Thin film transistors for high voltage applications

Patent metadata

Field	Value
Publication number	US-11658208-B2
Application number	US-201815926969-A
Country	US
Kind code	B2
Filing date	Mar 20, 2018
Priority date	Mar 20, 2018
Publication date	May 23, 2023
Grant date	May 23, 2023

Abstract

A thin film transistor (TFT) apparatus is disclosed, where the apparatus includes a gate comprising metal, a source and a drain, a semiconductor body, and two or more dielectric structures between the gate and the semiconductor body. In an example, the two or more dielectric structures may include at least a first dielectric structure having a first bandgap and a second dielectric structure having a second bandgap. The first bandgap may be different from the second bandgap. The TFT apparatus may be a back-gated TFT apparatus where the source is at least in part coplanar with the drain, and the gate is non-coplanar with the source and the drain.

First claim

We claim:

1. A thin film transistor (TFT) apparatus, comprising:
a gate comprising metal;
a source and a drain;
a semiconductor body;
a multilayer gate dielectric between the gate and the semiconductor body, the multilayer gate dielectric comprising a first layer, a second layer on the first layer, and a third layer on the second layer, the first layer comprising a first material, the second layer comprising a second material, and the third layer comprising the first material, wherein the first or second material comprises hafnium, zirconium, and oxygen, and the other of the first or second material comprises aluminum and oxygen;
wherein the source and drain are substantially coplanar, and wherein the source and drain are opposite the semiconductor body from the gate.

2. The TFT apparatus of claim 1 , wherein the first material comprises hafnium, zirconium, and oxygen and the second material comprises aluminum and oxygen.

3. The TFT apparatus of claim 1 , wherein the multilayer gate dielectric further comprises a fourth layer comprising a third material.

4. The TFT apparatus of claim 3 , wherein the third material comprises hafnium, silicon, oxygen, and nitrogen.

5. The TFT apparatus of claim 1 , wherein the semiconductor body comprises a recess, and wherein the recess is opposite the gate from a section of the semiconductor body.

6. The TFT apparatus of claim 1 , wherein the multilayer gate dielectric has a thickness of at least 5 nanometers.

7. The TFT apparatus of claim 1 , wherein the multilayer gate dielectric has a thickness of not more than 20 nanometers.

8. The TFT apparatus of claim 1 , wherein the multilayer gate dielectric has a combined breakdown voltage of at least 1 megavolt/cm.

9. The TFT apparatus of claim 1 , wherein the multilayer gate dielectric has a combined dielectric constant of at least 15.

10. The TFT apparatus of claim 1 , further comprising:
a die comprising at least one of processor circuitry or memory, wherein the die comprises the gate, the source, the drain, the semiconductor body, and the multilayer gate dielectric; and
a wireless interface to allow the processor to communicate with another device.

11. A thin film transistor (TFT) apparatus, comprising:
a gate comprising metal;
a multilayer gate dielectric over the gate, the multilayer gate dielectric comprising a first layer, a second layer on the first layer, and a third layer on the second layer, the first layer comprising a first material, the second layer comprising a second material, and the third layer comprising the first material, wherein the first or second material comprises hafnium, zirconium, and oxygen, and the other of the first or second material comprises aluminum and oxygen;
a semiconductor body over multilayer gate dielectric, the semiconductor body comprising a mid-section, a first end extending over the mid-section, and a second end extending over the mid-section, wherein the mid-section, the first end, and the second end define a recess within the semiconductor body, wherein the mid-section is between the gate and the recess;
a source on the first end and a drain on the second end, wherein the source and drain are opposite the semiconductor body from the gate.

12. The TFT apparatus of claim 11 , further comprising a passivation material within the recess.

13. The TFT apparatus of claim 11 , wherein the first material comprises hafnium, zirconium, and oxygen and the second material comprises aluminum and oxygen.

14. The TFT apparatus of claim 11 , wherein the multilayer gate dielectric further comprises a fourth layer comprising a third material.

15. The TFT apparatus of claim 14 , wherein the third material comprises hafnium, silicon, oxygen, and nitrogen.

16. The TFT apparatus of claim 11 , wherein the semiconductor body comprises a recess, and wherein the recess is opposite the gate from a section of the semiconductor body.

17. The TFT apparatus of claim 11 , wherein the multilayer gate dielectric has a thickness of at least 5 nanometers or not more than 20 nanometers.

18. The TFT apparatus of claim 11 , wherein the multilayer gate dielectric has a combined breakdown voltage of at least 1 megavolt/cm.

19. The TFT apparatus of claim 11 , wherein the multilayer gate dielectric has a combined dielectric constant of at least 15.

20. The TFT apparatus of claim 11 , further comprising:
a die comprising at least one of processor circuitry or memory, wherein the die comprises the gate, the source, the drain, the semiconductor body, and the multilayer gate dielectric; and
a wireless interface to allow the processor to communicate with another device.

Assignees

• Intel Corp

Inventors

• Sharma Abhishek A
• Rachmady Willy
• Le Van H
• Dewey Gilbert
• Pillarisetty Ravi

Classifications

• H10D64/037

  comprising charge-trapping insulators · CPC title

• H10D30/0413

  of FETs having charge-trapping gate insulators, e.g. MNOS transistors · CPC title

• H10D30/69

  IGFETs having charge trapping gate insulators, e.g. MNOS transistors · CPC title

• H10D64/691

  comprising metallic compounds, e.g. metal oxides or metal silicates  (insulators comprising nitrogen H10D64/693) · CPC title

• H10D30/031 Primary

  of thin-film transistors [TFT] · CPC title