Color imaging for CMP monitoring

Patent metadata

Field	Value
Publication number	US-11715193-B2
Application number	US-202016744058-A
Country	US
Kind code	B2
Filing date	Jan 15, 2020
Priority date	Nov 16, 2015
Publication date	Aug 1, 2023
Grant date	Aug 1, 2023

Abstract

A metrology technique for analyzing a substrate includes storing data indicating a boundary of an area in a 2-dimensional color space having a pair of color channels including a first color channel and a second color channel as axes of the color space, receiving color data of a substrate from a camera, generating a color image of the substrate from the color data, performing a comparison of a pair of color values for the pair of color channels for the pixel to the boundary of the area in the 2-dimensional color space for each pixel of a plurality of pixels of the color image to determine whether the pair of color values meet thresholds provided by the boundary, and generating a signal to an operator based on results of the comparison for the plurality of pixels.

First claim

What is claimed is:

1. A computer program product, comprising a non-transitory computer readable medium encoded with instructions to cause one or more processors to:
store data indicating a boundary of an area in a 2-dimensional color space, the 2-dimensional color space having a pair of color channels including a first color channel and a second color channel as axes of the color space;
store an image mask identifying one or more regions on a substrate;
receive color data of a substrate from a camera;
generate a color image of the substrate from the color data;
for each pixel of a plurality of pixels within the regions identified by the image mask of the color image, perform a comparison of a pair of color values for the pair of color channels for the pixel to the boundary of the area in the 2-dimensional color space to determine whether the pair of color values meet thresholds provided by the boundary;
count a number of pixels in the color image that fail to meet the thresholds and to compare the number of pixels to a second threshold;
generate a signal to an operator based on results of the comparison for the plurality of pixels.

2. The computer program product of claim 1 , comprising instructions to count a total number of pixels in all of one or more regions identified in the image mask, and to compare the total number to the second threshold.

3. The computer program product of claim 1 , wherein the one or regions correspond to one or more dies on the substrate.

4. The computer program product of claim 3 , comprising instructions to count a total number of pixels for each region of the one or more regions identified in the image mask, and to compare the total number for each region to the second threshold.

5. The computer program product of claim 4 , comprising instructions to store a data file indicating that a die is unusable if the total number of pixels for a region corresponding to the die exceeds the second threshold.

6. The computer program product of claim 1 , wherein the pair of color channels does not include a luminance channel.

7. A computer program product, comprising a non-transitory computer readable medium encoded with instructions to cause a processor to:
display on a display a graph of a 2-dimensional color space having a pair of color channels including a first color channel and a second color channel as axes of the color space, the graph providing a histogram of an image of a substrate for the 2-dimensional color space;
receive user input selecting a portion of the graph, the user input including clicking and dragging from a first position to a second position in the graph;
generate data indicating a boundary of an area in the 2-dimensional color space based on the user input with a pixel of the image having a pair of color values within the area indicating that a corresponding position on the substrate meets a thickness requirement;
receive color data of a second substrate from a camera;
generate a color image of the second substrate from the color data;
for each pixel of a plurality of pixels of the color image, perform a comparison of a pair of color values for the pair of color channels for the pixel to the boundary of the area in the 2-dimensional color space to determine whether the pair of color values meet thresholds provided by the boundary; and
generate a signal to an operator based on results of the comparison for the plurality of pixels.

8. The computer program product of claim 7 , wherein the pair of color channels does not include a luminance channel.

9. The computer program product of claim 7 , comprising instructions to count a number of pixels in the color image that fail to meet the thresholds and to compare the number of pixels to a second threshold.

10. The computer program product of claim 9 , comprising instructions to store an image mask identifying one or more regions on the substrate, wherein the plurality of pixels are pixels within the regions identified by the image mask.

11. The computer program product of claim 7 , comprising instructions to analyze the color image to find a wafer alignment feature and to transform the color image to a standard coordinate system.

12. The computer program product of claim 7 , comprising instructions to normalize the color image.

13. The computer program product of claim 7 , comprising instructions to apply a high-pass spatial filter to the image.

14. The computer program product of claim 7 , wherein the pair of color channels does not include a luminance channel.

15. A computer program product, comprising a non-transitory computer readable medium encoded with instructions to cause one or more processors to:
receive color data of a substrate from a line-scan camera that scans across the substrate along a first axis;
generate a color image of the substrate from the color data;
average pixel values of the color image only along an image axis corresponding to the first axis to generate a smoothed color image, wherein the instructions to average pixel values comprise instructions to average pixel values within a threshold distance; and
generate a signal to an operator based on the smoothed color image.

16. The computer program product of claim 15 , comprising instructions to generate a filtered image by dividing the color image by the smoothed color image.

17. The computer program product of claim 15 , comprising instructions to:
store data indicating a boundary of an area in a 2-dimensional color space, the 2-dimensional color space having a pair of color channels including a first color channel and a second color channel as axes of the color space;
for each pixel of a plurality of pixels of the smoothed color image, perform a comparison of a pair of color values for the pair of color channels for the pixel to the boundary of the area in the 2-dimensional color space to determine whether the pair of color values meet thresholds provided by the boundary; and
generate a signal to an operator based on results of the comparison for the plurality of pixels.

Assignees

• Applied Materials Inc

Inventors

• Benvegnu Dominic J
• Tolles Robert D
• Swedek Boguslaw A
• Ravid Abraham

Classifications

• H10P74/203 Primary

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• H10P74/277

  Circuits for electrically characterising or monitoring manufacturing processes, e.g. circuits in tested chips or circuits in testing wafers · CPC title

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• H10P52/402

  of semiconductor materials · CPC title

• G06T11/10

  Texturing; Colouring; Generation of textures or colours (retouching, inpainting or scratch removal G06T5/77) · CPC title