Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate

Patent metadata

Field	Value
Publication number	US-2017141315-A1
Application number	US-201515309468-A
Country	US
Kind code	A1
Filing date	Apr 28, 2015
Priority date	May 13, 2014
Publication date	May 18, 2017
Grant date	—

Abstract

A metal plate for manufacturing a deposition mask with reduced variation in dimension of through-holes. An average value of plate thicknesses of the metal plate in a longitudinal direction is within a ±3% range around a predetermined value. When an average value of the plate thicknesses of the metal plate in the longitudinal direction is represented as A, and a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the longitudinal direction by 3 is represented as B, (B/A)×100(%) is ≦5%. When a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the width direction by 3 is represented as C, and a value of a plate thickness of the metal plate at a central portion in the width direction is represented as X, (C/X)×100(%) is ≦3%.

First claim

1 . A method of manufacturing an elongated metal plate used for manufacturing a deposition mask having a plurality of through-holes formed in the metal plate, the method comprising:
a rolling step of rolling a base metal to obtain the metal plate having an average value of plate thicknesses in a longitudinal direction within a ±3% range around a predetermined value; and a cutting step of cutting off one end and the other end of the metal plate in a width direction over a predetermined range; wherein the following two conditions (1) and (2) are satisfied as to a variation in plate thickness of the metal plate:
(1) when an average value of the plate thicknesses of the metal plate in the longitudinal direction is represented as A, and a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the longitudinal direction by 3 is represented as B, (B/A)×100(%) is 5% or less; and
(2) when a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the width direction by 3 is represented as C, and a value of a plate thickness of the metal plate at a central portion in the width direction, which is obtained when plate thicknesses of the metal plate are measured along the width direction in order to calculate the standard deviation of the plate thicknesses of the metal plate in the width direction, is represented as X, (C/X)×100(%) is 3% or less.

2 . A method of manufacturing an elongated metal plate used for manufacturing a deposition mask having a plurality of through-holes formed in the metal plate, the method comprising:
a film forming step of obtaining the metal plate by a plating process, wherein an average value of plate thicknesses of the metal plate in a longitudinal direction is within a ±3% range around a predetermined value; and a cutting step of cutting off one end and the other end of the metal plate in a width direction over a predetermined range; wherein the following two conditions (1) and (2) are satisfied as to a variation in plate thickness of the metal plate:
(1) when an average value of the plate thicknesses of the metal plate in the longitudinal direction is represented as A, and a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the longitudinal direction by 3 is represented as B, (B/A)×100(%) is 5% or less; and
(2) when a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the width direction by 3 is represented as C, and a value of a plate thickness of the metal plate at a central portion in the width direction, which is obtained when plate thicknesses of the metal plate are measured along the width direction in order to calculate the standard deviation of the plate thicknesses of the metal plate in the width direction, is represented as X, (C/X)×100(%) is 3% or less.

3 . The method of manufacturing the metal plate according to claim 1 , wherein
the plate thickness of the metal plate is 80 μm or less.

4 . The method of manufacturing a metal plate according to claim 1 , wherein:
the standard deviation of the plate thicknesses in the width direction of the metal plate is calculated based on the plate thicknesses of the metal plate, the plate thicknesses being measured at intersections between m imaginary lines (m is a natural number of 2 or more) extending on the metal plate in the longitudinal direction and n imaginary line(s) (n is a natural number of 1 or more) extending on the elongated metal plate in the width direction; and m>n.

5 . The method of manufacturing a metal plate according to claim 1 , wherein
the base metal is made of an iron alloy containing nickel.

6 . An elongated metal plate used for manufacturing a deposition mask having a plurality of through-holes formed in the metal plate,
wherein: an average value of plate thicknesses in a longitudinal direction of the metal plate is within a ±3% range around a predetermined value; and the following two conditions (1) and (2) are satisfied as to a variation in plate thickness of the metal plate:
(1) when an average value of the plate thicknesses of the metal plate in the longitudinal direction is represented as A, and a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the longitudinal direction by 3 is represented as B, (B/A)×100(%) is 5% or less; and
(2) when a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the width direction by 3 is represented as C, and a value of the plate thickness of the metal plate in a central portion in the width direction, which is obtained when the plate thickness of the metal plate is measured along the width direction in order to calculate the standard deviation of the plate thicknesses of the metal plates in the width direction is represented as C, (C/X)×100(%) is 3% or less.

7 . The metal plate according to claim 6 , wherein
the plate thickness of the metal plate is 80 μm or less.

8 . The metal plate according to claim 6 , wherein
the standard deviation of the plate thicknesses in the width direction of the metal plate is calculated based on the plate thicknesses of the metal plate, the plate thicknesses being measured at intersections between m imaginary lines (m is a natural number of 2 or more) extending on the metal plate in the longitudinal direction and n imaginary line(s) (n is a natural number of 1 or more) extending on the elongated metal plate in the width direction; and m>n.

9 . The metal plate according to claim 6 , wherein
the base metal is made of an iron alloy containing nickel.

10 . A method of manufacturing a deposition mask having a plurality of through-holes formed therein, the method comprising:
a step of preparing an elongated metal plate having an average value of plate thicknesses in a longitudinal direction is within a ±3% range around a predetermined value; a resist-pattern forming step of forming a resist pattern on the metal plate; and an etching step of etching an area of the metal plate, which is not covered with the resist pattern, to form a recess which becomes a through-hole in the metal plate; wherein the following two conditions (1) and (2) are satisfied as to a variation in plate thickness of the metal plate:
(1) when an average value of the plate thicknesses of the metal plate in the longitudinal direction is represented as A, and a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the longitudinal direction by 3 is represented as B, (B/A)×100(%) is 5% or less; and
(2) when a value obtained by multiplying a standard deviation of the plate thicknesses of the metal plate in the width direction by 3 is represented as C, and a value of a plate thickness of the metal plate at a central portion in the width direction, which is obtained when plate thicknesses of the metal plate are measured along the width direction in order to calculate the standard deviation of the plate thicknesses of the metal plate in the width direction, is represented as X, (C/X)×100(%) is 3% or less.

11 . The method of manufacturing a deposition mask according to claim 10 , wherein
the plate thickness of the metal plate is 80 μm or less.

12 . The method of manufacturing a deposition mask according to claim 10 , wherein
the standard deviation of the plate thicknesses in the width direction of the metal plate is calculated based on the plate thicknesses of the metal plate, the plate thicknesses being measured at intersections between m imaginary lines (m is a n

Assignees

• Dainippon Printing Co Ltd

Inventors

• Ikenaga Chikao

Classifications

• C23F1/04

  Chemical milling · CPC title

• C23C14/04

  Coating on selected surface areas, e.g. using masks · CPC title

• H05B33/10

  Apparatus or processes specially adapted to the manufacture of electroluminescent light sources · CPC title

• B21B15/00

  Arrangements for performing additional metal-working operations specially combined with or arranged in, or specially adapted for use in connection with, metal-rolling mills · CPC title

• B21B38/04

  for measuring thickness, width, diameter or other transverse dimensions of the product · CPC title