Substrate holder and plating apparatus

Patent metadata

Field	Value
Publication number	US-11535949-B2
Application number	US-201916451387-A
Country	US
Kind code	B2
Filing date	Jun 25, 2019
Priority date	Jun 25, 2018
Publication date	Dec 27, 2022
Grant date	Dec 27, 2022

Abstract

There is provided the substrate holder for holding a substrate comprising a first holding member, a second holding member, a sealing member, a pin, a ring, and a moving mechanism. The sealing member forms a sealed space inside the substrate holder. The pin is fixed to one of the first holding member and the second holding member. The ring is disposed on another of the first holding member and the second holding member. The ring engages with the pin. The moving mechanism circumferentially moves the ring. The pin and the ring are engaged with one another to fix the first holding member and the second holding member to one another. The pin and the ring are disposed inside the sealed space.

First claim

What is claimed is:

1. A substrate holder for holding a substrate, comprising:
a first holding member;
a second holding member configured such that the substrate is sandwiched between the first holding member and the second holding member;
a sealing member that forms a sealed space inside the substrate holder;
a pin fixed to the second holding member;
a ring disposed on the first holding member, the ring engaging with the pin; and
a moving mechanism that circumferentially moves the ring, wherein
the pin and the ring are engaged with one another to fix the first holding member and the second holding member to one another,
the pin and the ring are disposed inside the sealed space,
the first holding member has an outer contact portion electrically connected to an external power supply,
the ring is electrically connected to the outer contact portion,
the second holding member has contacts configured to supply current to the substrate,
the pin is electrically connected to the contacts,
the contacts are electrically connected to the outer contact portion by the pin,
the current flows to the contacts in contact with the substrate when the pin engages with the ring,
the contacts are not electrically connected to the outer contact portion when the pin is not engaged with the ring,
the moving mechanism includes a plurality of teeth, and the plurality of teeth are formed on an outer peripheral edge portion of the ring along a circumferential direction, and
the substrate holder includes an inner passage from outside the substrate holder to the plurality of teeth.

2. The substrate holder according to claim 1 , wherein
the moving mechanism includes a link mechanism.

3. The substrate holder according to claim 2 , wherein
the link mechanism includes:
a rod member having one end positioned outside the substrate holder and another end positioned inside the substrate holder to be axially movable; and
an intermediate member having one end directly or indirectly coupled to the rod member, the intermediate member having another end directly coupled to the ring.

4. The substrate holder according to claim 3 , comprising:
a rod inner passage into which the rod member is inserted; and
a first packing that seals between a wall surface defining the rod inner passage and an outer peripheral surface of the rod member.

5. The substrate holder according to claim 1 , comprising
a tool including a tooth that engages with the plurality of teeth, wherein
when the tool is inserted into the inner passage, the tooth on the tool engages with the plurality of teeth.

6. The substrate holder according to claim 1 , wherein
the pin includes a first diameter portion, and
the ring has a first part and a second part, the first diameter portion of the pin is passable through the first part, and the second part is engageable with the first diameter portion of the pin.

7. The substrate holder according to claim 6 , wherein
while the first diameter portion of the pin is caused to pass through the first part and the sealing member is brought into pressure contact with the first holding member, the moving mechanism circumferentially moves the ring to engage the first diameter portion with the second part of the ring.

8. The substrate holder according to claim 6 , wherein
the pin includes a second diameter portion and a third diameter portion, the second diameter portion has a diameter smaller than the first diameter portion, and the third diameter portion has a diameter larger than the second diameter portion,
the second diameter portion is positioned between the first diameter portion and the third diameter portion, and
while the third diameter portion of the pin is caused to pass through the first part and the sealing member is separated from the first holding member, the moving mechanism circumferentially moves the ring such that the third diameter portion is engaged with the second part of the ring.

9. The substrate holder according to claim 6 , wherein
the pin includes a second diameter portion and a third diameter portion, the second diameter portion has a diameter smaller than the first diameter portion, and the third diameter portion has a diameter larger than the first diameter portion,
the ring includes a third part engageable with the third diameter portion of the pin,
the first part and the third part are formed adjacent to each other, and
the second part and the third part are formed adjacent to each other.

10. The substrate holder according to claim 9 , wherein
while the first diameter portion and the third diameter portion of the pin are caused to pass through the first part and the sealing member is brought into pressure contact with the first holding member, the moving mechanism circumferentially moves the ring to engage the first diameter portion with the second part of the ring.

11. The substrate holder according to claim 9 , wherein
while the third diameter portion of the pin is caused to pass through the first part and the sealing member is separated from the first holding member, the moving mechanism circumferentially moves the ring such that the third diameter portion is engaged with the third part of the ring.

12. The substrate holder according to claim 1 , wherein
the sealing member includes a first seal portion and a second seal portion, the first seal portion contacts the substrate, and the second seal portion contacts the first holding member, and
the pin is located between the first seal portion and the second seal portion.

13. The substrate holder according to claim 1 , wherein
the first holding member includes:
a fixing plate;
a substrate mounting table on which the substrate is mountable; and
a thickness absorbing mechanism that biases the substrate mounting table from the fixing plate toward the second holding member to absorb a change in thickness of the substrate.

14. The substrate holder according to claim 13 , comprising:
a suction pad that absorbs a back surface of the substrate placed on the substrate mounting table;
a second packing that seals between the fixing plate and the substrate mounting table; and
a vacuum line formed on the fixing plate, the vacuum line communicating with the suction pad via an inside of the second packing.

15. The substrate holder according to claim 1 , wherein
the first holding member includes a base plate electrically connected to the ring.

16. The substrate holder according to claim 15 , wherein the first holding member includes a busbar which electrically connects the outer contact portion and the base plate.

17. The substrate holder according to claim 1 , wherein
the pin directly contacts the contacts.

18. A plating apparatus comprising:
the substrate holder according to claim 1 ; and
a plating bath that houses the substrate held to the substrate holder and an anode.

Assignees

• Ebara Corp

Inventors

• Seki Masaya
• Takayanagi Hideki
• Suzuki Kiyoshi
• Satake Masayuki
• Fujikata Jumpei

Classifications

• C25D17/06 Primary

  Suspending or supporting devices for articles to be coated · CPC title

• C25D17/004

  Sealing devices · CPC title

• C25D17/005

  Contacting devices · CPC title

• C25D7/12 Primary

  Semiconductors · CPC title

• C25D17/08 Primary

  Supporting} racks {, i.e. not for suspending · CPC title