Image sensor including conductive connection pattern

Patent metadata

Field	Value
Publication number	US-11502117-B2
Application number	US-202016900072-A
Country	US
Kind code	B2
Filing date	Jun 12, 2020
Priority date	Nov 8, 2019
Publication date	Nov 15, 2022
Grant date	Nov 15, 2022

Abstract

An image sensor includes a substrate having a first surface and a second surface facing each other, a plurality of photoelectric conversion regions disposed in the substrate, an isolation pattern disposed in the substrate between the photoelectric conversion regions, a conductive connection pattern disposed on the isolation pattern and in a trench penetrating the first surface of the substrate, and a first impurity region disposed in the substrate and adjacent to the first surface of the substrate. A first sidewall of the conductive connection pattern is in contact with the first impurity region. A dopant included in the conductive connection pattern includes the same element as an impurity doped in the first impurity region.

First claim

What is claimed is:

1. An image sensor, comprising:
a substrate having a first surface and a second surface facing away from each other;
a plurality of photoelectric conversion regions disposed in the substrate;
an isolation pattern disposed in the substrate between the photoelectric conversion regions;
a conductive connection pattern disposed on the isolation pattern and in a trench, the trench penetrating the first surface of the substrate; and
a first impurity region disposed in the substrate and adjacent to the first surface of the substrate,
wherein a first sidewall of the conductive connection pattern is in contact with the first impurity region,
wherein a dopant included in the conductive connection pattern includes a same element as an impurity doped in the first impurity region.

2. The image sensor of claim 1 , further comprising:
a second impurity region in contact with a second sidewall of the conductive connection pattern, the second sidewall facing the first sidewall,
wherein the dopant included in the conductive connection pattern includes the same element as an impurity doped in the second impurity region.

3. The image sensor of claim 2 , wherein
the substrate includes a first pixel region and a second pixel region that are defined by the isolation pattern,
the first impurity region is disposed in the first pixel region, and
the second impurity region is disposed in the second pixel region of the substrate.

4. The image sensor of claim 3 , wherein each of the first impurity region and the second impurity region includes a ground region.

5. The image sensor of claim 3 , wherein each of the first impurity region and the second impurity region includes a floating diffusion region.

6. The image sensor of claim 3 , further comprising:
a first gate pattern disposed on the first surface of the substrate in the first pixel region; and
a second gate pattern disposed on the first surface of the substrate in the second pixel region,
wherein, in a plan view, the conductive connection pattern is disposed between the first gate pattern and the second gate pattern,
wherein, in the plan view, the first impurity region is disposed between the first gate pattern and the conductive connection pattern,
wherein, in the plan view, the second impurity region is disposed between the second gate pattern and the conductive connection pattern.

7. The image sensor of claim 2 , wherein the conductive connection pattern is electrically connected to the first impurity region and the second impurity region.

8. The image sensor of claim 1 , wherein the isolation pattern comprises:
a conductive isolation pattern; and
a dielectric isolation pattern disposed on a sidewall and a top surface of the conductive isolation pattern,
wherein the conductive connection pattern vertically overlaps the conductive isolation pattern.

9. The image sensor of claim 8 , wherein the conductive connection pattern is electrically insulated from the conductive isolation pattern.

10. The image sensor of claim 1 , wherein a width of the isolation pattern at the second surface of the substrate is between about 0.03 μm and about 0.08 μm.

11. An image sensor, comprising:
a substrate having a first surface and a second surface facing away from each other;
an isolation pattern penetrating the substrate and defining a plurality of pixel regions;
a conductive connection pattern disposed in a trench penetrating the first surface of the substrate, the conductive connection pattern disposed on the isolation pattern; and
a plurality of impurity regions disposed in the substrate and adjacent to the first surface of the substrate,
wherein the impurity regions comprise:
a first impurity region in contact with a first sidewall of the conductive connection pattern; and
a second impurity region in contact with a second sidewall of the conductive connection pattern, the second sidewall facing the first sidewall,

wherein the conductive connection pattern includes a doped semiconductor material.

12. The image sensor of claim 11 , wherein a dopant included in the conductive connection pattern includes a same element as an impurity doped in the first and second impurity regions.

13. The image sensor of claim 11 , wherein the isolation pattern comprises:
a dielectric isolation pattern; and
a conductive isolation pattern disposed in the dielectric isolation pattern,
wherein the conductive connection pattern vertically overlaps the conductive isolation pattern.

14. The image sensor of claim 11 , further comprising:
a contact plug disposed on one of the conductive connection pattern, the first impurity region, and the second impurity region,
wherein the contact plug is electrically connected to the conductive connection pattern, the first impurity region, and the second impurity region.

15. The image sensor of claim 11 , further comprising:
a wiring pattern disposed on the isolation pattern,
wherein the wiring pattern is connected to a third sidewall of the conductive connection pattern,
wherein the third sidewall neighbors the first sidewall and the second sidewall.

16. An image sensor, comprising:
a substrate having a first surface and a second surface facing away from each other;
an isolation pattern defining a first pixel region and a second pixel region in the substrate;
a photoelectric conversion region disposed in each of the first and second pixel regions in the substrate;
a first impurity region disposed in the first pixel region of the substrate and adjacent to the first surface of the substrate;
a second impurity region disposed in the second pixel region of the substrate and adjacent to the first surface of the substrate;
a conductive connection pattern disposed between the first impurity region and the second impurity region, the conductive connection pattern disposed in a trench penetrating the first surface of the substrate;
a gate pattern disposed on the first surface of the substrate and spaced apart from the conductive connection pattern;
a gate dielectric pattern disposed between the substrate and the gate pattern;
an interconnection layer disposed on the first surface of the substrate, the interconnection layer including a plurality of dielectric layers and a wiring structure;
a color filter disposed on the second surface of the substrate; and
a micro-lens disposed on the color filter,
wherein the isolation pattern includes a dielectric isolation pattern and a conductive isolation pattern disposed in the dielectric isolation pattern,
wherein the conductive connection pattern vertically overlaps the conductive isolation pattern,
wherein the conductive connection pattern is in physical contact with and is electrically connected to the first impurity region and the second impurity region.

17. The image sensor of claim 16 , wherein the conductive connection pattern includes a doped semiconductor material.

18. The image sensor of claim 16 , wherein a dopant included in the conductive connection pattern includes a same element as an impurity doped in the first and second impurity regions.

19. The image sensor of claim 16 , wherein
the first impurity region includes a ground region, and
the second impurity region includes a ground region.

20. The image sensor of claim 16 , wherein
the dielectric isolation pattern is disposed between the conductive connection pattern and the conductive isolation pattern, and
the conductive connection pattern is electrically insulated from the conductive

Assignees

• Samsung Electronics Co Ltd

Inventors

• Ha Hyoun-Jee
• Kim Changhwa

Classifications

• H01L27/1463

  Electricity · mapped topic

• H01L27/14603 Primary

  Electricity · mapped topic

• H01L27/14636

  Electricity · mapped topic

• H01L27/14689

  Electricity · mapped topic

• H01L27/14614

  Electricity · mapped topic