Inspection system

Patent metadata

Field	Value
Publication number	US-11499992-B2
Application number	US-201916695830-A
Country	US
Kind code	B2
Filing date	Nov 26, 2019
Priority date	Nov 27, 2018
Publication date	Nov 15, 2022
Grant date	Nov 15, 2022

Abstract

An inspection system includes a plurality of inspection apparatuses, and a data processing apparatus capable of communicating with the plurality of inspection apparatuses. The data processing apparatus includes a storage part storing a model that determines a causal relationship between an apparatus parameter related to setting of the plurality of inspection apparatuses and index data obtained when the plurality of inspection apparatuses are operated, a collection part collecting the apparatus parameter and the index data, a determination part determining whether or not the index data is included in a predetermined allowable range, and a calculation part calculating an adjustment amount for adjusting the apparatus parameter, based on the apparatus parameter and the index data, and the model, when it is determined that the index data is not included in the predetermined allowable range.

First claim

What is claimed is:

1. An inspection system comprising:
a plurality of inspection apparatuses; and
a data processing apparatus configured to connect and communicate with the plurality of inspection apparatuses via a network, and including a hardware processor in which a data analysis program is installed,
wherein each inspection apparatus includes:
a terminal to which an apparatus parameter related to setting of the inspection apparatus is inputted; and
a data storage configured to store a data group including the apparatus parameter and index data obtained when the inspection apparatus is operated,
wherein the terminal is further configured to transmit the data group stored in the data storage to the data processing apparatus via the network,

wherein the data processing apparatus comprises:
a data analyzer executed by the hardware processor, and configured to analyze the data group received from the plurality of the inspection apparatuses so as to create analysis result data and transmit the analysis result data to the plurality of the inspection apparatuses,
wherein the data analyzer is further:
configured to receive and collect the apparatus parameter and the index data from at least one of the plurality of inspection apparatuses;
configured to create a model that determines a causal relationship between the apparatus parameter and the index data obtained from the plurality of inspection apparatuses;
configured to determine whether or not the index data collected by the data analyzer is included in a predetermined allowable range;
configured to calculate an adjustment amount for adjusting the apparatus parameter, based on the apparatus parameter and the index data collected by the data analyzer and the model created by the data analyzer, when the data analyzer determines that the index data is not included in the predetermined allowable range; and

wherein the data analyzer includes:
a transmitter configured to transmit the adjustment amount of the apparatus parameter to the inspection apparatus; and
a storage configured to store the model,

wherein upon receiving the adjustment amount of the apparatus parameter from the data processing apparatus, the inspection apparatus is configured to adjust the apparatus parameter based on the adjustment amount and perform inspection operation based on the adjusted apparatus parameter.

2. The inspection system of claim 1 , wherein the data analyzer creates the model by multivariate analysis or machine learning.

3. The inspection system of claim 2 , wherein the transmitter is further configured to output a warning signal indicating that the inspection apparatus related to the index data not included in the predetermined allowable range is abnormal, when the data analyzer determines that the index data are not included in the predetermined allowable range.

4. The inspection system of claim 3 , wherein the apparatus parameter of the inspection apparatus related to the index data not included in the predetermined allowable range is adjusted based on the adjustment amount calculated from the data analyzer.

5. The inspection system of claim 1 , wherein the transmitter is further configured to output a warning signal indicating that the inspection apparatus related to the index data not included in the predetermined allowable range is abnormal, when the data analyzer determines that the index data are not included in the predetermined allowable range.

6. The inspection system of claim 1 , wherein the apparatus parameter of the inspection apparatus related to the index data not included in the predetermined allowable range is adjusted based on the adjustment amount calculated from the data analyzer.

Assignees

• Tokyo Electron Ltd

Inventors

• Watanabe Shinjiro

Classifications

• H04N23/695

  Control of camera direction for changing a field of view, e.g. pan, tilt or based on tracking of objects · CPC title

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P74/207 Primary

  Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics · CPC title

• G06N20/00

  Machine learning · CPC title

• G01R31/2846 Primary

  using hard- or software simulation or using knowledge-based systems, e.g. expert systems, artificial intelligence or interactive algorithms · CPC title