Vacuum encapsulated Josephson junction

Patent metadata

Field	Value
Publication number	US-11678591-B2
Application number	US-202017037109-A
Country	US
Kind code	B2
Filing date	Sep 29, 2020
Priority date	Sep 29, 2020
Publication date	Jun 13, 2023
Grant date	Jun 13, 2023

Abstract

Devices, systems, methods, and/or computer-implemented methods that can facilitate a qubit device comprising a vacuum encapsulated Josephson junction are provided. According to an embodiment, a device can comprise a substrate having an encapsulated vacuum cavity provided on the substrate. The device can further comprise one or more superconducting components of a superconducting circuit provided inside the encapsulated vacuum cavity.

First claim

What is claimed is:

1. A device, comprising:
a vacuum cavity located between a substrate and a capping layer, wherein the capping layer comprises an opening to the vacuum cavity;
a first material layer located in a first direction of the opening;
a second material layer located in a second direction of the opening; and
one or more superconducting components of a superconducting circuit provided inside the vacuum cavity.

2. The device of claim 1 , wherein the superconducting circuit comprises a qubit.

3. The device of claim 1 , wherein the superconducting circuit comprises a transmon qubit and the one or more superconducting components comprise a Josephson junction.

4. The device of claim 1 , wherein at least one element selected from the group consisting of: the substrate, the one or more superconducting components, and the superconducting circuit comprises one or more single crystal materials.

5. The device of claim 1 , further comprising:
one or more superconducting electrodes provided on a surface of at least one element selected from the group consisting of: the substrate and the one or more superconducting components.

6. A method, comprising:
forming one or more superconducting components of a superconducting circuit inside a vacuum cavity provided on a substrate; and
enclosing the vacuum cavity to encapsulate the one or more superconducting components inside the vacuum cavity, wherein enclosing the vacuum cavity comprises:
depositing a first material in a first direction; and
depositing a second material in a second direction.

7. The method of claim 6 , wherein the superconducting circuit comprises a qubit.

8. The method of claim 6 , wherein the superconducting circuit comprises a transmon qubit and the one or more superconducting components comprise a Josephson junction.

9. The method of claim 6 , wherein the depositing comprises growing one or more crystalline materials using at least one epitaxial film growth process.

10. The method of claim 6 , further comprising:
forming one or more superconducting electrodes on a surface of at least one of the substrate, the one or more superconducting components, or the superconducting circuit.

11. A device, comprising:
a vacuum cavity located between a substrate and a capping layer, wherein the capping layer comprises an opening to the vacuum cavity;
a first material layer located in a first direction of the opening;
a second material layer located in a second direction of the opening;
a third material located between the first material layer and the second material layer in the opening; and
one or more superconducting components comprising one or more epitaxial films provided inside the vacuum cavity.

12. The device of claim 11 , wherein the one or more superconducting components comprise a Josephson junction.

13. The device of claim 11 , wherein at least one element selected from the group consisting of: the substrate and the one or more superconducting components comprises one or more single crystal materials.

14. The device of claim 11 , further comprising:
one or more superconducting electrodes provided on a surface of at least one element selected from the group consisting of: the substrate and the one or more superconducting components.

15. The device of claim 1 further comprising a remaining portion of a removable layer located between the capping layer and the substrate.

16. The device of claim 15 wherein the remaining portion of the removable layer, the substrate, the capping layer, the first material layer, and the second material layer define the vacuum cavity.

17. The method of claim 6 further comprising depositing a third material layer in a third direction.

18. The method of claim 6 , wherein a Josephson junction is formed during the depositing of the first material and the depositing of the second material.

19. The device of claim 11 further comprising a remaining portion of a removable layer located between the capping layer and the substrate.

20. The device of claim 15 wherein the remaining portion of the removable layer, the substrate, the capping layer, the first material layer, the second material layer, and the third material layer define the vacuum cavity.

Assignees

• IBM

Inventors

• Lauer Isaac
• Balakrishnan Karthik
• Sleight Jeffrey
• Frank David James

Classifications

• H10N60/12

  Josephson-effect devices · CPC title

• G06N10/40 Primary

  Physical realisations or architectures of quantum processors or components for manipulating qubits, e.g. qubit coupling or qubit control · CPC title

• H10N60/81

  Containers; Mountings · CPC title

• H10N60/805 Primary

  for Josephson-effect devices · CPC title

• H10N60/0912

  of Josephson-effect devices · CPC title