Isolator

Patent metadata

Field	Value
Publication number	US-11756986-B2
Application number	US-202217677610-A
Country	US
Kind code	B2
Filing date	Feb 22, 2022
Priority date	Mar 19, 2020
Publication date	Sep 12, 2023
Grant date	Sep 12, 2023

Abstract

An isolator includes a first electrode; a first insulating portion on the first electrode; a second electrode on the first insulating portion; a second insulating portion around the second electrode; and a first dielectric portion on the second electrode and the second insulating portion. The second insulating portion is provided along a first plane perpendicular to a first direction from the first electrode toward the second electrode. The second electrode including a bottom surface facing the first insulating portion, an upper surface facing the first dielectric portion, a first side surface connected to the bottom surface, and a second side surface connected to the upper surface and the first side surface. The upper surface is wider than the bottom surface in a second direction along the first plane. The first side surface is tilted with respect to the bottom surface and the second side surface.

First claim

What is claimed is:

1. An isolator, comprising:
a first electrode;
a first insulating portion provided on the first electrode;
a second electrode provided on the first insulating portion;
a second insulating portion provided around the second electrode, the second insulating portion being provided along a first plane perpendicular to a first direction from the first electrode toward the second electrode, the second insulating portion contacting the second electrode;
a first dielectric portion provided on the second electrode and the second insulating portion; and
a second dielectric portion provided between the first and second insulating portions,
the second electrode including a bottom surface facing the first insulating portion, an upper surface facing the first dielectric portion, and a side surface connected to the upper surface and the bottom surface;
the second dielectric portion contacting the second electrode and including a first dielectric layer and a second dielectric layer, the first dielectric layer contacting the first insulating portion, the second dielectric layer being provided between the first dielectric layer and the second insulating portion, the first dielectric layer having a relative dielectric constant larger than a relative dielectric constant of the second dielectric layer, a relative dielectric constant of the first insulating portion and a relative dielectric constant of the second insulating portion.

2. The isolator according to claim 1 , wherein
the second dielectric portion further includes a third dielectric layer between the second dielectric layer and the second insulating portion, the third dielectric layer having a relative dielectric constant larger than the relative electric constant of the second dielectric layer.

3. The isolator according to claim 2 , wherein
the first dielectric layer is provided between the first insulating portion and the second electrode.

4. The isolator according to claim 3 , wherein
the third dielectric layer is provided between the second electrode and the first dielectric layer, and contacts the bottom surface of the second electrode and the first dielectric layer.

5. The isolator according to claim 2 , wherein
the bottom surface of the second electrode contacts the first insulating portion.

6. The isolator according to claim 5 , wherein
the second dielectric layer contacts the side surface of the second electrode.

7. The isolator according to claim 1 , wherein
the first dielectric layer is provided between the first insulating portion and the second electrode.

8. The isolator according to claim 1 , wherein
the bottom surface of the second electrode contacts the first insulating portion.

9. The isolator according to claim 8 , wherein
the second dielectric layer and the first dielectric layer contact the side surface of the second electrode.

10. The isolator according to claim 8 , wherein
a bottom surface of the first dielectric layer and the bottom surface of the second electrode are contacted on an upper surface of the first insulating portion, and disposed on a plane parallel to the first plane.

11. The isolator according to claim 1 , wherein
the upper surface is wider than the bottom surface in a second direction along the first plane.

Assignees

• Toshiba Kk
• Toshiba Electronic Devices & Storage Corp

Inventors

• Ishiguro Akira
• Nega Ryohei
• Fuji Yoshihiko

Classifications

• H10W20/42

  Vias, e.g. via plugs · CPC title

• H10W72/90

  Bond pads, in general · CPC title

• H10D89/911

  using passive elements as protective elements · CPC title

• H10D1/20 Primary

  Inductors · CPC title

• H01P1/375 Primary

  using Faraday rotators · CPC title