System for monitoring and controlling an integrated circuit testing machine

Patent metadata

Field	Value
Publication number	US-11428735-B1
Application number	US-202016817564-A
Country	US
Kind code	B1
Filing date	Mar 12, 2020
Priority date	Mar 14, 2019
Publication date	Aug 30, 2022
Grant date	Aug 30, 2022

Abstract

A system for monitoring and controlling an IC testing machine includes a vibration sensor, a sensor interface, and a processor coupled to the sensor interface. The vibration sensor is in mechanical communication with an IC testing machine to develop an electrical vibration signal representing mechanical vibrations generated by the operation of the IC testing machine. The sensor interface processes the vibration signal to develop vibration data that can be processed by the processor to determine whether the vibration data is indicative of an operational anomaly and, if so, to generate a machine control signal to correct an operation of the IC testing machine. Multiple vibration sensors can be used to increase the amount of vibration data available for analysis.

First claim

What is claimed is:

1. A system for monitoring and controlling comprising:
a vibration sensor adapted for mechanical communication with a surface of an integrated circuit (IC) testing machine to develop an electrical vibration signal at a sensor output representing mechanical vibrations generated by the IC testing machine as it is operated, wherein the mechanical communication comprises an elastomeric layer coupled to the vibration sensor and coupled to the surface of the IC testing machine;
a sensor interface having an interface input coupled to the sensor output, the sensor interface being operative to process the vibration signal and to output vibration data on an interface output; and
a processor coupled to the interface output and configured to:
receive the vibration data,
process the vibration data,
determine, based on processing the vibration data, whether the vibration data is indicative of an anomaly being detected in operation of the IC testing machine, and
generate, based on the anomaly being detected, a machine control signal configured to correct an operation of the IC testing machine.

2. The system of claim 1 and further comprising:
a machine interface in electrical communication with the IC testing machine, the machine interface configured to receive the machine control signal and to correct an operation of the IC testing machine by at least one of resetting, clearing, shutting down, and powering down the IC testing machine.

3. The system of claim 1 , wherein processing the vibration data comprises filtering non-peak values, sampling peak values, and averaging the sampled peak values.

4. The system of claim 1 , wherein the vibration sensor comprises an accelerometer configured to sense acceleration along one or more axes.

5. The system of claim 1 and further comprising:
an algorithm fixed in a non-transitory computer readable medium and executable by the processor, the algorithm configured to process the vibration data using at least one of a heuristic, machine learning or neural network technique.

6. A system for monitoring and controlling an integrated circuit testing machine, comprising:
a vibration sensor adapted for mechanical communication with a surface of an integrated circuit (IC) testing machine to develop an electrical vibration signal at a sensor output representing mechanical vibrations generated by the IC testing machine as it is operated;
a sensor interface having an interface input coupled to the sensor output, the sensor interface being operative to process the vibration signal and to output vibration data on an interface output; and
a processor coupled to the interface output and configured to:
receive the vibration data,
process the vibration data,
determine, based on processing the vibration data, whether the vibration data is indicative of an anomaly being detected in operation of the IC testing machine, and
generate, based on the anomaly being detected, a machine control signal configured to correct an operation of the IC testing machine;

wherein the vibration sensor is in mechanical communication with a handler apparatus of the IC testing machine.

7. A system for monitoring and controlling comprising:
a plurality of vibration sensors having a plurality of sensor outputs, where each of the plurality of vibration sensors are adapted for mechanical communication with an integrated circuit (IC) testing machine to develop an electrical vibration signal at a respective one of the plurality of sensor outputs representing mechanical vibrations generated by the IC testing machine as it is operated;
a sensor interface operative to process vibration signals and to output vibration data on an interface output; and
a processor coupled to the interface output and configured to:
receive the vibration data,
process the vibration data,
determine based on processing the vibration data, whether the vibration data is indicative of an anomaly being detected in operation of the IC testing machine, and
generate, based on the anomaly being detected, a machine control signal configured to correct an operation of the IC testing machine;

wherein at least one of the plurality of vibration sensors is in mechanical communication with a handler apparatus of the IC testing machine.

8. The system of claim 7 and further comprising:
a machine interface in electrical communication with the IC testing machine, the machine interface configured to receive the machine control signal and to correct an operation of the IC testing machine by at least one of resetting, clearing, shutting down, and powering down the IC testing machine.

9. The system of claim 7 and further comprising:
an algorithm fixed in a non-transitory computer readable medium executable by the processor, the algorithm configured to process the vibration data using at least one of a heuristic, machine learning or neural network technique.

10. The system of claim 7 , wherein at least one of the plurality of vibration sensors comprises an accelerometer configured to sense acceleration along one or more axes.

11. The system of claim 7 , wherein the plurality of vibration sensors are mechanically coupled to different portions of the IC testing machine.

12. The system of claim 7 , wherein the machine control signal is generated during a selected one of testing of one or more integrated circuits (ICs) by the IC testing machine and operation of the IC testing machine without ICs being tested.

13. The system of claim 7 , wherein the processor is configured to:
determine a time to begin processing the vibration data, the time being within a vibration window that occurs during operation of the IC testing machine.

14. The system of claim 13 , wherein the time depends on the anomaly being detected.

15. The system of claim 7 and further comprising:
processing, using multiple algorithms fixed in a non-transitory computer readable medium executable by the processor, the vibration data from the plurality of vibration sensors to determine whether the vibration data is indicative of multiple anomalies being detected in operation of the IC testing machine.

16. The system of claim 7 , wherein processing the vibration data comprises filtering non-peak values, sampling peak values, and averaging the sampled peak values.

17. A system for monitoring and controlling an integrated circuit testing machine, comprising:
a plurality of vibration sensors having a plurality of sensor outputs, where each of the plurality of vibration sensors are adapted for mechanical communication with an integrated circuit (IC) testing machine to develop an electrical vibration signal at a respective one of the plurality of sensor outputs representing mechanical vibrations generated by the IC testing machine as it is operated;
a sensor interface operative to process the vibration signals and to output vibration data on an interface output; and
a processor coupled to the interface output and configured to:
receive the vibration data,
process the vibration data from the plurality of vibration sensors to determine whether the vibration data is indicative of multiple anomalies being detected in operation of the IC testing machine using multiple algorithms fixed in a non-transitory computer readable medium,
determine based on processing the vibration data, whether the vibration data is indicative of an anomaly being detected in operation of the IC testing machine, and
generate, based on the anomaly being detected, a machine control signal configured to correct an operation of the IC testing machine;

wherein

Assignees

• Maxim Integrated Products

Inventors

• Mijares Ruel Jucoy
• Khandekar Viren
• Leano Edson Macgregor Arca
• Jacala Hilario Sanchez

Classifications

• G01R35/00

  Testing or calibrating of apparatus covered by the other groups of this subclass · CPC title

• G01R31/2881 Primary

  related to environmental aspects other than temperature, e.g. humidity or vibrations · CPC title

• G01R31/2868

  Complete testing stations; systems; procedures; software aspects · CPC title

• G01R1/0491

  for testing integrated circuits on wafers, e.g. wafer-level test cartridge · CPC title

• G01R31/307 Primary

  of integrated circuits · CPC title