Resist underlayer film composition, patterning process, and compound
US-10156788-B2 · Dec 18, 2018 · US
US11498998B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11498998-B2 |
| Application number | US-202016819745-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 16, 2020 |
| Priority date | Mar 14, 2019 |
| Publication date | Nov 15, 2022 |
| Grant date | Nov 15, 2022 |
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The present disclosure relates to a composition that includeswhere R1 and R2 include at least one of a hydrogen, a hydroxyl group, and/or an alkyl group, R3 and R4 include at least one of hydrogen, a hydroxyl group, an alkyl group, and/or a ketone, and 1≤n≤2000.
Opening claim text (preview).
What is claimed is: 1. A composition comprising: at least one of wherein 1<n≤2000. 2. The composition of claim 1 , further comprising an end-group derived from an alcohol. 3. The composition of claim 1 , wherein the composition is bioderived as determined by ASTM-D6866. 4. A method comprising: a first reacting of a diether with a diol to form a polymer comprising at least one of wherein 1<n≤2000. 5. The method of claim 4 , further comprising: a second reacting of a cyclic ketone with an alcohol to form the diether, wherein: the second reacting is performed prior to the first reacting. 6. The method of claim 5 , wherein the first reacting produces the alcohol. 7. The method of claim 5 , further comprising: prior to the second reacting, separating the cyclic ketone from a mixture comprising compounds derived from catalytic fast pyrolysis. 8. The method of claim 4 , wherein the separating comprises at least one of distillation or liquid-liquid separation.
Condensation polymers of aldehydes or ketones with monomers not provided for in the groups C08G4/00 - C08G14/00 (with polynitriles C08G69/38) · CPC title
of ketones · CPC title
containing OH groups · CPC title
by continuous methods · CPC title
Saturated aliphatic units · CPC title
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