BAW biosensor including heater and temperature sensor and methods for using the same

Patent metadata

Field	Value
Publication number	US-11467126-B2
Application number	US-201716321712-A
Country	US
Kind code	B2
Filing date	Jul 26, 2017
Priority date	Jul 29, 2016
Publication date	Oct 11, 2022
Grant date	Oct 11, 2022

Abstract

A device including at least one sensing bulk acoustic wave (BAW) resonator including a sensing surface; a fluid channel, wherein the sensing surface of the at least one sensing BAW resonator is disposed adjacent to or within the fluid channel; at least one resistive heater; and at least one temperature detector, wherein the at least one temperature detector is configured to monitor the temperature adjacent to the at least one BAW resonator and affect a current to be passed through the at least one resistive heater.

First claim

The invention claimed is:

1. A device comprising:
at least one sensing bulk acoustic wave (BAW) resonator comprising a sensing surface;
a fluid channel comprising a first region and second region, wherein the sensing surface of the at least one sensing BAW resonator is disposed adjacent to or within the second region of the fluid channel;
at least one resistive heater positioned adjacent to the first region of the fluid channel, the at least one resistive heater comprising aluminum (Al), copper (Cu), tungsten (W), gold (Au), platinum (Pt), palladium (Pd), molybdenum (Mo), or combinations thereof; and
at least one temperature detector positioned adjacent to the first region of the fluid channel,
wherein the at least one temperature detector is configured to monitor the temperature adjacent to the first region of the fluid channel and affect a current to be passed through the at least one resistive heater.

2. The device according to claim 1 , wherein the at least one temperature detector is a thermocouple, a thermistor, or a resistance temperature detector.

3. The device according to claim 1 , wherein the at least one temperature detector is a resistance temperature detector that has a serpentine structure with an overall length from 17,500 μm to 19,500 μm, an average width from 8 μm to 12 μm and an average thickness from 0.05 to 0.15 μm.

4. The device according to claim 3 , wherein the resistance temperature detector has a calculated finite resistance value (R) from 600Ω to 800 Ω.

5. The device according to claim 3 , wherein the resistance temperature detector comprises aluminum (Al), copper (Cu), tungsten (W), gold (Au), platinum (Pt), palladium (Pd), molybdenum (Mo), or combinations thereof.

6. The device according to claim 3 , wherein the resistance temperature detector comprises aluminum (Al).

7. The device according to claim 1 , further comprising a second resistance temperature detector.

8. The device according to claim 7 , wherein the second resistance temperature detector is positioned adjacent to the first region of the fluid channel.

9. The device according to claim 1 , wherein the at least one resistive heater has a serpentine structure with an overall length from 40,000 μm to 85,000 μm, an average width from 15 μm to 35 μm, and an average thickness from 0.05 to 0.15 μm.

10. The device according to claim 9 , wherein the resistive heater has a calculated finite resistance value (R) from 700Ω to 1200 Ω.

11. The device according to claim 1 , wherein the resistive heater can generate approximately 10 to 50 mW of power.

12. The device according to claim 1 , wherein the device affords temperature control of about +0.001 K.

13. A device comprising a device according to claim 1 , wherein the device is housed on a sensor platform.

14. The device according to claim 13 , wherein the sensor platform comprises at least a second resistive heater.

15. A method of controlling the temperature in the vicinity of at least one sensing BAW resonator, wherein a sensing surface of the at least one sensing BAW resonator is disposed adjacent to or within a second region of a fluid channel, the method comprising:
monitoring the temperature in the vicinity of the sensing BAW resonator utilizing a first temperature detector positioned adjacent to a first region of the fluid channel; and
passing a current through a first resistive heater positioned adjacent to the first region of the fluid channel and located adjacent the at least one sensing BAW resonator, the resistive heater comprising aluminum (Al), copper (Cu), tungsten (W), gold (Au), platinum (Pt), palladium (Pd), molybdenum (Mo), or combinations thereof, the current based on the temperature monitored by the first temperature detector.

16. The method according to claim 15 , wherein the first temperature detector and the first resistive heater are electrically coupled.

17. The method according to claim 15 further comprising monitoring the temperature in the vicinity of the sensing BAW resonator utilizing the first temperature detector a second time.

18. The method according to claim 17 further comprising passing a current through the first resistive heater located adjacent the at least one sensing BAW resonator, the current based on the temperature monitored by the first temperature detector the second time.

19. The method according to claim 15 further comprising sequentially repeating the monitoring and passing steps.

20. A device comprising:
at least one sensing bulk acoustic wave (BAW) resonator comprising a sensing surface;
a fluid channel comprising a first region, a second region, and a third region,
wherein the third region connects the first region and the second region to form a “U” shaped fluid channel,
wherein the sensing surface of the at least one sensing BAW resonator is disposed adjacent to or within the second region of the fluid channel;

at least one resistive heater positioned adjacent to the first region of the fluid channel, the at least one resistive heater comprising aluminum (Al), copper (Cu), tungsten (W), gold (Au), platinum (Pt), palladium (Pd), molybdenum (Mo), or combinations thereof; and
at least one temperature detector positioned adjacent to the first region of the fluid channel,
wherein the at least one temperature detector is configured to monitor the temperature adjacent to the first region of the fluid channel and affect a current to be passed through the at least one resistive heater.

Assignees

• Qorvo Us Inc

Inventors

• Bell Florian
• Morton Rick
• Randle William Crawford
• Rombach Cody William
• Barton Donna Kay

Classifications

• G01N29/222

  Constructional or flow details for analysing fluids (optoacoustic fluid cells G01N29/2425) · CPC title

• G01N30/96 Primary

  using ion-exchange (G01N30/02, G01N30/90 take precedence) · CPC title

• G01N29/326

  compensating for temperature variations · CPC title

• G01N2291/0256

  Adsorption, desorption, surface mass change, e.g. on biosensors · CPC title

• G01N2291/0426

  Bulk waves, e.g. quartz crystal microbalance, torsional waves · CPC title