Resist underlayer film composition, patterning process, and compound
US-10156788-B2 · Dec 18, 2018 · US
US11760899B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11760899-B2 |
| Application number | US-202017618902-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 2, 2020 |
| Priority date | Jun 20, 2019 |
| Publication date | Sep 19, 2023 |
| Grant date | Sep 19, 2023 |
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The present invention generally relates a polymer-metal junction comprising PEEK-PEoEK copolymers compositions, in contact with at least a part of the surface of a metal substrate, wherein the PEEK-PEoEK copolymer having RPEEK and RPEoEK repeat units in a molar ratio R PEEK /R PEoEK ranging from 95/5 to 5/95. The present invention also relates to shaped articles including the polymer-metal junction, and methods of making the polymer-metal junctions.
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The invention claimed is: 1. A polymer-metal junction, comprising: a metal substrate having a surface, and a polymer composition comprising a PEEK-PEoEK copolymer, the copolymer comprising at least 50 mol %, collectively, of repeat units (R PEEK ) and repeat units (R PEoEK ), relative to the total number of repeat units in the PEEK-PEoEK copolymer, wherein: (a) repeat units (R PEEK ) are repeat units of formula (A): and (b) repeat units (R PEoEK ) are repeat units of formula (B): each R 1 and R 2 , equal to or different from each other, is independently at each occurrence selected from the group consisting of halogen, alkyl, alkenyl, alkynyl, aryl, ether, thioether, carboxylic acid, ester, amide, imide, alkali or alkaline earth metal sulfonate, alkyl sulfonate, alkali or alkaline earth metal phosphonate, alkyl phosphonate, amine and quaternary ammonium, each a and b is independently selected from the group consisting of integers ranging from 0 to 4, and the PEEK-PEoEK copolymer comprises the repeat units R PEEK and R PEoEK in a molar ratio R PEEK /R PEoEK ranging from 95/5 to 5/95, wherein said polymer composition is in contact with at least part of the surface of said metal substrate. 2. The polymer-metal junction of claim 1 , wherein the repeat units (R PEEK ) are repeat units of formula (A-1): 3. The polymer-metal junction of claim 1 , wherein the repeat units (R PEoEK ) are repeat units of formula (B-1): 4. The polymer-metal junction of claim 1 , wherein the PEEK-PEoEK copolymer consists essentially in repeat units (R PEEK ) and (R PEoEK ), wherein any additional repeat unit distinct from repeat units R PEEK and R PEoEK , are either absent or may be present in amount of at most 2 mol. %, relative to the total number of moles of repeat units in the PEEK-PEoEK copolymer. 5. The polymer-metal junction of claim 1 , wherein repeat units R PEEK and R PEoEK are present in the PEEK-PEoEK copolymer in a R PEEK /R PEoEK molar ratio ranging from 95/5 to more than 50/50. 6. The polymer-metal junction of claim 1 , wherein: the PEEK-PEoEK copolymer has a melting temperature (Tm) of less than or equal to 340° C., wherein the melting temperature (Tm) is measured as the peak temperature of the melting endotherm on the second heat scan in a differential scanning calorimeter (DSC) according to ASTM D3418-03 and E794-06, and using heating and cooling rates of 20° C./min; and/or the PEEK-PEoEK copolymer has as heat of fusion (AH) of at least 1 J/g, wherein the heat of fusion is determined as the area under the melting endotherm on the second heat scan in a differential scanning calorimeter (DSC) according to ASTM D3418-03 and E793-06, with heating and cooling rates of 20° C./min. 7. The polymer-metal junction of claim 1 , wherein the PEEK-PEoEK copolymer possesses a microstructure such that its FT-IR spectrum, when recorded between 600 and 1,000 cm“′ in ATR mode on polymer powder, is such that the following inequalities are satisfied: (i) A 700 c m - 1 A 704 c m - 1 ≤ 0 . 9 9 , wherein A 700 cm −1 is the absorbance at 700 cm −1 and A 704 cm −1 is the absorbance at 704 cm −1 ; (ii) A 816 c m - 1 A 835 c m - 1 ≥ 0.61 , wherein A 816 cm −1 is the of absorbance at 816 cm −1 and A 835 cm −1 is the absorbance at 835 cm −1 ; (iii) A 623 c m - 1 A 557 c m - 1 ≤ 1.6 , wherein A 623 cm −1 is the of absorbance at 623 cm −1 and A 557 cm −1 is the absorbance at 557 cm −1 ; (iv) A 928 c m - 1 A 92
of ketones · CPC title
from phenols (I) and other compounds (II), e.g. OH-Ar-OH + X-Ar-X, where X is halogen atom, i.e. leaving group · CPC title
of ketones with phenols · CPC title
with glass fibres · CPC title
Metals · CPC title
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