Electrostatic puck assembly with metal bonded backing plate for high temperature processes

Patent metadata

Field	Value
Publication number	US-10008399-B2
Application number	US-201514830389-A
Country	US
Kind code	B2
Filing date	Aug 19, 2015
Priority date	May 19, 2015
Publication date	Jun 26, 2018
Grant date	Jun 26, 2018

Abstract

An electrostatic puck assembly includes an upper puck plate, a lower puck plate and a backing plate. The upper puck plate comprises AlN or Al 2 O 3 and has a first coefficient of thermal expansion. The lower puck plate comprises a material having a second coefficient of thermal expansion that approximately matches the first coefficient of thermal expansion and is bonded to the upper puck plate by a first metal bond. The backing plate comprises AlN or Al 2 O 3 and is bonded to the lower puck plate by a second metal bond.

First claim

What is claimed is:

1. An electrostatic puck assembly comprising:
an upper puck plate comprising AlN or Al 2 O 3 and having a first coefficient of thermal expansion, the upper puck plate further comprising one or more heating elements and one or more electrodes to electrostatically secure a substrate;
a lower puck plate bonded to the upper puck plate by a first metal bond, the lower puck plate comprising material having a second coefficient of thermal expansion that approximately matches the first coefficient of thermal expansion;
a backing plate bonded to a bottom surface of the lower puck plate by a second metal bond, the backing plate comprising AlN or Al 2 O 3 , wherein the backing plate is disc shaped and has a first diameter that is smaller than a second diameter of the lower puck plate; and
an electrically conductive gasket disposed on the bottom surface of the lower puck plate outside of the first diameter of the backing plate.

2. The electrostatic puck assembly of claim 1 , wherein the upper puck plate has a first thickness of approximately 3-10 mm, the backing plate has a second thickness of approximately 3-10 mm, and the lower puck plate has a third thickness that is equal to or greater than the first thickness and the second thickness.

3. The electrostatic puck assembly of claim 2 , wherein the first thickness is approximately equal to the second thickness.

4. The electrostatic puck assembly of claim 1 , wherein the electrostatic puck assembly is operable at temperatures of up to 300° C. without damage to the electrostatic puck assembly.

5. The electrostatic puck assembly of claim 1 , wherein at least a portion of an outer wall of the backing plate is coated with a metal coating.

6. The electrostatic puck assembly of claim 1 , wherein the backing plate comprises doped AlN having an electrical resistivity of less than 10E9 Ohm·cm.

7. The electrostatic puck assembly of claim 1 , further comprising:
a plasma resistant ceramic coating on an outer wall of the backing plate.

8. The electrostatic puck assembly of claim 1 , wherein the lower puck plate is protected by at least one of a metal protective coating or a metal protective plug.

9. The electrostatic puck assembly of claim 1 , further comprising:
a cooling plate coupled to the backing plate, the cooling plate comprising a gasket disposed on a top side of the cooling plate, wherein the gasket is compressed between the cooling plate and the backing plate, and wherein the gasket acts as a thermal choke between the cooling plate and the backing plate.

10. The electrostatic puck assembly of claim 1 , further comprising:
a ring shaped outer plate approximately having the second diameter, wherein the electrically conductive gasket is disposed between the backing plate and the outer plate.

11. The electrostatic puck assembly of the claim 1 , wherein the lower puck plate comprises at least one of a) Molybdenum, b) a metal matrix composite comprising Si, SiC and Ti, or c) a SiC porous body infiltrated with an AlSi alloy.

12. A method of manufacturing an electrostatic puck assembly, comprising:
forming an upper puck plate comprising AlN or Al 2 O 3 and having a first coefficient of thermal expansion, the upper puck plate further comprising one or more heating elements and one or more electrodes to electrostatically secure a substrate;
bonding a lower puck plate to the upper puck plate with a first metal bond, the lower puck plate having a second coefficient of thermal expansion that approximately matches the first coefficient of thermal expansion;
bonding a backing plate comprising AlN or Al 2 O 3 to a bottom surface of the lower puck plate with a second metal bond, wherein the backing plate is disc shaped and has a first diameter that is smaller than a second diameter of the lower puck plate; and
disposing an electrically conductive gasket on the bottom surface of the lower puck plate outside of the first diameter of the backing plate.

13. The method of claim 12 , wherein the of bonding the lower puck plate to the upper puck plate and the bonding of the backing plate to the lower puck plate are performed in a single process by hot pressing a stack comprising the upper puck plate, a first metal bond layer, the lower puck plate, a second metal bond layer, and the backing plate.

14. The method of claim 12 , wherein the lower puck plate comprises at least one of a) Molybdenum, b) a metal matrix composite comprising Si, SiC and Ti, or c) a SiC porous body infiltrated with an AlSi alloy.

15. The method of claim 12 , further comprising:
placing at least one of a gasket or an o-ring to a top side of a cooling plate;
securing the top side of the cooling plate to the backing plate; and
compressing at least one of the o-ring or the gasket to maintain an approximately equal separation between the cooling plate and the backing plate to facilitate uniform heat transfer between the cooling plate and the backing plate.

16. A substrate support assembly comprising:
a multi-layer stack comprising:
an electrically insulative upper puck plate comprising one or more heating elements and one or more electrodes to electrostatically secure a substrate;
a lower puck plate bonded to the upper puck plate by a first metal bond, the lower puck plate comprising a plurality of features distributed over a bottom side of the lower puck plate at a plurality of different distances from a center of the lower puck plate, wherein each of the plurality of features accommodates one of a plurality of fasteners; and
an electrically insulative backing plate bonded to the lower puck plate by a second metal bond;

a base plate coupled to the multi-layer stack by the plurality of fasteners, wherein the plurality of fasteners each apply an approximately equal fastening force to couple the base plate to the multi-layer stack, wherein the approximately equal fastening force is to facilitate uniform heat transfer between a cooling plate and the multi-layer stack; and
an o-ring compressed between the upper puck plate and the base plate.

17. The substrate support assembly of claim 16 , wherein the cooling plate is connected to the base plate by a plurality of springs, wherein the plurality of springs apply a force to press the cooling plate against the multi-layer stack.

18. The substrate support assembly of claim 17 , further comprising: a gasket disposed on a top side of the cooling plate, wherein the plurality of springs compress the gasket, and wherein the gasket acts as a thermal choke between the cooling plate and the multi-layer stack.

19. The substrate support assembly of claim 16 , wherein the upper puck plate comprises AlN or Al 2 O 3 , the backing plate comprises AlN or Al 2 O 3 , and the lower puck plate comprises one of a) Molybdenum, b) a metal matrix composite comprising Si, SiC and Ti, or c) a SiC porous body infiltrated with an AlSi alloy.

20. The substrate support assembly of claim 16 , wherein the upper puck plate has a first thickness of approximately 3-10 mm, the backing plate has a second thickness of approximately 3-10 mm, and the lower puck plate has a third thickness that is equal to or greater than the first thickness and the second thickness.

Assignees

• Applied Materials Inc

Inventors

• Parkhe Vijay D

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/0432 Primary

  mainly by conduction · CPC title

• H01J37/32477 Primary

  characterised by the means for protecting vessels or internal parts, e.g. coatings · CPC title