Method of atomic layer deposition

Patent metadata

Field	Value
Publication number	US-11670503-B2
Application number	US-202016740075-A
Country	US
Kind code	B2
Filing date	Jan 10, 2020
Priority date	Mar 20, 2015
Publication date	Jun 6, 2023
Grant date	Jun 6, 2023

Abstract

Methods for depositing ultrathin films by atomic layer deposition with reduced wafer-to-wafer variation are provided. Methods involve exposing the substrate to soak gases including one or more gases used during a plasma exposure operation of an atomic layer deposition cycle prior to the first atomic layer deposition cycle to heat the substrate to the deposition temperature.

First claim

What is claimed is:

1. A method for depositing a film by plasma-enhanced atomic layer deposition on semiconductor substrates, the method comprising:
(a) inserting a first semiconductor substrate into a chamber; and
(b) after inserting the first semiconductor substrate into the chamber and prior to performing a first cycle of plasma-enhanced atomic layer deposition (PEALD) at a deposition temperature, raising the first semiconductor substrate's temperature to about the deposition temperature by exposing the first semiconductor substrate to a soak gas for a duration of about 500 seconds or less;
(c) performing the PEALD to deposit a first film on the first semiconductor substrate to a thickness less than about 5 nm; and
(d) after depositing the first film on the first semiconductor substrate, performing the PEALD in one or more cycles to deposit a second film on a second semiconductor substrate,

wherein a cycle of the PEALD comprises
exposing the substrate to a precursor in a non-plasma environment for a duration sufficient to substantially adsorb the precursor to a surface of the substrate,
exposing the substrate to a second reactant in a plasma environment to form at least a portion of the film, and

wherein the soak gas contains only one or more gases used when exposing the first semiconductor substrate to the second reactant in the plasma environment during the first cycle of the PEALD to form the at least a portion of the first film.

2. The method of claim 1 , wherein proportion of gases in the soak gas is substantially the same as proportion of the gases during the exposing of the substrate to the second reactant in the cycle of PEALD.

3. The method of claim 1 , wherein the soak gas is helium-free.

4. The method of claim 1 , wherein flow rate of the soak gas in (b) is within about 10% of a maximum flow rate achievable by the chamber.

5. The method of claim 4 , wherein flow rate of the soak gas in (b) is at least about 15 slm.

6. The method of claim 1 , wherein flow rate of the soak gas in (b) is at least about 25% to about 200% of the flow rate of the second reactant used when exposing the first semiconductor substrate to the second reactant in the plasma environment during the cycle of the PEALD.

7. The method of claim 1 , wherein wafer-to-wafer variation between average thickness of the first film and the second film is less than about ±2 Å.

8. The method of claim 1 , wherein between two and about fifty cycles of the PEALD are performed on each semiconductor substrate.

9. The method of claim 1 , wherein the first semiconductor substrate is exposed to the soak gas for a duration between about 5 seconds and about 60 seconds.

10. The method of claim 1 , wherein the first film comprises silicon oxide and the second film comprises silicon oxide.

11. The method of claim 1 , wherein the soak gas in (b) is selected from the group consisting of argon, nitrogen, oxygen, nitrous oxide, and combinations thereof.

12. The method of claim 1 , wherein the precursor is selected from the group consisting of silane, disilane, trisilane, tetrasilane, halogen-substituted versions of any of the foregoing silanes, amine-substituted versions of any of the foregoing silanes, and trisilylamine.

13. The method of claim 1 , wherein the second reactant is selected from the group consisting of oxygen, nitrous oxide, and combinations thereof.

14. The method of claim 1 , wherein the atomic layer deposition is performed at a temperature of between about 30° C. and about 70° C.

15. The method of claim 1 , wherein the first cycle of the atomic layer deposition further comprises purging the chamber between each exposing operation.

Assignees

• Lam Res Corp

Inventors

• Qian Jun
• Kang Hu
• Lavoie Adrien
• Matsuyama Seiji
• Kumar Purushottam

Classifications

• H10P14/69215

  the material being a silicon oxide, e.g. SiO2 · CPC title

• H10P14/6682

  the compound being a silane, e.g. disilane, methylsilane or chlorosilane · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title

• H10P14/6339 Primary

  deposition by cyclic CVD, e.g. ALD, ALE or pulsed CVD · CPC title

• H10P14/3402

  characterised by the chemical composition · CPC title