Testing system including active thermal interposer device

Patent metadata

Field	Value
Publication number	US-11567119-B2
Application number	US-202117531649-A
Country	US
Kind code	B2
Filing date	Nov 19, 2021
Priority date	Dec 4, 2020
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

A stand-alone active thermal interposer device for use in testing a system-in-package device under test (DUT), the active thermal interposer device includes a body layer having a first surface and a second surface, wherein the first surface is operable to be disposed adjacent to a cold plate, and a plurality of heating zones defined across a second surface of the body layer, the plurality of heating zones operable to be controlled by a thermal controller to selectively heat and maintain respective temperatures thereof, the plurality of heating zones operable to heat a plurality of areas of the DUT when the second surface of the body layer is disposed adjacent to an interface surface of the DUT during testing of the DUT.

First claim

We claim:

1. A testing device for testing a system-in-package device under test (DUT), said device comprising:
a stand-alone active thermal interposer device for use in testing said DUT and for coupling with a thermal controller, said active thermal interposer device comprising:
a first surface and a second surface, wherein said first surface is operable to be disposed adjacent to a cold plate; and
a plurality of heating zones defined across the second surface, said plurality of heating zones operable to be controlled by a thermal controller to selectively heat and maintain respective temperatures thereof, said plurality of heating zones operable to heat a plurality of areas of the DUT when said second surface is disposed adjacent to an interface surface of said DUT during testing of said DUT; and
a thermal head for coupling to the thermal controller and operable to interface with said active thermal interposer device during testing of said DUT, said thermal head comprising:
said cold plate; and
an insulation cover for insulating said cold plate, wherein said insulation cover comprises an injection port for reducing condensation from said cold plate.

2. The testing device of claim 1 further comprising a system of liquid cooling to remove heat from said cold plate.

3. The testing device of claim 1 further comprising a system of gaseous cooling to remove heat from said cold plate.

4. The testing device of claim 1 further comprising a phase-change cooling system to remove heat from said cold plate.

5. A testing device according to claim 1 further comprising a thermal interface material layer disposed between said active thermal interposer device and said cold plate for coupling thermal energy from said active thermal interposer device to said cold plate.

6. A testing device according to claim 5 wherein said thermal interface material layer comprises a plurality of cutouts configured to prevent a pick and place handler from adhering to said thermal interface material layer.

7. A testing device according to claim 1 wherein said plurality of heating zones comprise a resistive heater.

8. A testing device according to claim 1 wherein said plurality of heating zones comprise a Peltier device.

9. A testing arrangement for testing a system-in-package device under test (DUT), said arrangement comprising:
a socket device for containing said DUT and for interfacing with a load board;
stand-alone active thermal interposer device for use in testing said DUT, said active thermal interposer device comprising:
a first surface and a second surface, wherein said first surface is operable to be disposed adjacent to a cold plate; and
a plurality of heating zones defined across the second surface, said plurality of heating zones operable to be controlled to selectively heat and maintain respective temperatures thereof, said plurality of heating zones operable to heat a plurality of areas of the DUT when said active thermal interposer device is inserted into said socket and said second surface is disposed adjacent to an interface surface of said DUT;
a thermal head operable to interface with said active thermal interposer device during testing of said DUT, said thermal head comprising said cold plate; and
a thermal controller for coupling with said thermal interposer to control said plurality of heating zones and to control said cold plate, said thermal controller comprising firmware operable to perform thermal regulation during testing of said DUT, said firmware operable to:
obtain first temperatures which are of said cold plate from a temperature sensor of said cold plate;
obtain second temperatures of the bottom surface of the active thermal interposer device for each heating zone thereof using respective resistance temperature detectors;
obtain third temperatures of each area of the DUT provided the DUT is active and circuitry on the load board is operable to collect a junction temperature for each area of the DUT;
based on the first temperatures, perform an outer slower loop to regulate a fan speed (for air control) or a fluid regulation valve (for liquid/refrigerant control) of the cold plate; and
based on the second and third temperatures, perform an inner faster loop to regulate heater control/Peltier control of the plurality of heating zones of the active thermal interposer device.

10. The testing arrangement of claim 9 wherein said temperature sensor of said cold plate comprises a thermocouple.

11. The testing arrangement of claim 9 wherein said temperature sensor of said cold plate comprises a resistance temperature detector.

12. A testing arrangement for testing an electronic device under test (DUT), said arrangement comprising:
a socket device for securing said DUT and for interfacing with a load board;
a stand-alone active thermal interposer device for use in testing said DUT, said active thermal interposer device comprising:
a first surface and a second surface, wherein said first surface is operable to be disposed adjacent to a cold plate; and
a plurality of heating zones defined across the second surface, and operable to be controlled to selectively heat and maintain respective temperatures thereof, said plurality of heating zones operable to heat a plurality of areas of the DUT when said active thermal interposer device is inserted into said socket and said second surface is disposed adjacent to an interface surface of said DUT;
a thermal head operable to interface with said active thermal interposer device during testing of said DUT, said thermal head comprising said cold plate; and
a thermal controller for coupling with said thermal interposer to control said plurality of heating zones and to control said cold plate, said thermal controller operable to perform thermal regulation during testing of said DUT, said firmware operable to:
obtain first temperatures which are of said cold plate from a temperature sensor of said cold plate;
obtain second temperatures of the bottom surface of the active thermal interposer device for each heating zone thereof;
obtain third temperatures of each area of the DUT;
based on the first temperatures, perform a first loop to regulate one of: a fan speed; and a fluid regulation valve of the cold plate; and
based on the second and third temperatures, perform a second loop to regulate one of: heater control; and Peltier control of the plurality of heating zones of the active thermal interposer device.

13. The testing arrangement of claim 12 wherein said temperature sensor of said cold plate comprises a thermocouple.

14. The testing arrangement of claim 12 wherein said temperature sensor of said cold plate comprises a resistance temperature detector.

Assignees

• Advantest Test Solutions Inc

Inventors

• Kabbani Samer
• Ferrari Paul
• Hiroki Ikeda
• Toshiyuki Kiyokawa
• Cruzan Gregory
• Ranganathan Karthik
• Berk Todd
• Williams Ian
• Ghazvini Mohammad
• Jones Thomas

Classifications

• G01R1/0458

  related to environmental aspects, e.g. temperature · CPC title

• G01R31/2874

  related to temperature · CPC title

• G01R31/2867

  Handlers or transport devices, e.g. loaders, carriers, trays · CPC title

• G01R31/2875 Primary

  related to heating · CPC title

• G01R31/2863

  Contacting devices, e.g. sockets, burn-in boards or mounting fixtures (in general G01R1/04) · CPC title