In-situ annealing and etch back steps to improve exchange stiffness in cobalt iron boride based perpendicular magnetic anisotropy free layers

Patent metadata

Field	Value
Publication number	US-11527707-B2
Application number	US-201916686542-A
Country	US
Kind code	B2
Filing date	Nov 18, 2019
Priority date	Oct 14, 2015
Publication date	Dec 13, 2022
Grant date	Dec 13, 2022

Abstract

A method for forming a memory device that includes providing a free layer of an alloy of cobalt (Co), iron (Fe) and boron (B) overlying a reference layer; and forming metal layer comprising a boron (B) sink composition atop the free layer. Boron (B) may be diffused from the free layer to the metal layer comprising the boron sink composition. At least a portion of the metal layer including the boron (B) sink composition is removed. A metal oxide is formed atop the free layer. The free layer may be a crystalline cobalt and iron alloy. An interface between the metal oxide and free layer can provide perpendicular magnetic anisotropy character.

First claim

What is claimed is:

1. A method for forming a memory device comprising:
providing a single free layer of an alloy of at least one of cobalt (Co), iron (Fe) and boron (B) atop a reference layer;
depositing a metal layer comprising a boron (B) sink composition atop the free layer;
annealing to diffuse the boron (B) from the free layer to the metal layer comprising the boron sink composition, wherein the depositing the metal layer and the annealing to diffuse boron from the free layer to the metal layer is conducted in situ, the annealing having a duration ranging from 15 minutes to 30 minutes;
removing the metal layer comprising the boron (B) sink composition, the remaining composition of the single free layer is said cobalt (Co) and said iron (Fe) that is crystalline and from which boron (B) has been removed;
forming an iron containing metal layer of cobalt ferrite (CoFe) in direct contact with an exposed surface of the free layer; and
forming a metal oxide atop the iron containing metal layer, wherein the free layer comprises a crystalline cobalt and iron alloy, the metal oxide comprises zirconium oxide, and an interface between the metal oxide and free layer provides perpendicular magnetic anisotropy character.

2. The method of claim 1 , wherein the free layer comprises CoFeB.

3. The method of claim 2 , wherein the free layer is present atop a metal oxide layer that is present atop the reference layer.

4. The method of claim 1 , wherein the boron sink composition comprises titanium (Ti), tantalum (Ta), zirconium (Zr) or alloys thereof.

5. The method of claim 1 , wherein said forming the metal oxide atop the free layer comprises exposure to oxygen, oxygen plasma or RF sputtering.

6. The method of claim 1 , wherein the removing of the metal layer comprising the boron (B) sink composition comprises etching.

7. The method of claim 1 , wherein the iron containing metal layer is crystalline.

8. The method of claim 1 , wherein following said annealing to diffuse boron (B) from the free layer to the metal layer comprising the boron sink composition, the free layer comprises CoFe.

9. A memory device comprising:
a single crystalline free layer comprised of a cobalt and iron alloy that is substantially free of boron, wherein the single crystalline free layer is overlying a reference layer;
a regrowth metal layer on a surface of the single crystalline free layer, wherein the regrowth metal layer is comprised of cobalt ferrite (CoFe); and
a metal oxide layer zirconium oxide (ZrO) present on the regrowth metal layer to provide an oxide interface on opposing surfaces of the single crystalline free layer in order to generate perpendicular magnetic anisotropy character.

10. The memory device of claim 9 , wherein the single crystalline free layer is CoFe.

11. The memory device of claim 9 , wherein the single crystalline free layer has a thickness ranging from 5 Å to 30 Å.

12. The memory device of claim 9 , wherein the reference layer comprises a material selected from the group consisting of Fe, Ni, Co, Cr, V, Mn, Pd, Pt, B, O and N.

13. The memory device of claim 9 , wherein the metal oxide layer has a thickness ranging from 5 Å to 20 Å.

14. A memory device comprising:
a single crystalline free layer comprised of a cobalt and iron alloy that is substantially free of boron;
a regrowth metal layer on a surface of the single free layer, wherein the regrowth metal layer is comprised of cobalt ferrite (CoFe); and
a metal oxide layer present on the surface of the single crystalline free layer in order to generate perpendicular magnetic anisotropy character in a metal stack for a spin torque transfer magnetic random access memory device, the metal oxide layer having a thickness ranging from 5 Å to 20 Å, and the metal oxide layer comprising zirconium.

15. The memory device of claim 14 , wherein the metal stack includes that the metal oxide layer is a first metal oxide layer in direct contact with the regrowth metal layer on the surface of the single crystalline free layer, and that a second metal oxide layer is in direct contact with a second side of the single crystalline free layer.

16. The memory device of claim 14 , wherein the single crystalline free layer is CoFe.

Assignees

• IBM

Inventors

• Brown Stephen L
• Hu Guohan
• Sun Jonathan Z
• Worledge Daniel C

Classifications

• H01L43/10

  Electricity · mapped topic

• H01L43/12

  Electricity · mapped topic

• H01L27/222

  Electricity · mapped topic

• H01L43/02 Primary

  Electricity · mapped topic

• H01L43/08

  Electricity · mapped topic