Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device

Patent metadata

Field	Value
Publication number	US-11685992-B2
Application number	US-202016738384-A
Country	US
Kind code	B2
Filing date	Jan 9, 2020
Priority date	Sep 25, 2017
Publication date	Jun 27, 2023
Grant date	Jun 27, 2023

Abstract

According to one aspect thereof, there is provided a substrate processing apparatus including: a reaction tube including an outer tube and an inner tube; a manifold connected to an open end of the reaction tube; a lid configured to close one end of the manifold; a first gas supply pipe configured to supply a cleaning gas; and a second gas supply pipe configured to supply a purge gas of purging a space inside the manifold. The reaction tube includes: an exhaust space; an exhaust outlet communicating with the exhaust space; a first exhaust port provided in the inner tube so as to face a substrate accommodated in the inner tube; and second exhaust ports through which the exhaust space communicates with the space inside the manifold. At least one of the second exhaust ports promotes gas exhaust in the exhaust space distanced away from the first exhaust port.

First claim

What is claimed is:

1. A substrate processing apparatus comprising:
a reaction tube comprising an outer tube with a closed end and an inner tube provided inside the outer tube, wherein the inner tube is configured to accommodate therein a substrate to be processed;
a manifold of a cylindrical shape connected to an open end of the reaction tube;
a lid configured to close one end of the manifold opposite to other end of the manifold connected to the reaction tube;
a first gas supply pipe configured to supply a cleaning gas inside the reaction tube; and
a second gas supply pipe configured to supply a purge gas for purging a space inside the manifold,
wherein the reaction tube further comprises:
an exhaust space formed between the outer tube and the inner tube into a C-shape in horizontal cross-section, wherein two partition plates are installed respectively at two ends of the C-shape to close the two ends of the C-shape in a manner that the exhaust space is surrounded by the outer tube, the inner tube and the two partition plates without any other partition plate installed in the exhaust space;
an exhaust outlet formed on the outer tube and communicating with the exhaust space;
a first exhaust port provided in the inner tube so as to face the substrate and configured to discharge a process gas into the exhaust space; and
a plurality of second exhaust ports formed at a bottom of the exhaust space of the C-shape, through which the exhaust space and the space inside the manifold communicate with each other,

wherein at least one of the plurality of the second exhaust ports is configured to promote an exhaust of a stagnated gas in the exhaust space distanced away from the first exhaust port, and
wherein the exhaust space is directly in fluid communication with both the exhaust outlet and the first exhaust port.

2. The substrate processing apparatus of claim 1 , further comprising:
a rotating mechanism configured to rotate the substrate through the lid;
a substrate retainer rotated by the rotating mechanism while supporting the substrate;
a heat insulating assembly of a cylindrical shape configured to insulate a space between the substrate retainer and the lid; and
a plurality of third exhaust ports opened at the inner tube at locations facing the heat insulating assembly,
wherein, by the plurality of the third exhaust ports, the purge gas supplied through the second gas supply pipe is suppressed from passing through a gap between the inner tube and a side surface of the heat insulating assembly and reaching the substrate retainer.

3. The substrate processing apparatus of claim 2 , further comprising:
at least one nozzle provided between the outer tube and the inner tube so as to face the first exhaust port and configured to supply the process gas into the inner tube; and
a nozzle chamber configured to surround a periphery of the at least one nozzle while communicating with the inner tube,
wherein two of the third exhaust ports are respectively arranged in vicinity of the two partition plate.

4. The substrate processing apparatus of claim 3 , wherein the reaction tube further comprises a flange portion configured to close the exhaust space in vicinity of the open end of the reaction tube,
the at least one of the plurality of the second exhaust ports is provided on the flange portion at a position opposite to the first exhaust port,
the heat insulating assembly comprises at least one heat insulating plate provided therein at a height corresponding to the plurality of the third exhaust ports, and
a cavity in which no heat insulating plate is disposed is provided above the at least one heat insulating plate.

5. The substrate processing apparatus of claim 3 , wherein the at least one nozzle comprises a plurality of nozzles,
the nozzle chamber comprises a plurality of partition plates comprising the two partition plates and configured to separate the plurality of the nozzles from each other,
each of sections of the nozzle chamber divided by the plurality of the partition plates communicates with an inside of the inner tube only by one or more supply slits opened so as to face the substrate, and
at least one of the sections comprises a nozzle introduction hole provided at a lower end thereof to communicate with the space inside the manifold with a predetermined conductance.

6. The substrate processing apparatus of claim 5 , wherein an inert gas is supplied to one of the plurality of nozzles provided in the at least one of the sections comprising the nozzle introduction hole.

7. The substrate processing apparatus of claim 5 , wherein each of the sections divided by the plurality of the partition plates, and the one or more supply slits are formed at the plurality of the partition plates to communicate with an inner space surrounded by the inner tube.

8. The substrate processing apparatus of claim 5 , further comprising:
a controller configured to control supplying the purge gas into the reaction tube alternately from the second gas supply pipe and the at least one nozzle after supplying the cleaning gas from the first gas supply pipe.

9. The substrate processing apparatus of claim 3 , wherein a conductance of a path through which the purge gas is exhausted by flowing to the exhaust space from the plurality of the second exhaust ports is greater than a conductance of a path through which the purge gas is exhausted by passing through the side surface of the heat insulating assembly or the nozzle chamber and flowing to the exhaust space from the first exhaust port, and
sizes of the second exhaust ports and a flow rate of the purge gas are set so that a concentration of the process gas having entered the space inside the manifold is equal to or lower than a specified value.

10. A quartz reaction tube comprising:
an outer tube and an inner tube each closed at one end;
a flange portion configured to connect other end of the outer tube with other end of the inner tube;
an exhaust outlet communicating with an exhaust space formed between the outer tube and the inner tube into a C-shape in horizontal cross-section, wherein two partition plates are installed respectively at two ends of the C-shape to close the two ends of the C-shape in a manner that the exhaust space is surrounded by the outer tube, the inner tube and the two partition plates without any other partition plate installed in the exhaust space;
a first exhaust port provided in the inner tube so as to face a substrate and configured to discharge a process gas into the exhaust space;
one or more supply slits configured to supply the process gas into the inner tube at positions facing the first exhaust port between the outer tube and the inner tube;
a plurality of second exhaust ports provided at the flange portion through which an inside and an outside the exhaust space communicate with each other; and
a plurality of third exhaust ports opened at the inner tube at locations facing a heat insulating assembly provided in the inner tube in vicinity of the flange portion,
wherein at least one of the plurality of the second exhaust ports is configured to promote an exhaust of a stagnated gas in the exhaust space distanced away from the first exhaust port, and
the exhaust space is directly in fluid communication with both the exhaust outlet and the first exhaust port.

Assignees

• Kokusai Electric Corp

Inventors

• Okajima Yusaku
• Sasaki Takafumi
• Yoshida Hidenari
• Saido Shuhei
• Ishisaka Mitsunori
• Mimura Hidetoshi

Classifications

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0421

  for drying etching · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/155

  characterised by a material, a roughness, a coating or the like · CPC title