Dense composite material, method for producing the same, joined body, and member for semiconductor manufacturing device

Patent metadata

Field	Value
Publication number	US-11548829-B2
Application number	US-202117153001-A
Country	US
Kind code	B2
Filing date	Jan 20, 2021
Priority date	Jan 29, 2020
Publication date	Jan 10, 2023
Grant date	Jan 10, 2023

Abstract

According to the present invention, a dense composite material includes titanium silicide in an amount of 43 to 63 mass %; silicon carbide in an amount less than the mass percentage of the titanium silicide; and titanium carbide in an amount less than the mass percentage of the titanium silicide. In the dense composite material, a maximum value of interparticle distances of the silicon carbide is 40 μm or less, a standard deviation of the interparticle distances is 10 or less, and an open porosity of the dense composite material is 1% or less.

First claim

What is claimed is:

1. A dense composite material comprising:
titanium silicide in an amount of 43 to 63 mass %;
silicon carbide in an amount less than the mass percentage of the titanium silicide; and
titanium carbide in an amount less than the mass percentage of the titanium silicide, wherein
a maximum value of interparticle distances of the silicon carbide is 40 μm or less, a standard deviation of the interparticle distances is 10 or less, and an open porosity of the dense composite material is 1% or less.

2. The dense composite material according to claim 1 , wherein the silicon carbide is present in an amount of 29 to 46 mass %, and the titanium carbide is present in an amount of 5 to 15 mass %.

3. The dense composite material according to claim 1 , wherein an average of the interparticle distances of the silicon carbide is 4 to 10 μm.

4. The dense composite material according to claim 1 , wherein an average coefficient of linear thermal expansion over a range of 40 to 570° C. of the dense composite material is different from an average coefficient of linear thermal expansion over a range of 40 to 570° C. of alumina by an absolute value of 0.5 ppm/K or less.

5. The dense composite material according to claim 1 , wherein the dense composite material has a thermal conductivity of 70 W/mK or greater.

6. The dense composite material according to claim 1 , wherein the dense composite material has a four-point flexural strength of 250 MPa or greater.

7. The dense composite material according to claim 1 , further comprising titanium silicon carbide.

8. A joined body in which a first member and a second member are joined together, the first member comprising the dense composite material according to claim 1 , the second member comprising alumina.

9. The joined body according to claim 8 , wherein the first member and the second member are metallic-bonded to each other.

10. A member for a semiconductor manufacturing device, the member comprising the joined body according to claim 8 .

11. A method for producing a dense composite material according to claim 1 , the method comprising the steps of:
(a) preparing a powder mixture, the powder mixture including silicon carbide in an amount of 24 to 45 mass % and titanium silicide in an amount of 42 to 67 mass %, the silicon carbide having an average particle diameter of 10 to 25 μm, the titanium silicide having an average particle diameter of less than 10 μm, the powder mixture further including titanium metal having an average particle diameter of less than 20 μm or titanium carbide having an average particle diameter of less than 10 μm; and
(b) sintering the powder mixture in a hot press at a temperature of 1350 to 1430° C. in an inert atmosphere.

12. The method for producing a dense composite material according to claim 11 , wherein, in the step (a), a mass ratio Si/(Si+Ti) for Si and Ti derived from raw materials of the powder mixture excluding the silicon carbide is 0.40 to 0.50.

Assignees

• Ngk Insulators Ltd

Inventors

• NAGAI Asumi
• Nishimura Noboru
• Yamaguchi Hirofumi

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• C04B2237/36

  Non-oxidic · CPC title

• C04B2235/9607

  Thermal properties, e.g. thermal expansion coefficient · CPC title

• C04B37/006

  consisting of metals or metal salts · CPC title

• C04B37/00

  Joining burned ceramic articles with other burned ceramic articles or other articles by heating {(soldering and welding materials B23K35/24; laminated products B32B, E04C)} · CPC title