Wafer jig, robot system, communication method, and robot teaching method

Patent metadata

Field	Value
Publication number	US-11554498-B2
Application number	US-202017067423-A
Country	US
Kind code	B2
Filing date	Oct 9, 2020
Priority date	Oct 9, 2020
Publication date	Jan 17, 2023
Grant date	Jan 17, 2023

Abstract

A wafer jig according to an embodiment may be used for a robot having a hand including a light emitting part and a light receiving part. The light receiving part detects detection light emitted from the light emitting part. The wafer jig includes a light source for emitting the notification light toward the light receiving part. The wafer jig outputs information to a hand side by emitting the notification light from the light source to the light receiving part.

First claim

The invention claimed is:

1. A wafer jig used for a robot having a hand including a light emitting part and a light receiving part for detecting detection light emitted from the light emitting part, the wafer jig comprising:
a light source emitting notification light toward the light receiving part, wherein
the wafer jig outputs information by emitting the notification light from the light source to the light receiving part.

2. The wafer jig according to claim 1 , further comprising:
a blocking part, wherein
the blocking part blocks a light path between the light emitting part and the light receiving part when the wafer jig is held by the hand.

3. The wafer jig according to claim 1 , further comprising:
an object detection sensor detecting an object, wherein
the light source outputs whether the object detection sensor detects the object as the information.

4. The wafer jig according to claim 3 , wherein
the object detection sensor is provided at a center of the wafer jig.

5. The wafer jig according to claim 3 , wherein
in a state where the wafer jig is held by the hand, the object detection sensor is located at a center of the hand.

6. The wafer jig according to claim 1 , wherein
the information is represented by a frequency of repeating of lighting-on and lighting-off of the notification light emitted by the light source or a frequency of repeating of a change of light intensity of the notification light.

7. The wafer jig according to claim 6 , further comprising:
a plurality of sensors, wherein
the frequency is changed according to a combination of detection results of each of the sensors.

8. The wafer jig according to claim 7 , wherein
the plurality of sensors includes two light sensors,
when viewed in a thickness direction of the wafer jig, a light axis of one light sensor intersects a light axis of the other light sensor,
in a state where the wafer jig is held by the hand, an intersection of the light axes is located at the center of the hand when viewed in the thickness direction of the wafer jig.

9. The wafer jig according to claim 1 , further comprising:
a jig light receiving part capable of detecting light emitted from the light emitting part of the hand.

10. The wafer jig according to claim 9 , wherein
the jig light receiving part functions as a blocking part blocking a light path between the light emitting part and the light receiving part when the wafer jig is held by the hand.

11. A robot system comprising:
the wafer jig according to claim 1 ;
a robot capable of holding the wafer jig by the hand; and
a control part controlling the robot by giving commands to the robot, wherein
the control part receives information from the wafer jig side via the light receiving part.

12. A wafer jig used for a robot having a hand including a light emitting part and a light receiving part for detecting detection light emitted from the light emitting part, the wafer jig comprising:
a jig light receiving part capable of detecting light emitted from the light emitting part of the hand, wherein
the jig light receiving part is capable of receiving a command from the hand of the robot by the light emitted from the light emitting part.

13. A wafer jig used for a robot having a hand including a light emitting part and a light receiving part for detecting detection light emitted from the light emitting part, the wafer jig comprising:
a switching part capable of switching between a state in which the light receiving part receives the detection light from the light emitting part and a state in which the light receiving part does not receive the detection light, wherein
the wafer jig outputs information to the light receiving part by a switching of the switching part.

14. A communication method for transmitting information from a wafer jig to a robot, the robot having a hand including a light emitting part and a light receiving part detecting detection light emitted from the light emitting part, the wafer jig being capable of being held by the hand, the communication method comprising:
a first step in which a state of keeping the wafer jig held by the hand is provided; and
a second step in which a light source included in the wafer jig emits notification light corresponding to the information toward the light receiving part.

15. A robot teaching method by using the communication method according to claim 14 , wherein
a command position of the robot is corrected based on the information obtained from the wafer jig.

16. The wafer jig according to claim 12 , wherein the jig light receiving part is comprised in a blocking part that blocks a light path between the light emitting part and the light receiving part when the wafer jig is held by the hand.

17. The wafer jig according to claim 12 , further comprising:
an object detection sensor detecting an object, wherein
the object detection sensor comprises a light emitting part and a light receiving part that detect an object, and
the command comprises a start/stop detection command to the object detection sensor.

18. The wafer jig according to claim 1 , further comprising:
a jig light receiving part capable of receiving a command from the hand of the robot by the light emitted from the light emitting part of the hand.

19. The wafer jig according to claim 1 , wherein the light receiving part and the light emitting part are comprised in a sensor for detecting the presence or absence of a wafer supported in the robot hand.

20. The wafer jig according to claim 19 , wherein the sensor comprises a mapping sensor.

21. The wafer jig according to claim 12 , wherein
the light receiving part and the light emitting part are comprised in a sensor for detecting the presence or absence of a wafer supported in the robot hand, and
the sensor comprises a mapping sensor.

Assignees

• Kawasaki Heavy Ind Ltd
• Kawasaki Robotics Usa Inc

Inventors

• Yoshida Masaya
• Nakahara Hajime

Classifications

• B25J13/087

  for sensing other physical parameters, e.g. electrical or chemical properties · CPC title

• B25J19/021

  Optical sensing devices · CPC title

• B25J15/0014

  having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title

• B25J9/1612

  characterised by the hand, wrist, grip control · CPC title

• B25J11/0095 Primary

  Manipulators transporting wafers · CPC title