Semiconductor device including defect detection circuit and method of detecting defects in the same

Patent metadata

Field	Value
Publication number	US-11715542-B2
Application number	US-202217851596-A
Country	US
Kind code	B2
Filing date	Jun 28, 2022
Priority date	Jul 29, 2020
Publication date	Aug 1, 2023
Grant date	Aug 1, 2023

Abstract

A semiconductor device includes a semiconductor die having a peripheral region surrounding, a defect detection circuit in the peripheral region, the defect detection circuit arranged in an open conduction loop, the defect detection circuit comprising a plurality of latch circuits and a plurality of defect detection conduction paths, each defect detection conduction path of the plurality of defect detection conduction paths connecting two adjacent latch circuits of the plurality of latch circuits, and a test control circuitry configured to perform (a) a test write operation by transferring bits of an input data pattern in a forward direction of the open conduction loop to cause the plurality of latch circuits to store the bits of the input data pattern in the plurality of latch circuits, and (b) a test read operation by transferring bits stored in the plurality of latch circuits in a backward direction of the open conduction loop.

First claim

What is claimed is:

1. A semiconductor device comprising:
a semiconductor die including a central region and a peripheral region surrounding the central region;
a defect detection circuit in the peripheral region to surround a perimeter of the semiconductor die, the defect detection circuit arranged in an open conduction loop and configured to detect a penetration of a crack occurring during cutting of the semiconductor die, the defect detection circuit comprising a plurality of latch circuits and a plurality of defect detection conduction paths, each defect detection conduction path of the plurality of defect detection conduction paths connecting two adjacent latch circuits of the plurality of latch circuits; and
a test control circuitry configured to perform (a) a test write operation by sequentially transferring bits of an input data pattern to cause the plurality of latch circuits to store the bits of the input data pattern in the plurality of latch circuits, and (b) a test read operation by transferring bits stored in the plurality of latch circuits to read out an output data pattern.

2. The semiconductor device of claim 1 , wherein the test control circuitry is configured to compare the input data pattern and the output data pattern, and to determine presence or absence of a defect detection conduction path including a defect among the plurality of defect detection conduction paths.

3. The semiconductor device of claim 1 , wherein the test control circuitry includes:
a pattern generating circuitry configured to output each bit of the input data pattern per shifting period, the shifting period corresponding to a bit transfer period between the two adjacent latch circuits.

4. The semiconductor device of claim 1 , wherein each of the plurality of defect detection conduction paths includes:
a horizontal line in a conduction layer of the semiconductor die;
a front vertical line connecting the horizontal line to a front latch circuit of the two adjacent latch circuits; and
a back vertical line connecting the horizontal line to a back latch circuit of the two adjacent latch circuits.

5. The semiconductor device of claim 1 , wherein each latch circuit of the plurality of latch circuits includes:
a forward transfer gate connected to a front node;
a first inverter having an input node and an output node, the input node of the first inverter connected to the forward transfer gate and the output node of the first inverter connected to a first intermediate node;
a second inverter having an input node and an output node, the input node of the second inverter connected to the first intermediate node and the output node of the second inverter connected to a back node;
a third inverter having an input node and an output node, the input node of the third inverter connected to the back node and the output node of the third inverter connected to the first intermediate node;
a backward transfer gate connected to the front node;
a fourth inverter having an input node and an output node, the input node of the fourth inverter connected to a second intermediate node and the output node of the fourth inverter connected to the back node;
a fifth inverter having an input node and an output node, the input node of the fifth inverter connected to the back node and the output node of the fifth inverter connected to the second intermediate node; and
a sixth inverter having an input node and an output node, the input node of the sixth inverter connected to the second intermediate node and the output node of the sixth inverter connected to the backward transfer gate.

6. The semiconductor device of claim 5 , wherein the test control circuitry is configured to generate (a) a first forward clock signal to be applied to the forward transfer gate of odd-numbered latch circuits of the plurality of latch circuits, (b) a second forward clock signal to be applied to the forward transfer gate of even-numbered latch circuits of the plurality of latch circuits, (c) a first backward clock signal to be applied to the backward transfer gate of the odd-numbered latch circuits, and (d) a second backward clock signal to be applied to the backward transfer gate of the even-numbered latch circuits,
the test control circuitry is configured to activate the first forward clock signal and the second forward clock signal to have opposite phases and to deactivate the first backward clock signal and the second backward clock signal during the test write operation, and
the test control circuitry is configured to activate the first backward clock signal and the second backward clock signal to have opposite phases and to deactivate the first forward clock signal and the second forward clock signal during the test read operation.

7. The semiconductor device of claim 6 , wherein the first through sixth inverters include tri-state inverters, each tri-state inverter of the tri-state inverters is configured to be enabled based on one of the first forward clock signal, the second forward clock signal, the first backward clock signal, and the second backward clock signal.

8. The semiconductor device of claim 1 , wherein each latch circuit of the plurality of latch circuits includes:
a first transfer gate connected between a front node and a first intermediate node;
a first tri-state inverter having an input node and an output node, the input node of the first tri-state inverter connected to the first intermediate node and the output node of the first tri-state inverter connected to a second intermediate node;
a second tri-state inverter having an input node and an output node, the input node of the second tri-state inverter connected to the second intermediate node and the output node of the second tri-state inverter connected to the first intermediate node;
a second transfer gate connected between the second intermediate node and a third intermediate node;
a third tri-state inverter having an input node and an output node, the input node of the third tri-state inverter connected to the third intermediate node and the output node of the third tri-state inverter connected to a back node; and
a fourth tri-state inverter having an input node and an output node, the input node of the fourth tri-state inverter connected to the back node and the output node of the fourth tri-state inverter connected to the third intermediate node.

9. The semiconductor device of claim 8 , wherein the test control circuitry is configured to generate (a) a transfer clock signal to be applied to the first transfer gate and the second transfer gate of the plurality of latch circuits and (b) a direction clock signal to be applied to the first through fourth tri-state inverters of the plurality of latch circuits,
the test control circuitry is configured to activate the transfer clock signal and the direction clock signal to have the same phases during the test write operation, and
the test control circuitry is configured to activate the transfer clock signal and the direction clock signal to have opposite phases during the test read operation.

10. The semiconductor device of claim 1 , further comprising:
path selector circuitries, each path selector circuitry of the path selector circuitries configured to form a first open conduction loop including reference latch circuits and the plurality of defect detection conduction paths, the first open conduction loop formed by electrically disconnecting each selection latch circuit of selection latch circuits from two adjacent defect detection conduction paths and directly electrically connecting the two adjacent defect detection conduction paths to one another, and each path selector circuitry of the path selector circuitries is configured to

Assignees

• Samsung Electronics Co Ltd

Inventors

• Son Jongpil

Classifications

• H10P74/277

  Circuits for electrically characterising or monitoring manufacturing processes, e.g. circuits in tested chips or circuits in testing wafers · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/273

  Interconnections for measuring or testing, e.g. probe pads · CPC title

• H10P74/207 Primary

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• G11C29/1201 Primary

  comprising I/O circuitry · CPC title