Optically pumped sensors or references with die-to-package cavities
US-9343447-B2 · May 17, 2016 · US
US11474129B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11474129-B2 |
| Application number | US-202017087988-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 3, 2020 |
| Priority date | Nov 8, 2019 |
| Publication date | Oct 18, 2022 |
| Grant date | Oct 18, 2022 |
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A method of making an array of vapor cells for an array of magnetometers includes providing a plurality of separate vapor cell elements, each vapor cell element including at least one vapor cell; arranging the vapor cell elements in an alignment jig to produce a selected arrangement of the vapor cells; attaching at least one alignment-maintaining film onto the vapor cell elements in the alignment jig; transferring the vapor cells elements and the at least one alignment-maintaining film from the alignment jig to a mold; injecting a bonding material into the mold and between the vapor cell elements to bond the vapor cell elements in the selected arrangement; removing the at least one alignment maintaining film from the vapor cell elements; and removing the bonded vapor cells elements in the selected arrangement from the mold to provide the array of vapor.
Opening claim text (preview).
What is claimed as new and desired to be protected by Letters Patent of the United States is: 1. A method of making an array of vapor cells for an array of magnetometers, the method comprising: providing a plurality of separate vapor cell elements, each vapor cell element comprising at least one vapor cell; arranging the vapor cell elements in an alignment jig to produce a selected arrangement of the vapor cells; attaching at least one alignment-maintaining film onto the vapor cell elements in the alignment jig; transferring the vapor cells elements and the at least one alignment-maintaining film from the alignment jig to a mold; injecting a bonding material into the mold and between the vapor cell elements to bond the vapor cell elements in the selected arrangement; removing the at least one alignment maintaining film from the vapor cell elements; and removing the bonded vapor cells elements in the selected arrangement from the mold to provide the array of vapor cells. 2. The method of claim 1 , wherein at least one of the vapor cell elements comprises multiple vapor cells. 3. The method of claim 1 , wherein the alignment jig comprises a plurality of spacing features to separate the vapor cell elements in the selected arrangement. 4. The method of claim 3 , wherein each of the spacing features provides a same separation distance between the vapor cell elements separated by the spacing features. 5. The method of claim 3 , wherein at least two of the spacing features provide a different separation distance between the vapor cell elements separated by those spacing features. 6. The method of claim 3 , wherein the spacing features comprise partially drafted faces to facilitate insertion of the vapor cell elements. 7. The method of claim 3 , wherein the spacing features have a width that is thinner than a final separation distance between the vapor cell elements separated by the spacing features. 8. The method of claim 1 , wherein attaching the at least one alignment-maintaining film comprises attaching a first alignment-maintaining film onto the vapor cell elements in the alignment jig and then attaching a second alignment-maintaining film on an opposite side of the vapor cell elements from the first alignment-maintaining film. 9. The method of claim 8 , further comprising removing the vapor cell elements from the alignment jig prior to attaching the second alignment-maintaining film. 10. The method of claim 1 , wherein the bonding material is epoxy. 11. The method of claim 1 , wherein the bonding material is a thermally conductive epoxy. 12. The method of claim 1 , wherein the bonding material is a flexible epoxy. 13. The method of claim 1 , wherein the selected arrangement comprises different spacing between at least two pairs of adjacent vapor cell elements. 14. The method of claim 1 , wherein the selected arrangement comprises an irregular arrangement of the vapor cell elements. 15. The method of claim 1 , wherein the selected arrangement comprises at least one of the vapor cell elements raised or lowered relative to an adjacent one of the vapor cell elements. 16. The method of claim 1 , wherein the selected arrangement comprises at least one of the vapor cells having a different size from another one of the vapor cells. 17. The method of claim 1 , wherein each of the vapor cells comprises optical windows, wherein the selected arrangement comprises at least one of the vapor cells having a different orientation of the optical windows from another one of the vapor cells. 18. The method of claim 1 , further comprising locating an alkali metal droplet in a specified location in each of the vapor cells. 19. The method of claim 18 , wherein locating the alkali metal droplet comprises controlling a temperature of the array of vapor cells to locate the alkali metal droplets in the specified locations. 20. The method of claim 19 , wherein controlling the temperature comprises applying a temperature gradient to the array of vapor cells to locate the alkali metal droplets in the specified locations.
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