Deformation detection sensor, electronic device, and method for manufacturing detecting deformation detection sensor

Patent metadata

Field	Value
Publication number	US-11566953-B2
Application number	US-201916245715-A
Country	US
Kind code	B2
Filing date	Jan 11, 2019
Priority date	Aug 3, 2016
Publication date	Jan 31, 2023
Grant date	Jan 31, 2023

Abstract

A deformation detection sensor that includes a conductive member, a plurality of thermoplastic resin layers, and a piezoelectric film. At least one of the thermoplastic resin layers has a main surface, and the conductive member is formed on the main surface thereof. The plurality of thermoplastic resin layers are laminated and integrally formed by hot pressing into a laminated body. A transmission line is formed form a first portion of the conductive member and the thermoplastic resin in the laminated body. The piezoelectric film is attached to the laminated body to form a piezoelectric element made of a second portion of the conductive member, the thermoplastic resin in the laminated body, and the piezoelectric film.

First claim

The invention claimed is:

1. A deformation detection sensor comprising:
a thermoplastic resin body which has a main surface;
a conductive member on the main surface of the resin body; and
a piezoelectric film attached to the thermoplastic resin body,
wherein a first portion of the conductive member and the thermoplastic resin body are arranged to form a transmission line, and
a second portion of the conductive member, the thermoplastic resin body, and the piezoelectric film are arranged to form a piezoelectric element.

2. The deformation detection sensor according to claim 1 , wherein
the piezoelectric film and the transmission line are disposed so as to overlap each other in a planar view, and
a ground conductor is positioned between the piezoelectric film and the transmission line.

3. The deformation detection sensor according to claim 1 , wherein the piezoelectric element and the transmission line are disposed so as to not overlap each other in a planar view.

4. The deformation detection sensor according to claim 3 , wherein the thermoplastic resin body between the piezoelectric element and the transmission line is bent.

5. The deformation detection sensor according to claim 1 , wherein the transmission line and a signal line of the piezoelectric element are made of a single conductive member.

6. The deformation detection sensor according to claim 1 , wherein
the first portion of the conductive member includes a first signal line and a second signal line, and
a part of the thermoplastic resin body is removed between the first signal line and the second signal line.

7. The deformation detection sensor according to claim 6 , wherein the first portion of the conductive member and the second portion of the conductive member are separate from each other.

8. The deformation detection sensor according to claim 1 , wherein the first portion of the conductive member and the second portion of the conductive member are separate from each other.

9. The deformation detection sensor according to claim 1 , wherein thermoplastic resin body includes a resin base material selected from a liquid crystal polymer resin, polyetheretherketone, polyetherimide, polyphenylene sulfide, or polyimide.

10. An electronic device comprising:
a casing; and
the deformation detection sensor according to claim 1 within the casing; and
wherein a main surface of the piezoelectric film is arranged parallel to a side surface of the casing.

Assignees

• Murata Manufacturing Co

Inventors

• Kihara Takashi
• Endo Jun
• Ando Masamichi

Classifications

• G01L1/162 Primary

  using piezoelectric resonators · CPC title

• H01L41/1132

  Electricity · mapped topic

• G01L5/22

  for measuring the force applied to control members, e.g. control members of vehicles, triggers · CPC title

• G01L1/16 Primary

  using properties of piezoelectric devices · CPC title

• G01L9/08

  by making use of piezoelectric devices {, i.e. electric circuits therefor} · CPC title