Semiconductor substrate support with multiple electrodes and method for making same

Patent metadata

Field	Value
Publication number	US-11712745-B2
Application number	US-202217583483-A
Country	US
Kind code	B2
Filing date	Jan 25, 2022
Priority date	Nov 30, 2011
Publication date	Aug 1, 2023
Grant date	Aug 1, 2023

Abstract

A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770 C to 1200 C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

First claim

What is claimed is:

1. A method for manufacturing an electrostatic chuck, said method comprising:
joining a first ceramic plate to a second ceramic plate using a metal joining layer, machining an exclusion pattern in the metal joining layer through voids in said first ceramic plate; and filling the voids with a dielectric filler material without the dielectric filler material entering into the exclusion pattern.

2. The method of claim 1 wherein said metal joining layer comprises aluminum of greater than 99% by weight.

3. The method of claim 1 wherein the step of joining a first ceramic plate to a second ceramic plate comprises the steps of:
depositing a layer of aluminum onto a joining surface of said first ceramic plate; placing a joining surface of said first ceramic piece onto a joining surface of said second ceramic piece with said layer of aluminum between said first ceramic piece and said second ceramic piece; heating said first ceramic plate to said second at a temperature of greater than 770 C while at a pressure lower than 1×10 E −4 Torr.

4. The method of claim 3 wherein said second ceramic piece comprises a ceramic from the group of alumina, aluminum oxide, beryllia, and zirconia.

5. The method of claim 2 wherein said first ceramic piece comprises a ceramic from the group of alumina, aluminum oxide, beryllia, and zirconia.

6. The method of claim 5 wherein said second ceramic piece comprises a ceramic from the group of alumina, aluminum oxide, beryllia, and zirconia.

7. The method of claim 6 wherein said second ceramic piece comprises a ceramic from the group of alumina, aluminum oxide, beryllia, and zirconia.

8. The method of claim 1 wherein the step of filling the voids comprises filling the voids with a dielectric effect epoxy.

9. The method of claim 1 wherein the step of machining an exclusion pattern comprises machining an exclusion pattern which comprises a plurality of isolated electrode portions.

10. The method of claim 4 wherein the step of machining an exclusion pattern comprises machining an exclusion pattern which comprises a plurality of isolated electrode portions.

11. The method of claim 8 wherein the step of machining an exclusion pattern comprises machining an exclusion pattern which comprises a plurality of isolated electrode portions.

12. The method of claim 1 wherein the step of machining an exclusion pattern comprises machining an exclusion pattern which comprises a circumferential ring within the outer periphery of said first ceramic piece and said second ceramic piece.

13. The method of claim 8 wherein the step of machining an exclusion pattern comprises machining an exclusion pattern which comprises a circumferential ring within the outer periphery of said first ceramic piece and said second ceramic piece.

14. The method of claim 11 wherein the step of machining an exclusion pattern comprises machining an exclusion pattern which comprises a circumferential ring within the outer periphery of said first ceramic piece and said second ceramic piece.

Assignees

• Watlow Electric Mfg

Inventors

• Parker Michael
• Elliot Alfred Grant
• Elliot Brent Donald Alfred
• Balma Frank
• Schuster Richard Erich
• Rex Dennis George
• Veytser Alexander

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/722

  Details of electrostatic chucks · CPC title

• H10P72/0432

  mainly by conduction · CPC title

• H10P72/72

  using electrostatic chucks · CPC title