Position and temperature monitoring of ALD platen susceptor

Patent metadata

Field	Value
Publication number	US-11430680-B2
Application number	US-201916388132-A
Country	US
Kind code	B2
Filing date	Apr 18, 2019
Priority date	Mar 15, 2013
Publication date	Aug 30, 2022
Grant date	Aug 30, 2022

Abstract

Apparatus and methods of measuring and controlling the gap between a susceptor assembly and a gas distribution assembly are described. Apparatus and methods for positional control and temperature control for wafer transfer purposes are also described.

First claim

What is claimed is:

1. A deposition apparatus comprising:
a gas distribution assembly having a front surface and an edge with a reference mark;
a susceptor assembly spaced from the gas distribution assembly to rotate a plurality of substrates around a central axis, the susceptor assembly having a top surface with a plurality of recesses to hold a plurality of substrates, a bottom surface and an edge, the top surface of the susceptor assembly and the front surface of the gas distribution assembly defining a gap;
a camera having a field of view including the edge of the susceptor assembly, the edge of the gas distribution assembly, the reference mark, and the gap; and
a controller connected to the camera and configured to determine the gap between the top surface of the susceptor assembly and the front surface of the gas distribution assembly by measuring a distance from the reference mark to the top surface of the susceptor assembly.

2. The apparatus of claim 1 , wherein the camera comprises at least three cameras spaced about an interior region of the deposition apparatus.

3. The apparatus of claim 2 , wherein the controller is configured to determine the gap at each camera position while the susceptor assembly remains stationary.

4. The apparatus of claim 2 , wherein the controller is configured to determine a plane formed by the susceptor assembly relative to a plane formed by the gas distribution assembly.

5. The apparatus of claim 1 , wherein the controller is configured to determine the planarity of the susceptor assembly based on a plurality of images from the camera taken during a processing cycle in which the susceptor assembly rotates.

6. The apparatus of claim 1 , wherein the controller includes a feedback circuit in communication with at least one gap control actuation device, the controller configured to provide a signal to the at least one gap control actuation device to move the susceptor assembly to change the gap.

7. A deposition apparatus comprising:
a gas distribution assembly having a front surface and an edge with a reference mark;
a susceptor assembly spaced from the gas distribution assembly to rotate a plurality of substrates around a central axis, the susceptor assembly having a top surface, a bottom surface, and an edge, the top surface and the front surface defining a gap, the top surface having a plurality of recesses to hold a plurality of substrates, the bottom surface having a reference point having a shape involving at least two vertices having a known distance;
a side camera having a field of view including the edge of the susceptor assembly, the edge of the gas distribution assembly, the reference mark, and the gap;
a bottom camera with a field of view directed at the bottom surface of the susceptor assembly, the reference point within the field of view of the bottom camera; and
a controller connected to the side camera and the bottom camera, the controller configured to:
determine the gap by measuring a distance from the reference mark to the top surface of the susceptor assembly; and
determine one or more of a distance of the bottom camera from the susceptor assembly or the gap by measure a distance between the at least two vertices.

8. The apparatus of claim 7 , wherein the bottom camera comprises at least three cameras spaced about an interior region of the deposition apparatus and the reference point comprises at least three reference points, each reference point positioned within a field of view of at least one camera.

9. The apparatus of claim 8 , wherein the controller is configured to determine the gap at each reference point position while the susceptor assembly remains stationary.

10. The apparatus of claim 8 , wherein the controller is configured to determine the planarity of the susceptor assembly based on a plurality of images from the at least three cameras taken during a processing cycle in which the susceptor assembly rotates.

11. The apparatus of claim 7 , wherein the controller includes a feedback circuit in communication with at least one gap control actuation device, the controller configured to provide a signal to the at least one gap control actuation device to move one or more of the susceptor assembly or the gas distribution assembly to change the gap.

12. The apparatus of claim 8 , wherein the controller is configured to use a plurality of measurements from at least one of the at least three cameras taken during a processing cycle in which the susceptor assembly rotates to determine the planarity of the susceptor assembly adjacent the at least one of at least three cameras during the processing cycle.

Assignees

• Applied Materials Inc

Inventors

• Ravid Abraham
• Griffin Kevin
• Yudovsky Joseph
• Gangakhedkar Kaushal
• Dzilno Dmitry A
• Minkovich Alex

Classifications

• H10P72/7621

  characterised by supporting two or more semiconductor substrates · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0602

  Temperature monitoring · CPC title

• H10P72/0606 Primary

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• C23C16/4584

  the substrate being rotated · CPC title