dispense ports. The method can include determining a fluid droplet pattern for dispensing a formable material onto a substrate, during a first pass, dispensing the formable material along a stitch line to form a first part of the fluid droplet pattern for an imprint field, where the stitch line runs from a first corner to a second corner of the imprint field. The method can also include offsetting the substrate and the fluid dispense ports relative to each other after dispensing the formable material during the first pass, and during a second pass, dispensing the formable material along the stitch line onto the substrate to form a second part of the fluid droplet pattern for the imprint field. An apparatus can be configured to carry out the method.

First claim

What is claimed is:

1. A method of generating a fluid droplet pattern on a substrate, the method comprising:
providing a fluid dispense system having fluid dispense ports;
determining a fluid droplet pattern of an imprint field for dispensing a formable material onto a substrate;
during a first pass, dispensing the formable material onto the substrate along a stitch line to form a first part of the fluid droplet pattern for an imprint field, wherein the substrate and the fluid dispense ports move relative to each other in a translating direction, wherein the stitch line is a diagonal line that runs from a first corner to a second corner of the imprint field, and wherein the first corner and the second corner are on opposite sides of a congruent side of the imprint field;
offsetting the substrate and the fluid dispense ports relative to each other in the translating direction and another direction, wherein offsetting the substrate and the fluid dispense ports relative to each other is performed after dispensing the formable material during the first pass; and
during a second pass, dispensing the formable material along the stitch line onto the substrate to form a second part of the fluid droplet pattern for the imprint field, wherein dispensing the formable material during the second pass is performed after offsetting the substrate and the fluid dispense ports relative to each other.

2. The method of claim 1 , wherein the first corner and the second corner are on opposite sides of a diagonal of the imprint field.

3. The method of claim 1 , wherein the stitch line comprises more than one segment.

4. The method of claim 3 , wherein the stitch line comprises a horizontal segment.

5. The method of claim 3 , wherein stitch line comprises a vertical segment.

6. The method of claim 1 , wherein determining a substrate fluid drop pattern is for the imprint field.

7. The method of claim 1 , wherein dispensing the formable material onto the substrate field along a stitch line to form the first part of the fluid droplet pattern for the imprint field comprises starting to dispense formable material at a first edge of the field and ending at the stitch line.

8. The method of claim 1 , wherein dispensing the formable material onto the substrate along a stitch line to form the first part of the fluid droplet pattern for the imprint field comprises starting to dispense formable material at the stitch line and ending at a first edge of the imprint field.

9. The method of claim 8 , wherein dispensing the formable material onto the substrate along a stitch line to form the second part of the fluid droplet pattern for the imprint field comprises starting to dispense formable material at the stitch line and ending at a second edge of the imprint field, wherein the first edge is opposite the second edge.

10. The method of claim 9 , wherein dispensing the formable material onto the substrate along a stitch line to form the first part of the fluid droplet pattern for the imprint field comprises forming at least two rows of fluid droplets, wherein each row of fluid droplets has a different number of fluid droplets than the row either above or below it.

11. The method of claim 10 , wherein after dispensing the formable material onto the substrate along a stitch line to form the second part of the fluid droplet pattern for the imprint field, each of the at least two rows has substantially the same number of fluid droplets.

12. A method of manufacturing an article, the method comprising:
providing a fluid dispense system having fluid dispense ports;
determining a fluid droplet pattern of the imprint field for dispensing a formable material onto a substrate;
during a first pass, dispensing the formable material onto the substrate along a stitch line to form a first part of the fluid droplet pattern for an imprint field, wherein the substrate and the fluid dispense ports move relative to each other in a translating direction, wherein the stitch line is a diagonal line that runs from a first corner to a second corner of the imprint field, and wherein the first corner and the second corner are on opposite sides of a congruent side of the imprint field;
offsetting the substrate and the fluid dispense ports relative to each other in the translating direction and another direction, wherein offsetting the substrate and the fluid dispense ports relative to each other is performed after dispensing the formable material during the first pass;
during a second pass, dispensing the formable material along the stitch line onto the substrate to form a second part of the fluid droplet pattern for the imprint field, wherein dispensing the formable material during the second pass is performed after offsetting the substrate and the fluid dispense ports relative to each other;
contacting the formable material with a template having a surface;
curing the formable material to form a layer corresponding to the surface of the template;
forming a pattern on the substrate by the cured material on the substrate;
processing the substrate on which the pattern has been formed; and
manufacturing the article from the processed substrate.

Assignees

• Canon Kk

Inventors

• Tavakkoli Kermani Ghariehali Amir
• Fletcher Edward Brian
• Simpson Logan L
• Irving James W

Classifications

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G03F7/2012 Primary

  using liquid photohardening compositions, e.g. for the production of reliefs such as flexographic plates or stamps · CPC title

• B41M3/006

  Patterns of chemical products used for a specific purpose, e.g. pesticides, perfumes, adhesive patterns; use of microencapsulated material; Printing on smoking articles · CPC title