Apparatus and method for reducing cross talk in image sensors

US8941204B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8941204-B2
Application numberUS-201213458827-A
CountryUS
Kind codeB2
Filing dateApr 27, 2012
Priority dateApr 27, 2012
Publication dateJan 27, 2015
Grant dateJan 27, 2015

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Abstract

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A method for reducing cross talk in image sensors comprises providing a backside illuminated image sensor wafer, forming an isolation region in the backside illuminated image sensor wafer, wherein the isolation region encloses a photo active region, forming an opening in the isolation region from a backside of the backside illuminated image sensor wafer and covering an upper terminal of the opening with a dielectric material to form an air gap embedded in the isolation region of the backside illuminated image sensor wafer.

First claim

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What is claimed is: 1. An apparatus comprising: a substrate having a first side and a second side, wherein the first side is adjacent to a photo active region; an isolation region disposed adjacent to the photo active region in the first side of the substrate; an air gap embedded in the isolation region, wherein the air gap is encapsulated by a dielectric material, and wherein the air gap is adjacent to the second side of the substrate, and wherein a bottom of the air gap is l…

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What does patent US8941204B2 cover?
A method for reducing cross talk in image sensors comprises providing a backside illuminated image sensor wafer, forming an isolation region in the backside illuminated image sensor wafer, wherein the isolation region encloses a photo active region, forming an opening in the isolation region from a backside of the backside illuminated image sensor wafer and covering an upper terminal of the ope…
Who is the assignee on this patent?
Lin Jeng-Shyan, Yaung Dun-Nian, Liu Jen-Cheng, and 4 more
What technology area does this patent fall under?
Primary CPC classification H10F39/199. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Jan 27 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).