Substrate with embedded active thermoelectric cooler

Patent metadata

Field	Value
Publication number	US-11551995-B2
Application number	US-201816160442-A
Country	US
Kind code	B2
Filing date	Oct 15, 2018
Priority date	Oct 26, 2017
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

The present disclosure relates to a substrate that includes a substrate body and a thermoelectric cooler embedded in the substrate body. The thermoelectric cooler includes a top-side plate with an element-contact pad and a bottom-side plate. The element-contact pad is on a top surface of the top-side plate, which faces a same direction as a top surface of the substrate body and is exposed to the external space of the substrate body. The bottom-side plate is below the top-side plate and close to a bottom surface of the top-side plate. Herein, the element-contact pad is configured to accommodate attachment of a heat-generating electrical element. The top-side plate is configured to change temperature of the heat-generating electrical element, and the bottom-side plate is configured to transfer heat to or absorb heat from the bottom surface of the substrate body.

First claim

What is claimed is:

1. An apparatus comprising:
a substrate body having a top surface and a bottom surface that is opposite the top surface of the substrate body, wherein the substrate body is made of a liquid crystal polymer material;
a heat-generating electrical element; and
a thermoelectric cooler (TEC) completely embedded in the substrate body, wherein:
the substrate body surrounds the TEC and has zero contact with the TEC;
the TEC comprises a top-side plate and a bottom-side plate;
the top-side plate has a top surface and a bottom surface that is opposite the top surface of the top-side plate, and the bottom-side plate has a top surface and a bottom surface that is opposite the top surface of the bottom-side plate, wherein the top surface of the top-side plate faces a same direction as the top surface of the substrate body, and the bottom surface of the top-side plate faces the top surface of the bottom-side plate; and
the top-side plate includes an element-contact pad, a first-contact pad, a second-contact pad, a first via, and a second via, wherein:
the element-contact pad, the first-contact pad, and a second-contact pad are on the top surface of the top-side plate, separate from each other, and exposed to an external space of the substrate body;
the first via extends from the top surface of the top-side plate to the bottom surface of the top-side plate, and is electrically coupled to the first-contact pad that is configured to receive a first voltage, while the second via extends from the top surface of the top-side plate to the bottom surface of the top-side plate, and is electrically coupled to the second-contact pad that is configured to receive a second voltage, wherein the first voltage and the second voltage are different;
the element-contact pad is configured to accommodate attachment of the heat-generating electrical element;
the top-side plate is in thermal contact with the heat-generating electrical element, and the bottom-side plate is in thermal contact with the bottom surface of the substrate body;
the heat-generating electrical element is horizontally confined within the top-side plate;
the top surface of the top-side plate is lower than the top surface of the substrate body to provide a recess, into which the heat-generating electrical element is assembled; and
the top-side plate is configured to change temperature of the heat-generating electrical element, and the bottom-side plate is configured to transfer heat to or absorb heat from the bottom surface of the substrate body.

2. The apparatus of claim 1 wherein when the first voltage is a positive voltage and the second voltage is a non-positive voltage, the top-side plate is configured to absorb heat from the heat-generating electrical element and the bottom-side plate is configured to transfer the heat to the bottom surface of the substrate body.

3. The apparatus of claim 1 wherein when the first voltage is a non-positive voltage and the second voltage is a positive voltage, the top-side plate is configured to provide heat to the heat-generating electrical element and the bottom-side plate is configured to absorb the heat from the bottom surface of the substrate body.

4. The apparatus of claim 1 wherein the top surface of the top-side plate is essentially flush with the top surface of the substrate body.

5. The apparatus of claim 1 wherein the bottom surface of the bottom-side plate is essentially flush with the bottom surface of the substrate body.

6. The apparatus of claim 1 wherein:
the substrate body includes at least one stepped pocket structure formed in an internal portion of the substrate body, within which the TEC is received; and
the top-side plate has a longer length than the bottom-side plate.

7. The apparatus of claim 1 wherein:
the substrate body includes at least one reverse stepped pocket structure formed in an internal portion of the substrate body, within which the TEC is received; and
the top-side plate has a shorter length than the bottom-side plate.

8. The apparatus of claim 1 wherein the top-side plate has an essentially same length as the bottom-side plate.

9. The apparatus of claim 1 wherein the heat-generating electrical element is at least one of a die, an acoustic filter, a mechanical filter, a resonator, a passive die, and a passive device.

10. The apparatus of claim 1 wherein the first-contact pad and the second-contact pad are not electrically connected to the heat-generating electrical element.

11. The apparatus of claim 1 wherein the heat-generating electrical element is confined by the top-side plate of the TEC, such that the heat-generating electrical element does not extend horizontally over the substrate body.

12. The apparatus of claim 1 wherein:
the top-side plate comprises a plurality of first conductors, which are formed on the bottom surface of the top-side plate and separate from each other;
the bottom-side plate comprises a plurality of second conductors, which are formed on the top surface of the bottom-side plate and separate from each other; and
the TEC further comprises a plurality of semiconductor pellets extending from the bottom surface of the top-side plate to the top surface of the bottom-side plate and configured to transmit the heat from the top-side plate to the bottom-side plate, wherein the plurality of semiconductor pellets are electrically connected to each other in series via the plurality of first conductors and the plurality of second conductors.

13. The apparatus of claim 12 wherein:
the first-contact pad is electrically connected to a corresponding first conductor by the first via; and
the second-contact pad is electrically connected to another corresponding first conductor by the second via.

14. The apparatus of claim 12 wherein the bottom-side plate further comprises a bottom contact layer formed on the bottom surface of the bottom-side plate.

15. The apparatus of claim 14 further comprises a ground plane formed on the bottom surface of the substrate body, wherein the ground plane is coupled to the bottom contact layer on the bottom surface of the bottom-side plate.

16. The apparatus of claim 12 wherein the plurality of semiconductor pellets comprises a plurality of P-type pellets and a plurality of N-type pellets, wherein the plurality of P-type pellets and the plurality of N-type pellets are formed alternately.

17. The apparatus of claim 12 wherein the TEC is embedded in the substrate body via a peripheral sealing material, wherein the peripheral sealing material surrounds the TEC and fills gaps between the periphery of the TEC and the substrate body, such that the peripheral sealing material is configured to hold the TEC in place within the substrate body and ensure no moisture or gas is trapped within the TEC.

18. The apparatus of claim 17 further comprising an underfill material that fills gaps in between the plurality of semiconductor pellets.

19. The apparatus of claim 18 wherein the peripheral sealing material and the underfill material are formed from a same material.

20. The apparatus of claim 1 wherein the bottom surface of the bottom-side plate is higher than the bottom surface of the substrate body.

21. The apparatus of claim 20 further comprising at least one thermally conductive structure that extends between the bottom surface of the bottom-side plate and the bottom surface of the substrate body, wherein the at least one thermally conductive structure is thermally coupled to the bottom-side plat

Assignees

• Qorvo Us Inc

Inventors

• Woods Mark C
• Lear Kelly M
• Nair Deepukumar M
• Railkar Tarak A
• Nelson Bradford

Classifications

• H10W70/635

  Through-vias · CPC title

• H10W70/68

  Shapes or dispositions thereof · CPC title

• H10W40/28 Primary

  comprising Peltier coolers · CPC title

• H01L23/13

  Electricity · mapped topic

• H01L35/08

  Electricity · mapped topic