Light-receiving element and distance measurement module using indirect time of flight

Patent metadata

Field	Value
Publication number	US-11670664-B2
Application number	US-201916631940-A
Country	US
Kind code	B2
Filing date	Jul 4, 2019
Priority date	Jul 18, 2018
Publication date	Jun 6, 2023
Grant date	Jun 6, 2023

Abstract

The present technology relates to a light-receiving element and a distance measurement module. A light-receiving element includes: a first voltage application unit to which a voltage is applied; a first charge detection unit that is disposed at a periphery of the first voltage application unit; a second voltage application unit to which a voltage is applied; a second charge detection unit that is disposed at a periphery of the second voltage application unit; a third voltage application unit to which a first voltage is applied; and a voltage control unit that applies a second voltage to one of the first voltage application unit and the second a voltage application unit and causes the other to be in a floating state, the second voltage being different from the first voltage. The present technology is applicable to a light-receiving element.

First claim

What is claimed is:

1. A light-receiving element to measure distance, comprising:
a tap drive unit:
a first signal extraction unit including:
a first voltage application unit wherein the first voltage application unit comprises a first P-type semiconductor region; and
a first charge detection unit wherein the first charge detection unit comprises a first N+ semiconductor region, and wherein the first charge detection unit is disposed at a periphery of the first voltage application unit; and

a second signal extraction unit including:
a second voltage application unit, wherein the second voltage application unit comprises a second P-type semiconductor region; and
a second charge detection unit wherein the second charge detection unit comprises a second N+ semiconductor region, and wherein the second charge detection unit is disposed at a periphery of the second voltage application unit.

2. The light-receiving element according to claim 1 , further comprising:
an on-chip lens;
an interconnection layer; and
a semiconductor layer to be disposed between the on-chip lens and the interconnection layer, wherein the first voltage application unit, the first charge detection unit, the second voltage application unit, and the second charge detection unit are formed in the semiconductor layer.

3. The light-receiving element according to claim 2 , wherein the interconnection layer includes at least one layer including a reflection member, and wherein the reflection member is provided to overlap the first charge detection unit or the second charge detection unit in a plan view.

4. The light-receiving element according to claim 2 , wherein the interconnection layer includes at least one layer including a light-shielding member, and wherein the light-shielding member is provided to overlap the first charge detection unit or the second charge detection unit in a plan view.

5. The light-receiving element according to claim 2 , wherein a transparent electrode is formed on a surface of the semiconductor layer on a side of the on-chip lens.

6. The light-receiving element according to claim 5 , wherein the transparent electrode is connected to a ground line.

7. The light-receiving element according to claim 2 , further comprising:
a first pixel isolation unit, the first pixel isolation unit formed at a pixel boundary on a side of the first voltage application unit in a direction in which the first voltage application unit and the second voltage application unit are arranged in the semiconductor layer; and
a second pixel isolation unit, the second pixel isolation unit formed at a pixel boundary on a side of the second voltage application unit in the direction in which the first voltage application unit and the second voltage application unit are arranged in the semiconductor layer.

8. The light-receiving element according to claim 7 , further comprising:
a third pixel isolation unit, the third pixel isolation unit formed at a pixel boundary in a direction perpendicular to the direction in which the first voltage application unit and the second voltage application unit are arranged in the semiconductor layer.

9. The light-receiving element according to claim 1 , wherein the first P-type semiconductor region and the second P-type semiconductor region comprise a P+ semiconductor region.

10. The light-receiving element according to claim 2 , wherein the first voltage application unit and the second voltage application unit are respectively constituted by a first transistor formed in the semiconductor layer and a second transistor formed in the semiconductor layer.

11. A distance measurement module, comprising:
a light source;
a light-emission control unit; and
a light-receiving element including:
an on-chip lens;
an interconnection layer;
a semiconductor layer to be disposed between the on-chip lens and the interconnection layer;
a pixel isolation unit formed at a pixel boundary in the semiconductor layer;
a tap drive unit;
a first signal extraction unit including:
a first voltage application unit, wherein the first voltage application unit comprises a first P-type semiconductor region; and
a first charge detection unit wherein the first charge detection unit comprises a first N+ semiconductor region, and wherein the first charge detection unit is disposed at a periphery of the first voltage application unit; an

a second signal extraction unit including:
a second voltage application unit, wherein the second voltage application unit comprises a second P-type semiconductor region; and
a second charge detection unit, wherein the second charge detection unit comprises a second N+ semiconductor region, and wherein the second charge detection unit is disposed at a periphery of the second voltage application unit.

Assignees

• Sony Semiconductor Solutions Corp

Inventors

• Maruyama Takuya
• Isogai Yuji
• Imoto Tsutomu
• Murase Takuro
• Watanabe Ryota

Classifications

• H04N25/70

  SSIS architectures; Circuits associated therewith · CPC title

• H10F39/8067

  Reflectors · CPC title

• H10F39/8057

  Optical shielding · CPC title

• H10F39/024

  of coatings or optical elements · CPC title

• H10F39/8063

  Microlenses · CPC title