Processing apparatus

Patent metadata

Field	Value
Publication number	US-11633872-B2
Application number	US-202117337544-A
Country	US
Kind code	B2
Filing date	Jun 3, 2021
Priority date	Jun 29, 2020
Publication date	Apr 25, 2023
Grant date	Apr 25, 2023

Abstract

A processing apparatus includes a chuck table, a first and second image capturing units, a display device, and a controller. The first image capturing unit obtains a first image group of images captured of a processed groove in the workpiece at different positions along a thicknesswise direction, each including a piece of first image information representing a shape of the processed groove. The second image capturing unit obtains a second image group of images captured of the processed groove at different positions along the thicknesswise direction of the workpiece, each including a piece of second image information representing a shape of the processed groove. The controller orders the pieces of at least either the first or the second image information into a sequence along the thicknesswise direction, thereby generating a three-dimensional image of the processed groove, and displays the three-dimensional image on the display device.

First claim

What is claimed is:

1. A processing apparatus for processing a plate-shaped workpiece while holding a face side of the workpiece that has a plurality of devices, each device being formed in respective areas demarcated by a plurality of projected dicing lines established on the face side, the processing apparatus comprising:
a chuck table for holding the face side of the workpiece thereon, the chuck table having a holding member including a surface and another surface positioned opposite the surface and having a predetermined region made of a transparent material extending from the surface to the other surface;
a processing unit for processing the workpiece whose face side is being held on the chuck table, thereby forming a processed groove in the workpiece;
a first image capturing unit disposed above the chuck table and having a first image capturing device for capturing an image of a reverse side of the workpiece held on the chuck table, wherein the workpiece defines a Z-axis direction extending between the face side of the workpiece and the reverse side of the workpiece;
a second image capturing unit disposed below the chuck table and having a second image capturing device for capturing an image of the face side of the workpiece through the holding member;
a display device for displaying the image of the workpiece captured by at least either the first image capturing unit or the second image capturing unit; and
a controller having a storage section for storing programs for performing an image processing process and a processing device for processing the images according to the programs stored in the storage section,
wherein the first image capturing unit obtains a first image group of images of a first area of the reverse side of the workpiece captured of the processed groove while positioning a focal point thereof at a plurality of different positions along the Z-axis direction of the workpiece without moving the focal point in a direction perpendicular to the Z-axis direction, each of the images of the first image group including a piece of first image information representing a shape of the processed groove, and the second image capturing unit obtains a second image group of images of a second area of the face side of the workpiece captured of the processed groove while positioning a focal point thereof at a plurality of different positions along the Z-axis direction of the workpiece without moving the focal point in a direction perpendicular to the Z-axis direction, each of the images of the second image group including a piece of second image information representing a shape of the processed groove, and the controller orders the pieces of at least either the first image information or the second image information into a sequence along the Z axis direction of the workpiece, thereby generating a three-dimensional image of a portion of the processed groove, and displays the three-dimensional image on the display device.

2. The processing apparatus according to claim 1 ,
wherein the controller orders the pieces of both the first image information and the second image information into a sequence along the Z axis direction of the workpiece, thereby generating a three-dimensional image of the processed groove, and displays the three-dimensional image on the display device.

3. A processing apparatus for processing a plate-shaped workpiece while holding a face side of the workpiece that has a plurality of devices, each device being formed in respective areas demarcated by a plurality of projected dicing lines established on the face side, the processing apparatus comprising:
a chuck table for holding the face side of the workpiece thereon, the chuck table having a holding member including a surface and another surface positioned opposite the surface and having a predetermined region made of a transparent material extending from the surface to the other surface;
a processing unit for processing the workpiece whose face side is being held on the chuck table, thereby forming a processed groove in the workpiece;
a first image capturing unit disposed above the chuck table and having a first image capturing device for capturing an image of a reverse side of the workpiece held on the chuck table, wherein the workpiece defines a Z-axis direction extending between the face side of the workpiece and the reverse side of the workpiece;
a second image capturing unit disposed below the chuck table and having a second image capturing device for capturing an image of the face side of the workpiece through the holding member;
a display device for displaying the image of the workpiece captured by at least either the first image capturing unit or the second image capturing unit; and
a controller having a storage section for storing programs for performing an image processing process and a processing device for processing the images according to the programs stored in the storage section,
wherein the controller is configured and arranged to:
obtain a first image group of images of the processed groove from the first image capturing unit by positioning a focal point thereof at an initial position along the Z-axis direction and relatively moving the focal point of the first image capturing unit and the workpiece with respect to each other in an X-axis direction, while maintaining the focal point of the first image capturing unit at the initial Z-axis position, to obtain an initial image of the first image group; then positioning the focal point of the first image capturing unit at an intermediate position along the Z-axis direction and relatively moving the focal point of the first image capturing unit and the workpiece with respect to each other in an X-axis direction, while maintaining the focal point of the first image capturing unit at the intermediate Z-axis position, to obtain an intermediate image of the first image group; and then positioning the focal point of the first image capturing unit at an additional position along the Z-axis direction and relatively moving the focal point of the first image capturing unit and the workpiece with respect to each other in an X-axis direction, while maintaining the focal point of the first image capturing unit at the additional Z-axis position, to obtain an additional image of the first image group, wherein each of the images of the first image group includes a piece of first image information representing a shape of the processed groove;
obtain a second image group of images of the processed groove from the second image capturing unit by positioning a focal point thereof at an initial position along the Z-axis direction and relatively moving the focal point of the second image capturing unit and the workpiece with respect to each other in an X-axis direction, while maintaining the focal point of the second image capturing unit at the initial Z-axis position, to obtain an initial image of the second image group; then positioning the focal point of the second image capturing unit at an intermediate position along the Z-axis direction and relatively moving the focal point of the second image capturing unit and the workpiece with respect to each other in an X-axis direction, while maintaining the focal point of the second image capturing unit at the intermediate Z-axis position, to obtain an intermediate image of the second image group; and then positioning the focal point of the second image capturing unit at an additional position along the Z-axis direction and relatively moving the focal point of the second image capturing unit and the workpiece with respect to each other in an X-axis direction, while maintaining the focal point of the second image capturing unit at the additional Z-axis position, to obtain an additional image of the second image group, wherein each of the images of the second image group includes a piece of second image

Assignees

• Disco Corp

Inventors

• Kojima Yoshimasa
• Sasaki Shohei

Classifications

• H10P52/00

  Grinding, lapping or polishing of wafers, substrates or parts of devices · CPC title

• H10P72/53

  using optical controlling means · CPC title

• H10P72/0428 Primary

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• B28D5/02 Primary

  by rotary tools, e.g. drills {(B28D5/0005 takes precedence)} · CPC title

• B26D5/007 Primary

  Control means comprising cameras, vision or image processing systems · CPC title