Metal plate for producing vapor deposition masks, inspection method for metal plates, production method for metal plates, vapor deposition mask, vapor deposition mask device, and production method for vapor deposition masks

Patent metadata

Field	Value
Publication number	US-11733607-B2
Application number	US-201916580524-A
Country	US
Kind code	B2
Filing date	Sep 24, 2019
Priority date	Nov 14, 2017
Publication date	Aug 22, 2023
Grant date	Aug 22, 2023

Abstract

A metal plate includes a surface including a longitudinal direction of the metal plate and a width direction orthogonal to the longitudinal direction. A surface reflectance by regular reflection of a light is 8% or more and 25% or less. The surface reflectance is measured when the light is incident on the surface at an angle of 45°±0.2°. The light is in at least one plane orthogonal to the surface.

First claim

The invention claimed is:

1. A metal plate used for manufacturing a deposition mask, the metal plate comprising:
a surface including a longitudinal direction of the metal plate and a width direction orthogonal to the longitudinal direction,
wherein a surface reflectance by regular reflection of a light is 8% or more and 25% or less, the surface reflectance being measured when the light is incident on the surface at an incident angle of 45°±0.2°, the light being in at least one plane orthogonal to the surface.

2. The metal plate according to claim 1 , wherein the surface reflectance is 8% or more and 20% or less.

3. The metal plate according to claim 1 ,
wherein an average of a first reflectance and a second reflectance is 8% or more and 25% or less,
wherein the first reflectance is a surface reflectance by regular reflection of a light, the first reflectance being measured when the light is incident on the surface at an incident angle of 45°±0.2°, the light being in a first plane orthogonal to the surface and to the longitudinal direction, and
wherein the second reflectance is a surface reflectance by regular reflection of a light, the second reflectance being measured when the light is incident on the surface at an incident angle of 45°±0.2°, the light being in a second plane orthogonal to the surface and to the width direction.

4. The metal plate according to claim 3 , wherein an average of the first reflectance and the second reflectance is 8% or more and 20% or less.

5. The metal plate according to claim 3 ,
wherein the metal plate comprises a first area, a second area, and a third area arranged from one end to the other end of the metal plate with respect to the width direction, the first area, the second area, and the third area each having the same length along the width direction, and
wherein each of the first reflectance and the second reflectance is an average of the reflectances measured within the first area, the second area, and the third area.

6. The metal plate according to claim 3 , wherein a value obtained by dividing the first reflectance by the second reflectance is 0.70 or more and 1.30 or less.

7. The metal plate according to claim 3 , wherein the average surface reflectance is 24.5% or less.

8. The metal plate according to claim 1 , wherein a thickness of the metal plate is equal to or less than 100 μm.

9. The metal plate according to claim 1 , wherein the metal plate is made of an iron alloy containing nickel.

10. The metal plate according to claim 1 , wherein the surface of the metal plate includes a plurality of rolling streaks extending in the longitudinal direction, or the surface of the metal plate includes a plurality of oil pits having a direction orthogonal to the longitudinal direction.

11. The metal plate according to claim 1 , wherein the metal plate is for manufacturing the deposition mask which is obtained by exposing and developing a resist film attached to the surface of the metal plate to form a first resist pattern, and etching a region of the surface of the metal plate, the region being not covered with the first resist pattern.

12. The metal plate according to claim 11 , wherein the metal plate is for manufacturing the deposition mask which is obtained by exposing and developing a resist film attached to the surface of the metal plate under an environment at equal to or less than 1,000 Pa to form a first resist pattern, and etching a region of the surface of the metal plate, the region being not covered with the first resist pattern.

13. The metal plate according to claim 1 , wherein the surface reflectance is calculated as a percentage relative to an intensity measured when the light is directly entered a detector.

14. The metal plate according to claim 1 , wherein the surface reflectance is a first surface reflectance that is based on a reflected light observed when the light is incident on a first surface of the metal plate, the first surface constituting a surface of the deposition mask on an organic EL substrate's side.

15. The metal plate according to claim 1 , wherein the surface reflectance is 8% or more and 24.8% or less.

16. A method for manufacturing a metal plate used for manufacturing a deposition mask, the method comprising:
a production step of obtaining the metal plate by a rolling process or a plating process,
wherein the metal plate comprises a surface including a longitudinal direction of the metal plate and a width direction orthogonal to the longitudinal direction, and
wherein a surface reflectance of a reflected light observed when a light is incident on the surface of the metal plate is 8% or more and 25% or less, the surface reflectance being measured based on the reflected light on the surface at an angle of 45°±0.2° in at least one plane orthogonal to the surface.

17. The method for manufacturing a metal plate according to claim 16 , the method comprising:
a screening step of sorting out the metal plate that has the surface reflectance 8% or more and 25% or less.

18. A deposition mask comprising:
a metal plate; and
a plurality of through-holes formed in the metal plate,
wherein a surface reflectance of a reflected light observed when a light is incident on a surface of the metal plate is 8% or more and 25% or less, the surface reflectance being measured based on the reflected light on the surface at an angle of 45°±0.2° in at least one plane orthogonal to the surface.

19. A method for manufacturing a deposition mask comprising a plurality of through-holes formed in the deposition mask, the method comprising:
a step of preparing a metal plate;
a resist film forming step of disposing a resist film on a surface of the metal plate;
a step of processing the resist film to form a resist pattern; and
a step of etching the metal plate with the resist pattern serving as a mask,
wherein a surface reflectance of a reflected light observed when a light is incident on a surface of the metal plate is 8% or more and 25% or less, the surface reflectance being measured based on the reflected light on the surface at an angle of 45°±0.2° in at least one plane orthogonal to the surface.

20. The method for manufacturing a deposition mask according to claim 19 , wherein the resist film forming step includes a step of attaching the resist film to the surface of the metal plate under an environment at equal to or less than 1,000 Pa.

Assignees

• Dainippon Printing Co Ltd

Inventors

• Ikenaga Chikao
• Okamoto Hideyuki
• Ushikusa Masato
• Hatsuta Chiaki
• Oka Hiroki
• MATSUURA Sachiyo

Classifications

• C21D8/0236

  Cold rolling · CPC title

• C22C38/105

  containing Co and Ni · CPC title

• H10K59/00

  Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00 · CPC title

• C23C14/042 Primary

  using masks · CPC title

• B21B1/22

  for rolling {plates, strips,} bands or sheets of indefinite length (B21B1/42 takes precedence) · CPC title