Fabrication of metal organic framework materials using a layer-by-layer spin coating approach

Patent metadata

Field	Value
Publication number	US-11623203-B2
Application number	US-202016861283-A
Country	US
Kind code	B2
Filing date	Apr 29, 2020
Priority date	Sep 11, 2014
Publication date	Apr 11, 2023
Grant date	Apr 11, 2023

Abstract

Embodiments describe a method of depositing an MOF, including depositing a metal solution onto a substrate, spinning the substrate sufficient to spread the metal solution, depositing an organic ligand solution onto the substrate and spinning the substrate sufficient to spread the organic ligand solution and form a MOF layer.

First claim

What is claimed is:

1. A method of depositing a patterned MOF, comprising:
depositing a metal solution onto a pre-patterned substrate;
spinning the substrate at 500-6000 rpm for a time sufficient to spread the metal solution thoroughly across the substrate;
depositing an organic ligand solution onto the substrate; and
spinning the substrate at 500-6000 rpm for a time sufficient for the metal solution to react with the organic ligand solution and form a MOF layer;
wherein the surface of the substrate is pre-patterned by functionalizing with a self-assembled monolayer (SAM) and the SAM is laterally patterned via micro-contact printing.

2. The method of claim 1 , wherein the SAM is a COOH-terminated SAM, and the metal of the metal solution selectively binds to the COOH-terminated SAM.

3. The method of claim 2 , wherein the COOH-terminated SAM is 16-mercaptohexadecanioic acid (MHDA).

4. The method of claim 1 , wherein the substrate comprises alumina, titanium oxide, polymer, copolymer, carbon, metal, or a metal oxide.

5. The method of claim 4 , wherein the substrate comprises gold.

6. The method of claim 1 , wherein the substrate is a quartz crystal microbalance substrate.

7. The method of claim 1 , wherein the metal solution comprises a metal ion or cluster.

8. The method of claim 7 , wherein the metal ion comprises a divalent metal cation, trivalent metal cation, clusters of divalent or trivalent metal ions, or combinations thereof.

9. The method of claim 1 , wherein the organic ligand solution comprises polytopic ligands.

10. The method of claim 1 , wherein the organic ligand solution comprises one or more of terephthalic acid, trimesic acid, dabco, bipyridine, and pyrazine.

11. The method of claim 1 , wherein the substrate is spinning at less than 500 RPM when the metal solution, the organic ligand solution, or both the metal and organic ligand solutions are deposited.

12. The method of claim 1 , further comprising two or more cycles of depositing a metal solution and spinning.

13. The method of claim 1 , further comprising two or more cycles of depositing an organic ligand solution and spinning.

14. The method of claim 1 , further comprising a step of washing unadhered metal solution from the pre-patterned substrate.

15. The method of claim 14 , further comprising a step of washing unreacted organic ligand from the formed MOF layer.

16. The method of claim 1 , wherein at least one of the metal solution and the organic ligand solution comprises a volatile solvent.

17. The method of claim 16 , wherein the volatile solvent is ethanol or methanol.

18. The method of claim 1 , wherein the MOF layer is represented by the formula M 2 (CH 3 COO) 4 .H 2 O, wherein M is copper or zinc.

Assignees

• Univ King Abdullah Sci & Tech

Inventors

• Eddaoudi Mohamed
• Shekhah Osama

Classifications

• B05D1/005

  Spin coating · CPC title

• B01J20/3204

  Inorganic carriers, supports or substrates · CPC title

• B01J20/3236

  containing metal, other than zeolites, e.g. oxides, hydroxides, sulphides or salts · CPC title

• C07F1/005

  without C-Metal linkages · CPC title

• B01J20/3265

  with an organic functional group containing a metal, e.g. a metal affinity ligand · CPC title