Porous solid materials and methods for fabrication

Patent metadata

Field	Value
Publication number	US-11618966-B2
Application number	US-201816616804-A
Country	US
Kind code	B2
Filing date	Jul 10, 2018
Priority date	Jul 18, 2017
Publication date	Apr 4, 2023
Grant date	Apr 4, 2023

Abstract

Porous solid materials are provided. The porous solid materials include a plurality of interconnected wires forming an ordered network. The porous solid materials may have a predetermined volumetric surface area ranging between 2 m2/cm3 and 90 m2/cm3, a predetermined porosity ranging between 3% and 90% and an electrical conductivity higher than 100 S/cm. The porous solid materials may have a predetermined volumetric surface area ranging between 3 m2/cm3 and 72 m2/cm3, a predetermined porosity ranging between 80% and 95% and an electrical conductivity higher than 100 S/cm. The porous solid materials (100) may have a predetermined volumetric surface area ranging between 3 m2/cm3 and 85 m2/cm3, a predetermined porosity ranging between 65% and 90% and an electrical conductivity higher than 2000 S/cm. Methods for the fabrication of such porous solid materials and devices including such porous solid material are also disclosed.

First claim

The invention claimed is:

1. A method for fabricating a porous solid material comprising a plurality of interconnected electrically conductive wires, the plurality of interconnected electrically conductive wires forming an ordered network comprising a plurality of first wires having a first longitudinal direction and a plurality of second wires having a second longitudinal direction different from the first longitudinal direction, wherein the plurality of first wires and the plurality of second wires are arranged according to a regular pattern with a predetermined average interwire distance between adjacent wires, and wherein the plurality of first wires and the plurality of second wires have a predetermined average wire diameter, wherein the method comprises:
(a) fabricating a template comprising a plurality of interconnected channels, the fabricating the template comprising:
(i) performing a first anodization step of a doped valve metal layer at a predetermined anodization voltage, thereby anodizing at least part of the valve metal layer in a thickness direction and thereby forming a porous layer of valve metal oxide comprising a plurality of interconnected channels, the plurality of interconnected channels forming an ordered network comprising a plurality of first channels having the first longitudinal direction and a plurality of second channels having the second longitudinal direction, wherein the plurality of first channels and the plurality of second channels are arranged according to a regular pattern having the predetermined average interwire distance between adjacent channels, and wherein the plurality of first channels and the plurality of second channels have an average channel width, each channel having channel walls, the plurality of first channels having a channel bottom, the channel bottoms being coated with a first insulating metal oxide barrier layer as a result of the first anodization step;
(ii) performing a protective treatment of the porous layer of valve metal oxide, thereby inducing hydrophobic surfaces to the channel walls and channel bottoms;
(iii) performing a second anodization step at the predetermined anodization voltage after the protective treatment, thereby substantially removing the first insulating metal oxide barrier layer from the channel bottoms, inducing anodization only at the bottoms of the plurality of first channels and creating a second insulating metal oxide barrier layer at the channel bottoms; and
(iv) performing an etching step in an etching solution, thereby removing the second insulating metal oxide barrier layer from the channel bottoms without thereby increasing the average channel width and forming the template;

(b) afterward depositing a solid electrically conductive material within the plurality of interconnected channels of the template to form the porous solid material comprising the plurality of interconnected electrically conductive wires; and
(c) afterward removing the template to thereby obtain the porous solid material comprising the plurality of interconnected electrically conductive wires.

2. The method according to claim 1 , wherein fabricating the template further comprises, if the average channel width is smaller than the predetermined average wire diameter: before depositing the solid material, performing an etching step in a diluted acid solution to thereby increase the average channel width of the plurality of first channels and the plurality of second channels to an increased average channel width substantially equal to the predetermined average wire diameter.

3. The method according claim 1 , further comprising, if the average channel width is larger than the predetermined average wire diameter: after removing the template, performing a chemical etching step or an electropolishing step to thereby reduce an average diameter of the plurality of first wires and the plurality of second wires to the predetermined average wire diameter.

4. The method according to claim 1 , wherein the porous solid material has any of:
a predetermined volumetric surface area ranging between 2 m 2 /cm 3 and 90 m 2 /cm 3 , a predetermined porosity ranging between 3% and 90% and an electrical conductivity higher than 100 S/cm; or
a predetermined volumetric surface area ranging between 3 m 2 /cm 3 and 72 m 2 /cm 3 , a predetermined porosity ranging between 80% and 95% and an electrical conductivity higher than 100 S/cm; or
a predetermined volumetric surface area ranging between 3 m 2 /cm 3 and 85 m 2 /cm 3 , a predetermined porosity ranging between 65% and 90% and an electrical conductivity higher than 2000 S/cm.

5. The method according to claim 1 , wherein the porous solid material has an electrical conductivity higher than 5000 S/cm.

6. The method according to claim 1 , wherein the plurality of interconnected wires comprises a metal, a metal alloy or a semiconductor material.

7. The method according to claim 1 , wherein the plurality of interconnected wires comprises Ni, Cu, Au or Pt.

8. The method according to claim 1 , wherein the porous solid material comprises a plurality of pores having a pore size ranging between 2 nm and 450 nm, wherein the porous solid material has a pore size distribution with a standard deviation a that is smaller than 30% of an average pore size of the porous solid material.

9. The method according to claim 1 , wherein the predetermined average wire diameter ranges between 20 nm and 500 nm and wherein the predetermined average interwire distance ranges between 40 nm and 500 nm.

10. The method according to claim 1 , wherein a ratio between the predetermined average interwire distance and the predetermined average wire diameter ranges between 1.1 and 10.

11. The method according to claim 1 , wherein a ratio between the predetermined average interwire distance and the predetermined average wire diameter ranges between 1.2 and 3.

12. The method according to claim 1 , wherein a ratio between the predetermined average interwire distance and the predetermined average wire diameter ranges between 1.4 and 2.

Assignees

• Imec Vzw
• Univ Leuven Kath

Inventors

• Zankowski Stanislaw Piotr
• Vereecken Philippe M

Classifications

• C25D9/06

  by anodic processes · CPC title

• C25D11/12

  Anodising more than once, e.g. in different baths · CPC title

• H01M4/80

  Porous plates, e.g. sintered carriers · CPC title

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• H01M4/72

  Grids · CPC title