Mask, method of providing the same, and method of providing display panel using mask

Patent metadata

Field	Value
Publication number	US-11618941-B2
Application number	US-202117324029-A
Country	US
Kind code	B2
Filing date	May 18, 2021
Priority date	Aug 31, 2020
Publication date	Apr 4, 2023
Grant date	Apr 4, 2023

Abstract

A mask assembly includes a mask frame in which a first opening is defined, the mask frame including a front surface through which the first opening extends, and a deposition mask which is attached to the front surface of the mask frame and through which a plurality of second openings is defined. The mask frame includes an in which the front surface extends along a direction of gravity, the deposition mask includes an initial mask which is attached to the front surface of the mask frame in the thereof and through which the plurality of second openings is defined, and the of the mask frame having the front surface which extends along the direction of gravity disposes the first opening of the mask frame corresponding to all of the plurality of second openings of the initial mask along the direction of gravity.

First claim

What is claimed is:

1. A method for manufacturing a mask assembly, the method comprising:
providing a mask frame in which a first opening is defined extended through a front surface of the mask frame, the mask frame including an attachment orientation in which the front surface extends along a direction of gravity;
providing an initial deposition mask in which a plurality of second openings is defined;
providing an initial mask assembly including the mask frame in the attachment orientation thereof and having the initial deposition mask attached to the front surface of the mask frame which extends along the direction of gravity; and
providing a portion of the initial deposition mask separated from a remainder of the initial deposition mask of the initial mask assembly, to provide a deposition mask of the mask assembly as the remainder of the initial deposition mask,
wherein the initial mask assembly including the mask frame in the attachment orientation thereof includes the first opening of the mask frame corresponding to each of the plurality of second openings of the initial deposition mask along the direction of gravity.

2. The method of claim 1 , wherein the providing of the initial mask assembly includes providing the initial deposition mask attached to a holding tool which maintains the initial deposition mask parallel to the front surface of the mask frame which extends along the direction of gravity.

3. The method of claim 1 , wherein the providing of the initial mask assembly includes providing the initial deposition mask attached to a plurality of holding tools at opposing sides of the first opening of the mask frame which maintain the initial deposition mask parallel to the front surface of the mask frame which extends along the direction of gravity.

4. The method of claim 1 , wherein the providing the portion of the initial deposition mask separated from the remainder of the initial deposition mask includes providing separation of the portion of the initial deposition mask using a pulse laser.

5. The method of claim 4 , wherein
the providing of the initial mask assembly includes providing the initial deposition mask attached to a holding tool which maintains the initial deposition mask parallel to the front surface of the mask frame which extends along the direction of gravity,
the deposition mask of the mask assembly includes an outer edge,
the initial deposition mask includes a separation line corresponding to the outer edge of the deposition mask and at which the pulse laser is applied to the initial deposition mask, and
the providing of the initial mask assembly includes providing the separation line of the initial deposition mask between the plurality of second openings of the initial deposition mask and the holding tool along the direction of gravity.

6. The method of claim 5 , wherein the providing of the initial mask assembly further includes providing:
an attachment area at which the initial deposition mask is attached to the mask frame, and
the separation line between the attachment area and the holding tool along the direction of gravity.

7. The method of claim 1 , the providing of the initial mask assembly includes providing:
a middle frame between the mask frame and the initial deposition mask and in which a third opening is defined, and
the first opening of the mask frame corresponding to the third opening of the middle frame.

8. The method of claim 1 , wherein the providing of the initial mask assembly includes providing:
the initial deposition mask attached to a holding tool which maintains the initial deposition mask parallel to the front surface of the mask frame which extends along the direction of gravity, and
the holding tool attached to the initial deposition mask corresponding to the portion of the initial deposition mask which is separated from the remainder of the initial deposition mask.

Assignees

• Samsung Display Co Ltd

Inventors

• Moon Youngmin
• Moon Minho
• Song Seungyong
• Im Sungsoon

Classifications

• C23C14/24

  Vacuum evaporation · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• C23C14/12

  Organic material · CPC title

• B05C21/005

  Masking devices (stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20) · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title