Distributed oxide lens for beam shaping

Patent metadata

Field	Value
Publication number	US-11456575-B2
Application number	US-201916719270-A
Country	US
Kind code	B2
Filing date	Dec 18, 2019
Priority date	Aug 28, 2017
Publication date	Sep 27, 2022
Grant date	Sep 27, 2022

Abstract

A vertical-cavity surface-emitting laser (VCSEL) may include a substrate and a set of epitaxial layers on the substrate. The set of epitaxial layers may include a first mirror and a second mirror, an active region between the first mirror and the second mirror, and an oxidation layer to provide optical and electrical confinement in the VCSEL. The oxidation layer may be near the first mirror. The set of epitaxial layers may include an oxide lens to control a characteristic of an output beam emitted by the VCSEL. The oxide lens may be separate from the oxidation layer, and may be a lens that is separate from the first mirror and from the second mirror.

First claim

What is claimed is:

1. A vertical-cavity surface-emitting laser (VCSEL), comprising:
a substrate; and
a set of epitaxial layers on the substrate, the set of epitaxial layers including:
a first mirror and a second mirror;
an active region between the first mirror and the second mirror;
an oxidation layer to provide optical and electrical confinement in the VCSEL,
wherein the oxidation layer is near the first mirror; and

an oxide lens to control a characteristic of an output beam emitted by the VCSEL,
wherein the oxide lens is separate from the oxidation layer,
wherein the oxide lens has an oxidation profile that is substantially asymmetric about an axis extending in a longitudinal direction of the VCSEL through a center of an optical aperture of the oxidation layer, such that oxidized layers of the oxide lens are on only one lateral side of the center with respect to the axis, and
wherein the oxide lens is a lens that is separate from the first mirror and from the second mirror.

2. The VCSEL of claim 1 , wherein the oxide lens is on a mirror surface via which the output beam is to be emitted, the mirror surface being either a surface of the first mirror or a surface of the second mirror.

3. The VCSEL of claim 2 , wherein the VCSEL is a bottom-emitting VCSEL, the first mirror is a top mirror, the second mirror is a bottom mirror, and the mirror surface is a surface of the bottom mirror,
wherein the oxide lens is between the substrate and the bottom mirror.

4. The VCSEL of claim 2 , wherein the VCSEL is a top-emitting VCSEL, the first mirror is a top mirror, the second mirror is a bottom mirror, and the mirror surface is a surface of the top mirror.

5. The VCSEL of claim 1 , wherein the set of epitaxial layers further includes a spacer layer between the active region and the oxide lens,
wherein the spacer layer is to provide separation between the active region and the oxide lens.

6. The VCSEL of claim 1 , wherein the characteristic of the output beam is to be controlled based on at least one of:
a number of layers included in the oxide lens,
thicknesses of one or more layers included in the oxide lens,
distances between particular pairs of layers included in the oxide lens,
composition of layers included in the oxide lens,
oxidation lengths of oxidized layers included in the oxide lens,
the oxidation profile of the oxide lens, or
a distance between the oxide lens and the active region.

7. The VCSEL of claim 1 , wherein the oxide lens is to control an effective index of refraction encountered by the output beam.

8. The VCSEL of claim 1 , wherein the characteristic to be controlled by the oxide lens is a beam divergence of the output beam.

9. The VCSEL of claim 1 , wherein the characteristic to be controlled by the oxide lens is a beam steering angle of the output beam.

10. The VCSEL of claim 1 , wherein the characteristic to be controlled by the oxide lens is a number of optical modes or a shape of an optical mode pattern.

11. The VCSEL of claim 1 , wherein the oxide lens includes a set of epitaxial layer pairs, each epitaxial layer pair including an oxidized layer and a non-oxidized layer.

12. The VCSEL of claim 11 , wherein an oxidation length of a first oxidized layer, included in a first epitaxial layer pair of the set of epitaxial layer pairs, is different from an oxidation length of a second oxidized layer included in a second epitaxial layer pair of the set of epitaxial layer pairs.

13. The VCSEL of claim 1 , wherein the oxidation profile is associated with providing beam steering away from the VCSEL.

14. A method, comprising:
forming a first mirror, a second mirror, an active region, and an oxidation layer,
wherein the active region is formed between the first mirror and the second mirror,
wherein the oxidation layer is formed near the first mirror, and
wherein the oxidation layer is to provide optical and electrical confinement of a vertical-cavity surface-emitting laser (VCSEL); and

forming an oxide lens,
wherein the oxide lens is separate from the oxidation layer,
wherein the oxide lens is a lens that is separate from the first mirror and from the second mirror,
wherein the oxide lens has an oxidation profile that is substantially asymmetric about an axis extending in a longitudinal direction of the VCSEL through a center of an optical aperture of the oxidation layer, such that oxidized layers of the oxide lens are on only one lateral side of the center with respect to the axis, and
wherein the oxide lens is to control a characteristic of an output beam emitted by the VCSEL.

15. The method of claim 14 , wherein the oxide lens is formed on a mirror surface via which an output beam is to be emitted by the VCSEL, the mirror surface being either a surface of the first mirror or a surface of the second mirror.

16. The method of claim 14 , further comprising:
forming a spacer layer associated with providing separation between the active region and the oxide lens,
wherein the spacer layer is between the active region and the oxide lens.

17. The method of claim 14 , wherein the characteristic of the output beam is to be controlled based on at least one of:
a number of layers included in the oxide lens,
thicknesses of one or more layers included in the oxide lens,
distances between particular pairs of layers included in the oxide lens,
composition of layers included in the oxide lens,
oxidation lengths of oxidized layers included in the oxide lens,
the oxidation profile of the oxide lens, or
a distance between the oxide lens and the active region.

18. An emitter wafer, comprising:
a substrate; and
a set of epitaxial layers on the substrate, the set of epitaxial layers including:
an active region between a first mirror and a second mirror;
an oxidation layer near the first mirror; and
an oxide lens,
wherein the oxide lens is separated from the oxidation layer by at least a portion of the first mirror or at least a portion of the second mirror,
wherein the oxide lens is a lens that is separate from the first mirror and from the second mirror,
wherein the oxide lens has an oxidation profile that is substantially asymmetric about an axis extending in a longitudinal direction of an emitter in the emitter wafer, through a center of an optical aperture of the oxidation layer, such that oxidized layers of the oxide lens are on only one lateral side of the center with respect to the axis, and
wherein the oxide lens is to control an effective index of refraction encountered by an output beam of the emitter in association with controlling a characteristic of the output beam.

19. The emitter wafer of claim 18 , wherein the characteristic of the output beam is to be controlled based on at least one of:
a number of layers included in the oxide lens,
thicknesses of one or more layers included in the oxide lens,
distances between particular pairs of layers included in the oxide lens,
composition of layers included in the oxide lens,
oxidation lengths of the oxidized layers included in the oxide lens,
the oxidation profile of the oxide lens, or
a distance between the oxide lens and the active region.

20. The emitter wafer of claim 18 , wherein the oxidation profile is associated with providing beam steering away from the emitter.

Assignees

• Lumentum Operations Llc

Inventors

• Yuen Albert
• Hegblom Eric R

Classifications

• H01S5/18322

  Position of the structure · CPC title

• H01S5/18388 Primary

  Lenses · CPC title

• H01S5/18305

  with emission through the substrate, i.e. bottom emission · CPC title

• H01S5/18358

  containing spacer layers to adjust the phase of the light wave in the cavity · CPC title

• H01S5/18333

  only above the active layer · CPC title