Magnetic property measuring system, a method for measuring magnetic properties, and a method for manufacturing a magnetic memory device using the same

Patent metadata

Field	Value
Publication number	US-11600537-B2
Application number	US-202017116462-A
Country	US
Kind code	B2
Filing date	Dec 9, 2020
Priority date	Oct 22, 2018
Publication date	Mar 7, 2023
Grant date	Mar 7, 2023

Abstract

A magnetic property measuring system includes a stage configured to hold a sample and a magnetic structure disposed over the stage. The stage includes a body part, a magnetic part adjacent the body part, and a plurality of holes defined in the body part. The magnetic part of the stage and the magnetic structure are configured to apply a magnetic field, which is perpendicular to one surface of the sample, to the sample. The stage is configured to move horizontally in an x-direction and a y-direction which are parallel to the one surface of the sample.

First claim

What is claimed is:

1. A system comprising:
a stage configured to hold a sample, and including a body, a magnetic portion contacting the body and a plurality of holes disposed in at least one of the body and the magnetic portion; and
a magnetic structure disposed over the stage,
wherein the magnetic portion of the stage and the magnetic structure are configured to apply a magnetic field to the sample, and
the stage is configured to move in a first direction and in a second direction.

2. The system of claim 1 , wherein each of the first direction and the second direction is substantially parallel to a top surface of the sample.

3. The system of claim 1 , wherein the first direction is substantially perpendicular to the second direction.

4. The system of claim 1 , wherein the magnetic field is configured to be applied substantially perpendicularly to a top surface of the sample.

5. The system of claim 1 , further comprising:
a chamber configured to receive the sample;
a support member configured to support the stage;
a light source configured to emit incident light; and
a detector configured to receive reflected light that is reflected from the sample.

6. The system of claim 5 , further comprising:
a polarizer configured to polarize the incident light that is emitted from the light source;
an optical member configured to control a light path of the incident light; and
an analyzer configured to polarize the reflected light.

7. The system of claim 1 , wherein the magnetic portion of the stage is disposed on the body of the stage.

8. The system of claim 1 , wherein each of the plurality of holes is connected to a vacuum line disposed in the body of the stage, and
the stage is configured to fix the sample on the stage by drawing air through the plurality of holes.

9. The system of claim 1 , wherein the sample is placed on a top surface of the magnetic portion of the stage.

10. The system of claim 1 , wherein the sample is placed on a top surface of the body of the stage.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Noh Eunsun

Classifications

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P74/207 Primary

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• G01N27/72

  by investigating magnetic variables · CPC title

• G01R33/14

  Measuring or plotting hysteresis curves {(G01R33/1207 takes precedence)} · CPC title