Magnetic property measuring system, a method for measuring magnetic properties, and a method for manufacturing a magnetic memory device using the same

Patent metadata

Field	Value
Publication number	US-10892196-B2
Application number	US-201916411680-A
Country	US
Kind code	B2
Filing date	May 14, 2019
Priority date	Oct 22, 2018
Publication date	Jan 12, 2021
Grant date	Jan 12, 2021

Abstract

A magnetic property measuring system includes a stage configured to hold a sample and a magnetic structure disposed over the stage. The stage includes a body part, a magnetic part adjacent the body part, and a plurality of holes defined in the body part. The magnetic part of the stage and the magnetic structure are configured to apply a magnetic field, which is perpendicular to one surface of the sample, to the sample. The stage is configured to move horizontally in an x-direction and a y-direction which are parallel to the one surface of the sample.

First claim

What is claimed is:

1. A magnetic property measuring system comprising:
a stage configured to hold a sample; and
a magnetic structure disposed over the stage,
wherein the stage comprises:
a body part;
a magnetic part adjacent the body part; and
a plurality of holes defined in the body part,
wherein the magnetic part of the stage and the magnetic structure are configured to apply a magnetic field, which is perpendicular to one surface of the sample, to the sample, and
wherein the stage is configured to move horizontally in an x-direction and a y-direction which are parallel to the one surface of the sample.

2. The magnetic property measuring system of claim 1 , wherein each of the plurality of holes is connected to a vacuum line disposed in the body part, and
wherein the stage is configured to fix the sample on the stage by drawing air through the plurality of holes.

3. The magnetic property measuring system of claim 2 , further comprising:
a vacuum pump connected to the vacuum line.

4. The magnetic property measuring system of claim 2 , wherein the magnetic part is disposed on the body part, and
wherein the plurality of holes penetrate the magnetic part.

5. The magnetic property measuring system of claim 4 , wherein the magnetic part is a coating layer coated on a top surface of the body part.

6. The magnetic property measuring system of claim 4 , wherein the stage is configured such that the sample is placed on a top surface of the magnetic part.

7. The magnetic property measuring system of claim 2 , wherein the magnetic part is disposed in the body part, and
wherein the plurality of holes penetrate the magnetic part.

8. The magnetic property measuring system of claim 7 , wherein the stage is configured such that the sample is placed on a top surface of the body part.

9. The magnetic property measuring system of claim 1 , wherein the magnetic structure comprises: a pole piece; and a coil surrounding an outer circumferential surface of the pole piece.

10. The magnetic property measuring system of claim 1 , further comprising:
a light source configured to irradiate incident light to the one surface of the sample; and
a detector configured to detect polarization of light reflected from the sample.

11. The magnetic property measuring system of claim 10 , further comprising:
a polarizer and an analyzer,
wherein the incident light is irradiated to the sample through the polarizer, and
wherein the reflected light is received at the detector through the analyzer.

12. The magnetic property measuring system of claim 10 , further comprising:
a controller,
wherein the controller generates a magnetic hysteresis curve based on data obtained from the detector.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Noh Eunsun

Classifications

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P74/207 Primary

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• H10P74/203

  Structural properties, e.g. testing or measuring thicknesses, line widths, warpage, bond strengths or physical defects · CPC title

• G11C2211/5615

  Multilevel magnetic memory cell using non-magnetic non-conducting interlayer, e.g. MTJ · CPC title

• G01R33/14

  Measuring or plotting hysteresis curves {(G01R33/1207 takes precedence)} · CPC title